PSxx-OME0003CN

IP40 050 -1070 () 3585% RH() AC1000 V50/60Hz1 5 M(DC500 V) 2%F.S.(25 ) 3 2.7 3 m / 2 0.15 mm 0.8 mm CERoHS M5 R06 R07 M50.8 6 1/4 inch ONBR SUS304 PBT (3 m) 41 g 38 g 7 g 3.8 g -12No.PS-OME0003CN-F [V] A B C 0-101kPa 0 -101 kPa 10.1 kPa -101101kPa -100 kPa 101 kPa 0101kPa 0 101 kPa -10.1 kPa -01MPa 0 1 MPa -0.1 MPa -13No.PS-OME0003CN-F PSE53-M5 PSE53R06 R07 (D) PSE53-

Programless Controller Series LECP1

Size End width L :2.0 to 2.4 [mm] End thickness W :0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 66 Series LECP1 Dimensions 38 36.2 85 4.5 for body mounting 18.1 1.2 4.5 110 101 86 4.5 for body mounting CN4 I/O connector CN3 encoder connector CN2 motor connector CN1 power supply connector 67 Programless Controller Series LECP1 Precautions Model Selection Wiring Example

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

CQS

MU Theoretical Output (N) OUT IN DAllowable Kinetic Energy (J) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm 2) Bore size (mm) 12 16 20 25 Bore size (mm) 0.3 0.5 0.7 -X Standard 0.022 0.038 0.055 0.09 84.8 IN 25 42 59 12 6 With rubber bumper 0.043 0.075 0.11 0.18 20113 OUT 34 57 79 151 IN 45 75 106 16 8 Data Minimum Operating Pressure (MPa) 201 OUT 60 101 141

PSxx-OMG0001CN

"-M" ( ) "-M" 13 SI kPaMPa 14 15 () 16 () / ( () ) -29No.PS-OMG0001CN-H OUT1 80mA OUT2 7F.S. 3 ( 4dights ) 1 -30No.PS-OMG0001CN-H PSE3 -100100 kPa 0-101 kPa 0100 kPa 01 MPa 0500 kPa 02 kPa 1 -101101 kPa 10-101 kPa -10100 kPa -0.11 MPa -50500 kPa -0.22 kPa 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa DC1224 V10P-P10 50 mA() PSE30DC15 V(1 M) PSE31DC420mA100 ) 1 26.4V

LEY-OM007

41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

Pressure Sensor for General Fluids

g -12No.PS-OMG0006-D Analogue output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -100 to 100 kPa -100 kPa 100 kPa 0 to 1 MPa 0 1 MPa -0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0006-D Dimensions PSE5601 , PSE56N01 02 N02 Be sure to release the air in the air tube of the cable to the atmosphere.

SFOD-OMT0010

Controller and Peripheral Devices / Specific Product Precautions 101 14.1 Design and selection . 101 14.2 Handling Precautions . 101 14.3 Mounting . 103 14.4 Wiring . 103 3 No.SFOD-OMT0010-B 14.5 Power supply . 104 14.6 Grounding . 104 14.7 Maintenance . 104 15. Troubleshooting . 105 15.1 Operation Errors . 105 15.2 Position / Speed problems . 108 Supplement 1.

Multi-channel Digital Sensor Monitor

(Additional range) Relation between the sensor input and pressure display Pressure range Set value A B Fine differential pressure 0.002 0 kPa 2 kPa Vacuum pressure 0.1 0 kPa -101 kPa Compound pressure F0.1 -100 kPa 100 kPa Low pressure 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa Positive pressure 1.0 0 MPa 1 MPa 1.6 0 MPa 1.6 MPa 2.0 0 MPa 2 MPa 5.0 0 MPa 5 MPa High pressure 10.0 0 MPa 10 MPa 20.0

Compact Vacuum Ejector Series ZA

Symbol Rated pressure range and accuracy Part no. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 Dimensions (mm) Equation L1=16n+53, L2=16n+87 n: Station (Max. 16 stations) L n 2 85 119 150 160.5 3 101 135 162.5 173 4 117 151 175 185.5 5 133 167 187.5 198 6 149 183 212.5 223 7 165 199 225 235.5 8 181 215 237.5 248 9 197 231 262.5 273 10 213 247 275 285.5 11 229 263 287.5 298 12 245 279 300 310.5 13 261 295 325 335.5 14 277

ZR

Display LCD LCD with backlight LED Pressure setting range 101 to 10 kPa 101 to 0 kPa Maximum operating pressure 200 KPa Operation indicator light (Lights up when ON) Green OUT1: Green OUT2: Red Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Fluid Air, Non-corrosive gas Temperature

MXS

(Unit: N) Operating pressure (MPa) Bore size (mm) Rod diameter (mm) Piston area (mm2) Operating direction MXP 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 MG 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 MGP Standard Stroke 15 23 30 38 45 53 75 OUT IN 45 68 90 226 113 136 158 Model Standard stroke (mm) 12 6 MGQ 34 51 68 85 IN 170 102 119 MXS 6 10, 20, 30, 40, 50 80 121 161

Step Motor Controller

Size End width L :2.0 to 2.4 [mm] End thickness W :0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 66 Series LECP1 Dimensions 38 36.2 85 4.5 for body mounting 18.1 1.2 4.5 110 101 86 4.5 for body mounting CN4 I/O connector CN3 encoder connector CN2 motor connector CN1 power supply connector 67 Programless Controller Series LECP1 Precautions Model Selection Wiring Example

ZP

ZQ Lifting force = Theoretical lifting force t ZF Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1) (N) 40 50 63 80 100 78.5 125 Pad diameter (mm) ZP Adsorption area (cm2) 12.6 19.6 31.2 50.3 122.7 85 107 167 264.9 427 667.3 1042.6 ZCU 80 101 157 249.3 401.9 628 981.3 75 94.5 147 233.7 376.8 588.8 920 AMJ 70 88.2 137 218.1 351.7 549.5 858.6 Vacuum pressure (kPa) 65 81.9

Dual Rod Cylinder Series CXSJ/CXS

pressure (MPa) Deflection X mm Rod size (mm) Bore size (mm) direction Piston area (mm2) Operating 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 OUT 11.2 56 CXSJ6 4 4.6 21.7 18.6 15.5 12.4 9.3 IN 6.2 31 110 94.2 78.5 62.8 47.1 OUT 31.4 157 15.7 Extended rod CXSJ10 6 70.0 60.0 50.0 40.0 30.0 IN 20.0 100 10.0 247 212 177 141 106 OUT 70.6 353 35.3 CXSJ15 8 176 151 126 101

Air Slide Table Series MXS

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 57 OUT IN 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 101 OUT IN 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 226 OUT IN 12 6 10,

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 Options Sensor cable (3m) + Connector (1 pc.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80 84 107 Single 96 103 149 Double C6 ( ) 6 One-touch fitting SY560--C6 Closed center 3 position 102 109 155 Exhaust center Pressure center Single 72 76 99 2 position Double 88 95 141 C8 ( ) Closed center SY560--C8 8 One-touch fitting 3 position Exhaust center 94 101