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<> (19) 1 [P_1][n_1] 1 1 2[P_2][n_2] 2 (P1L P1H ) P1L()P1H() (n1L n1H) (24 ) 1 -20No.PS-OMM0002CN-F 2 [F 0] [F] 2 2 [F][-] [F 0] 23 ISE80(H) MPa ""M ZSE80(F) kPa ISE80(H) P ZSE80(F) psi [F 1] OUT1 24 ISE800.500 MPa ZSE80-50.5 kPa ZSE80F50.0 kPa ISE80H1.000 MPa ON OFF ISE800.050 MPa ZSE805.1 kPa ZSE80F5.0 kPa ISE80H0.100 MPa ON OFF -21No.PS-OMM0002CN-F [F 2] OUT2 27 [F 1]OUT1

2 Stainless Steel Series AS-FG Construction/Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 Parts list No.

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Body size Nil N Body only With silencer 3 5 3/8 standard 1/2 standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are order made specifications.

Body size Nil N Body only With silencer 3 5 3/8 standard 1/2 standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are order made specifications.

0 o AS-F AS-F w !0 o u r e !3 !1 u u TMH r t r t ASD e !3 e !3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

(f) B u L-~ __~~__~~~ ~ Operating piston speed in/s (mm/s) ...J Stoppage Accuracy (Variation In control system is not induded) mm (IN) PI.ton sPMd mm/'sec (I.v.c) Type ot IockJng 50(2) 300(12) 100(4) 500 (20) Spring lock O.4 (C.016) iO.S (O.02) .11.0 (~O .o.I) :::2.0 {:to 08) Air pres.u ... lOCk O 2 (a.008) 0.3 (O.OI 2) O .S (i O .02) =. 1.5 (O .OS) Sori...Alr _roM." I"".

How To Order Lubricator Series AL20 to 40 AL 20 N 02 B X480 Z 2 Lubricator With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Applicable Body Size 20 30, 40 NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Port Size Symbol 02 03 04 Accessories Applicable Body Size 20 30 40 Port

How To Order Lubricator Series AL20 to 40 AL 20 N 02 B X480 Z 2 Lubricator With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Applicable Body Size 20 30, 40 NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Port Size Symbol 02 03 04 Accessories Applicable Body Size 20 30 40 Port

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

Function Port size Rc Valve model VHS VZA4121-01 VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

How to Order VHS 4 5 1 0 01 Paint color Nil X1 Standard color Handle, body: Red With locking holes Pressure relief 3 port valve Optional specifications Body size Flow direction: Right Left R 4 5 1/2 1 JIS Symbol (A) 2 Port size Double action 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Thread type 3 (R) 1 (P) Nil F N Rc G NPT OSHA standard (Occupational Safety and Health Administration Department of

water inlet/outlet Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Facility water system Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass PTFE, NBR, EPDM Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) 3-phase 380 to 415 VAC (50/60 Hz) Allowable voltage range 10% (No continuous

DIN terminal 4-15-12 13 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ400 Dimensions: Body Ported Grommet: VZ4 2-G H (S)-01 With foot bracket: VZ4 2--01-F 1 2 1 2 2-3.4 mounting hole 2-4.5 mounting hole M5 x 0.8 Pilot EXH V100 Manual override (Non-locking) SY Manual override (Locking type (Tool required)) Manual override (Locking type (Manual)) SYJ 2-3.4 mounting hole

Temperature characteristics 2% F .S. (25C standard) Accuracy Output type Select from NPN or PNP open collector output.

Selection of Function N is not required. 3-position pressure center 2(B) (A)4 5 (R1)5 1 (P) 3(R2) How to Order Manifold Assembly Example Double solenoid (24 VDC) VQC2200-51 (6 sets) Single solenoid (24 VDC) VQC2100-51 (2 sets) D side U side 1 2 3 Stations Built-in silencer Cylinder port fitting C8: With 8 One-touch fitting F kit (D-sub connector kit) VV5QC21-08C6FD2-S 1 set (F kit, built-in

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-57 2 Series AS-FM How to Order AS 2 2 0 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With seal M5 and U10/32 are not available with seal. Type 2 3 Elbow Universal Applicable tubing O.D.

1/2 330 352 369 428 370 392 409 468 450 472 489 548 3/8, 1/2 520 542 559 618 16 Air Dryer Series IDG Membrane Air Dryer Unit Units (M Type, V Type) How to Order F = (C x 1.8) + 32 1l/min = 0.0353SCFM IDG 30 M 03 Optional specifications Size Symbol Contents Size 3 3 5 10 20 30 50 60 75 100 5 Standard Nil 10 With fitting for purge air discharge 20 30 50 60 75 P Note 2) Note 1) Note 2)

Symbol JIS symbol 1 Series AS-FM How to Order AS 2 2 1 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With sealant M5 and U10/32 are not available with sealant.