SZ3000

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil)

VCA

ported) 5.5 F E Manual override 2-6.4 Mounting hole C B A G H 1 Q l = 300 S U V Y (X) 25 l = 280 U side D side Stations 1 2 3 4 5 n For manual override J2 Manual override W T R N Z M 16 1 1 L 2 2 2 2 P = K (pitch) n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J1 J3 2-1/2 (VCA30), 3/4 (VCA40) IN port (front ported) L dimensions (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A B C D E F G H 0.56 J NCM-L075 0.81 1.36 0.12 0.63 0.75 0.27 0.98 1.89 3/4", 7/8", 1 1/16" NCM-L150 1.00 1.75 0.12 0.75 0.94 0.27 1.50 0.75 2.52 1 1/4", 1 1/2" NCMK-L150 1.00 1.75 0.12 0.88 0.94 0.27 1.50 0.75 2.52 1 1/4", 1 1/2" NCM-L200 1.5 2.5 0.25 1.38 1.13 0.34 1.63 1.00 3.126 2" Note) NCM-L075 will not fit NCM075S (Single Acting).

CXWM/CXWL

(8H7 hole pitch) 8H7 depth 6 +0.015 0 4-M8 x 1.25 thread depth 15 2 positions for set screws for fixing shock absorbers (M5) 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 8H7 depth 12 +0.015 0 (mm) ZZ 163 213 G Z 123 173 SS 96 121 S 27 52 Q 143 193 P 22 45 L 41 65 F 37 38 Model CXWM32-25R CXWM32-50R 27.5 28 Housing mounting style with auto switch CDBXWM32-25/50, CDBXWM32-25R/50R Plate mounting style

CQS

RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5 28 3.5 3.5 5.4 5.4 12 16

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

Series MXP Precision Air Slide Table

(Mp max.,My max.,Mr max.) 1 mm/s = 0.0394 in/s 1 J = 1 Nm = 0.7375 ftlbf 1 mm = 0.0394 in 1 N = 0.2248 lbf 164 Precision Air Slide Table Series MXP Table Deflection Table deflection when pitch moment is applied. Deflection on A when load is applied on F. Table deflection when yawing moment is applied. Deflection on A when load is applied on F.

ZSE3/ISE3

Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 01: R 1/8 T1: NPTF 1/8 IF 2-3.5 Mounting hole 13 Data M5 x 0.8 Connector type 30 SE3C I Z 01 T1 20.5 RESET button DOWN button SET button UP button Lead wire length 600 39 8.5 3.5 (3000) 10 01: R 1/8 T1: NPTF 1/8 2-3.5 Mounting hole 13 M5 x 0.8 16-4-7 8 Series ZSE3/ISE3 Dimensions/Switch Only Grommet type ZSE3

240

Allowable Lateral Load on the Rod End Model Allowable lateral load on the rod end [N] LEPY6 (Basic) 0.50 F LEPY10 (Basic) 1.0 LEPY10L (Compact) 1.0 377 Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10 How to Order LEPY 10 K 50 1 1 R 6N q w e r t y u i o !

10

28 6 Width across flats 10 (4 locations) 24 46 K (70) 30 24 24 Closed E 12.5 12.5 30 Open F 17 17 54 G 4 x M6 x 1 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-20DZ 54 58 71 38 82 122 160 32 120 MHL2-20D1Z 96 100 113 80 142 222 260 68 195 MHL2-20D2Z 116 120 133 100 162 262 300 88 235 J dimension is at fully closed.

RB/RBL/RBQ

weight Collision speed Dropping height Angle speed Distance between axis of cylinder and impact point Bore size Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh R m RHC m 2 1 2 m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

LVQ

Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D Double acting valve P Pilot port LQ1 integral fitting 1/8 (3), (4) Rc 1/8 (NPT 1/8) R Pilot port Sensor (breathing) port Rc 1/8 (NPT 1/8) Pilot port LQ1 integral fitting 1/8 (3), (4) Rc 1/8 (NPT 1/8) Pilot port A B SMC A B SMC LVQ S-S Dimensions (N.O. valve, double acting valve) 2 1 (mm) A B C D E F G H J K L M N P Q R W Model LVQ2 S-S07

RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Environment

0 i o e r t q u !1 !2 !3 !

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -