Sine Rodless Cylinder Series REA/REB

23 25 4 x M8 x 1.25 Effective thread depth 12 CY C 0.1 14.5 B S + Stroke 2 2 CX ZZ + Stroke MQ B Q x R S TC x R W X ZZ C D E(h8) I K NA L P TN Model Nil TF RHC REA50 REA63 Rc 1/4 G 1/4 NPT 1/4 0 86 32 53 30-0.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 Rc 1/4 G 1/4 NPT 1/4 0 100 38 66 72.2 26 122 69 32-0.039 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 RZQ Mounting Nuts

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 r y e !5 o !

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

AC Servo Motor Driver (SSCNET /H Type)

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 * Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 -39- 6.6.4 Movement distance Configuration and

39

2 @1 @2 w r Description Replaceable kits list Component parts No.

S

I O N S C L E V I S A N D T R U N N I O N P I N d m t Part No Bore Size D L l .095 0.03 0.018 NCT-P006 6 (1/4) .125 0.81 0.70 .147 0.04 0.029 NCT-P010 10 (3/8) .188 0.94 0.81 .147 0.04 0.029 NCT-P015 15 (5/8) .188 1.25 1.11 S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE N300 DETAILS OF YOUR LOCAL SALES OFFICE

Vacuum Ejector Series ZM

1 y u i o ZR ZM t t e e ZMA V V ZQ r r ZH !1 Left side Right side ZU ZL ZY ZF Clamp rod part no. (1) ZP Manifold part no.

Digital Pressure Switch ( compatible)

range 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtH2 (OUT2 delay time at ON) 0x0403 (1027) 0 R/W Y U16 0x0 (0) Setting of OUT2 delay time at OFF Setting range 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtL2 (OUT2 delay time at OFF) 0x0404 (1028) 0 R/W Y U16 0x0 (0) Setting of digital filter 0x0 ~ 0x0BB8 (0 ~ 3000) 0.01 s increment 0x0406 (1030) 0 R/W FiL (Digital filter) Y U16 0x0 (0) FSC (

XM, XY

Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

SFOD-OMT0010

speed 50mm/s Step2 Step1 Travel distance 100mm Axis 2 speed 71mm/s Travel distance 100mm Axis 1 speed 43mm/s Composite speed 100mm/s Travel distance 100mm Axis 1 speed 71mm/s (0, 0) Axis 1 65 No.SFOD-OMT0010-B Flow chart (Reference) (1) Select input Step No.1.

Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

AC Servo Motor Driver (SSCNET Type)

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 * Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 -37- 6.6.4 Movement distance Configuration and

60

r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

NVEPA|VEFseies

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l

CEx-OMI0064

# 0 0 P R [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. ):0,1,2,3,4 30 - # 0 0 F R [CR] No. # 0 0 F R [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. 31 - # 0 0 S R [CR] No. # 0 0 S R [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. )1 (0.1 )0 32 - # 0 0 O R [CR] No. # 0 0 O R [CR] No. 0

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

1 ("," (23 MM *" ML NN $+, -& DA DB U R H V T L CV C ' ()" J K Q E B ' ()" G MVGQ TA TB S A ' ()" 4" 5," + +"/ 00."* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"

3

Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5 60 79.5 102.5 50 60 VXS24 1/2 29.5 69.5 67 61.5 55 110.5 63.5 79.5 109 50 63.5 VXS25 3/4 32 78 69.5 70 57.5 113 72 82 120.5 52.5 72 VXS26 1 32 81 69.5 72.5 57.5 113 74.5 82 126.5 52.5 74.5 Model Port size P 224 Zero Differential Pressure Type Pilot Operated 2 Port Solenoid Valve VXS Series For Steam Replacement Parts DIN Connector Part