Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Operating port 2 x M5 x 0.8 41 6.3 16.5 20 8.5 13 Other dimensions are the same as basic type. 810 MXQ 1322Air Slide Table Dimensions: MXQ12L / Symmetric Type 1322Basic ZZ Z Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

CP95

5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For double vane style, rotation tolerance of 90 actuators will be for size 10 actuators only. 11-3-6 41 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Construction: 10, 15, 20, 30, 40 Single vane type Standard: CRBU2W10/15/20/30/40-S (3 female threads (one of them is indicated with ) spaced equally apart in 120 are not available for size 10.)

Compact Cylinder with Solenoid Valve/

Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

0.4

3 2 1 D side Stations U side C10 [3(R) EXH port] C10: 10 One-touch fitting Flat ribbon cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41

NCA1

67 103 130 194 261 329 4000 13 38 63 94 119 175 240 310 rods should not be considered a remedy against excessive side loads. 5000 9 34 60 87 110 163 225 289 6000 5 30 56 82 102 152 208 274 8000 4 26 50 76 93 137 188 245 10 3 21 45 70 89 125 172 222 12000 17 41 65 84 118 155 210 16000 9 34 57 75 110 142 188 HOW TO USE THIS TABLE 20 8 28 52 68 103 136 172 30 5 12 39 55 87 120 156 40 11 22

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For double vane style, rotation tolerance of 90 actuators will be for size 10 actuators only. 11-3-6 41 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Construction: 10, 15, 20, 30, 40 Single vane type Standard: CRBU2W10/15/20/30/40-S (3 female threads (one of them is indicated with ) spaced equally apart in 120 are not available for size 10.)

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 D FC GC 6 8 11 15 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 9 12.5 16.5 20 24.5 2.6 3.3 5.1 6.8 8.6 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

RB/RBL/RBQ

C J G5-S Material: Carbon steel Material: Polyurethane (mm) (mm) (mm) CV MM A B M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 B 3.5 4.5 5 6 6.6 C 22 27 32 41 41 h1 25.4 31.2 37 47.3 47.3 C 4 8 8.3 11.3 13.1 C 22 27 32 41 41 B 6 6 6 6 6 h M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 MM Part no. Part no. Part no.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Compact Cylinder

Auto Switch Internal Circuit D-A90(V) Contact protection box OUT () Brown Reed switch Unit: g Weight CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Auto switch model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93(V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93

CP95

5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71

Auto Switch Guide

However, there is no problem in terms of contact output, when an output signal exceeds 1 mA or more. 20D-A90V Data OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30

RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 IY-G02 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 0.2 0.4 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 IY-G03 10 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04 Y-G04 32, 40 10

RLQ

ML1C Rear flange style: RLQG63 D-X 60 80 204-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Data Rod end nut 43.5 4-M8 x 1.25 Cap bolt 8 Double clevis style: RLQD63 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 9-12-17 18 Series RLQ Dimensions: Cylinder with Bypass Piping RLQB32-B RLQB32-F Extension locking, Right-hand piping

Digital Flow Switch ( compatible)

Setting of switch operation 1_P/1_N (page 37) (Selection of display colour) Setting of Add dEC1 dEC2 (page 41) 3. Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 40) (page 37) (page 39) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 38) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 41) 6.

Voltage Monitor for PFMV5

(page 41) Perform the standard value offset under no flow conditions.

PF-OMN0011_C

[F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81] 50 OFF [F82] 51 [*] [F90] 52 OFF [F96] 53 () [F97] 54 OFF [F98] 57 OFF [F99] 58 OFF 30 [F10](41 ) (4 L/min ) OUT1 OUT1 OFF OUT2 -24No.PF-OMN0011CN-C [F 0] 2 [F 0] [RANGE] [F 0] -25No.PF-OMN0011CN-C [F 1] OUT1 OUT1 1.

Digital Flow Switch (Integrated display type) ( compatible)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.