VZA200/400

Rc 1/8 Body side VZA412-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.14 2.0 N.C. Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

modular-press-e

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Modular F.R.L. Pressure Control Equipment

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Pneumatic Transfer System Series MF

Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424 508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15 32 15 32 I

ZSE30/ISE30

Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

When ordering SI manifolds add suffix "X11" at end of P/N 7 Series VQ100 How To Order How to Order Valve VQ1 1 0 5 L M5 Subplate option Without subplate With M3 subplate With M5 subplate M3 M5 Series VQ Compact 3 port valve Manual override Type of valve actuation Normal close type Non-locking recessed type Latching type : Locking recessed type Locking tool type 1 B * Note) The manual override

Series VCL

54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70

MHY2/MHW2

MHW2 Dimensions MHW2-25D Flat finger (Standard) 24 2-M6 X 1 Depth 10 (Mounting thread) 20 69 51 40 27 4-M6 X 1 Depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 2-M6 X 1 Depth 12 (Mounting thread) 30 34 45 24 27 8 2 20 +0.2 +0.1 17 26H9 +0.052 Depth 3 0 30 21 40 4-M5 X 0.8 Depth 6 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) Auto switch mounting groove

Miniature Tubing & Miniature Fittings

(mm) Thread Weight g H A B C E F D G I J Model M3 x 0.5 M5 x 0.8 M-3ALU-2 M-5ALHU-2 5 7 9 11 6.5 7.5 2.5 3.5 9.4 13.5 5 7 1.6 3.5 0.9 2.5 3 4 4 2 x 1 .2 Parts list Width across flats H Applicable tubing 4 3 2 1 Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated NBR, Stainless

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

3 MHW2-D MHW-A2002 MHW-A2502 MHW-A3202 MHW-A4002 MHW-A5002 Finger assembly MHW2-D1 MHW-A2002-1 MHW-A2502-1 MHW-A3202-1 MHW-A4002-1 MHW-A5002-1 MHW-3 Order 1 piece finger assembly per one unit. 12-10-18 18 180 Angular Style Air Gripper Rack & Pinion Style Series MHW2 Dimensions MHW2-20D Flat finger type (Standard) 20 MHZ 2-M5 x 0.8 thread depth 7 (Mounting hole) MHF 17 MHL 60 4-M5 x 0.8 thread

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

3 MHW2-D MHW-A2002 MHW-A2502 MHW-A3202 MHW-A4002 MHW-A5002 Finger assembly MHW2-D1 MHW-A2002-1 MHW-A2502-1 MHW-A3202-1 MHW-A4002-1 MHW-A5002-1 MHW-3 Order 1 piece finger assembly per one unit. 12-10-18 18 180 Angular Style Air Gripper Rack & Pinion Style Series MHW2 Dimensions MHW2-20D Flat finger type (Standard) 20 MHZ 2-M5 x 0.8 thread depth 7 (Mounting hole) MHF 17 MHL 60 4-M5 x 0.8 thread

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Width across flats 3 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4 x M6 x 1 +0.030 0 ) depth 4 4H9 ( ) depth 4 4H9 ( Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 47 46 13 ) depth 2 4H9 ( J 10.5 8 +0.030 0 +0.030 0 ) depth 2 4H9 ( 16.5 14.5 Section AA 5 B D Mounting base side Q QL 11-/22-MXP16-30 Without magnet and switch rail

Miniature Tubing & Miniature Fittings Series TU/M

(mm) Thread Weight g H A B C E F D G I J Model M3 x 0.5 M5 x 0.8 M-3ALU-2 M-5ALHU-2 5 7 9 11 6.5 7.5 2.5 3.5 9.4 13.5 5 7 1.6 3.5 0.9 2.5 3 4 4 2 x 1 .2 Parts list Width across flats H Applicable tubing 4 3 2 1 Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated NBR, Stainless

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 4.3 7.4 7.4 17.7 37.2 2.9 5.9 5.9 17.7 37.2 10 12 12 16 20 7 10 10 15 20 Model Applicable bolts Max. tightening torque (Nm) Max. screw-in depth (Lmm) MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M5 x 0.8 M6 x 1 M6 x

MLGP

Mounting Piping Warning Warning Depending on the operating condition, change the position of plugs for the piping port. 1. For M5 After tightening by hand, tighten additional 1/6 to 1/4 rotation with a tightening tool. 2. For Rc thread Tighten with proper tightening torques below. Also, use pipe tape on the plug. 1.

MLGP

Mounting Piping Warning Warning Depending on the operating condition, change the position of plugs for the piping port. 1. For M5 After tightening by hand, tighten additional 1/6 to 1/4 rotation with a tightening tool. 2. For Rc thread Tighten with proper tightening torques below. Also, use pipe tape on the plug. 1.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) 5 V,12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93 A93V*2 A93

LEC-OM02904

: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

Cylinder

5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .