MHZ2/MHZJ2

MHZ 2-10S MHZ 2-10C 12 Pressure 0.7MPa Pressure 0.7MPa 20 10 0.6 MPa 0.6MPa Gripping force N Gripping force N 8 15 MHZ2/Standard MHZJ2/With dust cover 0.5MPa 0.5MPa 6 10 0.4MPa 0.35MPa 0.4MPa 0.35MPa 4 5 2 10 20 30 40 50 60 0 0 10 20 30 40 50 Gripping point L mm Gripping point L mm F F F F MHZ 2-16S MHZ 2-16C 60 Pressure 0.7MPa 40 1N : approx. 0.102kgf 1MPa : approx. 10.2kgf/cm 1N : approx

Series IDG

min (ANR) (SCFM) Note 2) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM) Note 3) Bracket assembly (accessory) part nos.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

L L A L Opposite port side Port side Guide central axis (1 axis type) M1 = F x L For the double axis type, this is the cylinders central axis.

Cylinder with Lock Series CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

CNG

f 8 l ML1C Z + l + Stroke ZZ + l + Stroke DWith rod boot -X 20Data Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 44 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 52.5 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

0.4

F kit P. 572 P kit P. 574 T kit P. 576 L kit P. 578 M kit P. 580 SOL.A 6 19 SOL.B Station 8 13 COM. to CYL port Connector terminal no. 554 Plug-in Unit VQC1000/2000 Series Base Mounted Model Response time Note 2) (ms) Weight (g) High-speed response: 0.95 W Symbol Flow rate characteristics Type of actuation Model 2-position single Series 1 4, 2 (P A, B) 4, 2 5, 3 (A, B R1, R2) Standard

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

HRX-OM-S004

Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port Rc1 (Symbol F: G1, Symbol N: NPT1) Wetted material Stainless, Cupper(Heat exchanger brazing), Brass, Bronze PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, POM, PP, Carbon, Ceramic Temperature range oC 5 to 40 Pressure range MPa 0.3 to 0.5 Required flow 50/60Hz 5 L/min 33 / 34 38 / 40 Facility water system Facility water

10

How to Order 50 L Q 32 F MB With auto switch MDB L Q 32 50 F M9BW With auto switch (Built-in magnet) Made to Order Number of auto switches Mounting type B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis T Center trunnion Nil 2 pcs. S 1 pc. 3 3 pcs. n n pcs.

ITV-E

Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on. 3 CAU TI O N Take t he f ol l ow i ng st eps t o avoi d m al f unct i on due t o noi se. 1) I nst al l a l i ne f i l t er et c. t o t he AC pow er l i ne t o reduce / el i m i nat e pow er suppl y noi se. 2) Avoi d m al f unct i on due t o noi se by i nst al l i ng t hi s product and i t s w

O

Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on. 3 CAU TI O N Take t he f ol l ow i ng st eps t o avoi d m al f unct i on due t o noi se. 1) I nst al l a l i ne f i l t er et c. t o t he AC pow er l i ne t o reduce / el i m i nat e pow er suppl y noi se. 2) Avoi d m al f unct i on due t o noi se by i nst al l i ng t hi s product and i t s w

O

Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on. 3 CAU TI O N Take t he f ol l ow i ng st eps t o avoi d m al f unct i on due t o noi se. 1) I nst al l a l i ne f i l t er et c. t o t he AC pow er l i ne t o reduce / el i m i nat e pow er suppl y noi se. 2) Avoi d m al f unct i on due t o noi se by i nst al l i ng t hi s product and i t s w

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

+ 2 stroke (With rod boot on one side) MB1 CA2 CS1 C76 l l C85 ZZ + 2 l + 2 stroke (With rod boot on both sides) C95 Stroke range (mm) Type Bore size (mm) 125 140 160 180 200 250 300 CP95 A AL B B C D E EA F FA FD FT FX FY FZ G J Without rod boot With rod boot Up to 1000 30 to 1000 M14 x 1.5 50 47 145 145 115 36 90 59 43 14 19 14 190 100 230 16 NCM Lube Non-lube Air-hydro Up to 1000 30 to

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

CRB2/CRBU2/CRB1

Formula (2) P 0.1 QCP = 2 x a x L x x 10-. Formula (3) [L/min (ANR)] QC2 = Compressor discharge flow rate n = Actuator reciprocations per minute Reserve factor = 1.5 or more QC = QCR + QCP.

Table of Contents

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

39

VA0.02 2 x V H7 Depth I C 4 x NN Depth S 2 x 2 x PH7 Depth D 2 x 2 x MM Depth J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc E RB B (mm) Bore size (mm) B C D E GA GC I J K L LA LB MM GB N NA NB NC NN P 50 63 92 48 12 13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the