Table of Contents

depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector (M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10

ZP

to "ZP3-YB;-B5-B5". 29 With Adapter: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Bellows Pad type Pad Unit ZP3-Y10B;-B5-B5 [Weight: 7.9 g] ZP3-Y13B;-B5-B5 [Weight: 8.1 g] ZP3-Y16B;-B5-B5 [Weight: 8.2 g] 8 8 8 M5 x 0.8 M5 x 0.8 Vertical M5 x 0.8 With Adapter: Vacuum Inlet 15 2 M5 x 0.8 M5 x 0.8 10 2 2 M5 x 0.8 2 10 5 5 5 Square 8 Square

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

ZP

across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 (14.5) (15) 6.5 7 0.8 1.2 2 2 6 8 6.7 8.8 ZP2-TB10MU-B5 ZP2-TB15MU-B5 M5 x 0.8 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 8 7 (16) (15) 2 2 2 1.2 10 15 15.6 10.6 4 Symbol/Type Short-type Pad EU: Flat 2, 4, 6, 8, 15 Pad diameter Space-saving in the height direction How

Air Fittings & Tubing

<M5> (1) (2) Tube O.D.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Vacuum Pad

to "ZP3-YB;-B5-B5". 29 With Adapter: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Bellows Pad type Pad Unit ZP3-Y10B;-B5-B5 [Weight: 7.9 g] ZP3-Y13B;-B5-B5 [Weight: 8.1 g] ZP3-Y16B;-B5-B5 [Weight: 8.2 g] 8 8 8 M5 x 0.8 M5 x 0.8 Vertical M5 x 0.8 With Adapter: Vacuum Inlet 15 2 M5 x 0.8 M5 x 0.8 10 2 2 M5 x 0.8 2 10 5 5 5 Square 8 Square

Table of Contents

2-5.5 through 2-M5 x 0.8 through 11.5 25h9 0 -0.052 10g6 -0.005 -0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (Connection port) 5.5 31 25.5 (34.5: Connector type) Switch unit ( 3 m) 0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2-5.5 through 2-M5 x 0.8 through 11.5 25h9 0 -0.052 10g6 -0.005 -0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (Connection port) 5.5 31 25.5 (34.5: Connector type) Switch unit ( 3 m) 0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-S41-M5 Type 10-SS5YJ3-S41-C4 Type 10-SS5YJ3-46-M5 Type 10-SS5YJ3-46-C4 1/8 M5 x 0.8 10-SYJ343 Type 10-SS5YJ3-S46-M5 Type 10-SS5YJ3-S46-C4 Note) The values are for individually operated 2 position type manifold bases.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 4-OA effective depth RA 2 x 4-OB counterbore depth RB 2-M5 x 0.8 HN I 4-N through HR 1 D M E End Lock Mechanism Dimensions Flat washer Bore size (mm) HN (Max.)

ZP

Vacuum Inlet Direction Lateral Y Type/ZPY Connection Male thread Female thread Pad diameter 2 to 16 20 to 32 40, 50 2 to 81 10 to 16 20 to 32 40, 50 M5 x 0.8 M6 x 1 M8 x 1.25 Connection thread M5 x 0.8 M6 x 1 M6 x 1 M8 x 1 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 Vacuum inlet Barb fitting2 4, 6 6 4, 6 6 1 Refer to 2 to 8 for the thin flat type and thin flat type with ribs. 2 Applicable

CRB2/CRBU2/CRB1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x 0.8 with depth 10 56 3-M5 x 0.8 with depth 16 25 25 A port B port 5.5 with depth M5 x 0.8 with depth 16 11.5 10g6 0.005 0.014 2 20 0 0.030 4 Vane type 6.5 10 30 45 Single

Micro Mechanical Valve Series VM1000

Max. 6 R port (3 port only) (62) 32 24 16 Symbol 2 port (A) 2 12 10 1 (P) 30 (A) 2 3 port 17 44 25.4 10.5 12 10 1 (P) 3 (R) 2 x 4.6 mounting hole 14 8.5 2 x M5 x 0.8 depth 4 * 0.5 MPa supply F .O.F .* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Roller plunger VM122-M5-06A VM132-M5-06A VM122-M5-06SA VM132-M5-06SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across flats 17 10

CQ2

40 10 2 10 12 12 5 M6 X 1.0 M5 X 0.8 15 5 M5 X 0.8 0 0.052 32 5.5 34 53.5 39.5 12.5 M8 X 1.25 21.5 49.5 4.5 60 45 14 2 14 13 16 7 14 21 10 to 50 RC(PT)1/8 Refer to p.2.3-18 for details rod end nut and optional bracket.

Table of Contents

) 258-9200-www.stevenengineering.com 1 YH PP QQ PP QQ RR SS RR SS H NE NH NC G GA GA G TT TT UU UU M5 x 0.8 (Port) Cushion needle 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) GB N M5 x 0.8 (Hexagon socket head plug) A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 VV VV (Hexagon socket head plug) 2 x 2-J depth K 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details about auto switches with pre-wire connector, refer to page 7-9-36. 7-6-2 3 Series CQ2 Compact Cylinder: Standard Type Double Acting, Single Rod Type 12 40 16 50 20 63 25 80 32 100 Bore size (mm) Through-hole (Standard) Mounting Both ends tapped style Built-in magnet Pneumatic Air-hydro (1) M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Screw-in

SYJ3000/5000/7000

Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8