Series: 250 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: Brass Body, NBR Seal, Class B Coil, Option: None, CE Compliance: Q (CE Marked)

Series: 250 [3 Port COM (Single Unit)], Voltage: 3 (110VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: Brass Body, NBR Seal, Class B Coil, Option: None, CE Compliance: Q (CE Marked)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: Brass Body, NBR Seal, Class B Coil, Option: None, CE Compliance: Q (CE Marked)

IC

No. q !0 q CONTROLLER PRESSURE OUT w e w r RUN 4 3 2 1 F.R.L. CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point Flow rate (L/min (ANR)) Inlet pressure (MPa) 688 Regulator with Mist Separator AMR3000 to 6000 Series Dimensions AMR4000/5000/6000 M N H ARJ E AR425 to 935 G D ARX F 2 x V 2 x V AMR AMR AMR3000 R A Compact pressure switch ARM (Option) S Bracket ARP Adapter assembly (Option) T IR-A B J B L P C K PT elbow IR 2 x U IRV VEX SRH SRP

ARJ1020F

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Brass Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: A (Brass Body, FKM Seal, Class B Coil)

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

SMC Pneumatic Clean Series

Please consult with SMC if you use a fluid other than compressed air. 2. A protective cover is recommended to minimize the risk of personal injury. If a driven object and moving parts of a cylinder are in close proximity, personal injury may occur. Design the structure to avoid contact with the human body. 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Symbol -X80, -X81 Main Value Double Acting Type 1 A N 06 5 1 4 VP31 1 D Z X81 Body size CE marking Nil Q None CE-compliant 4 6 8 1/2 1 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Port size (IN, OUT port) Thread type Symbol VP3145 VP3165 VP3185 Port size Nil F N T D/DO/DZ/DU only Rc G NPT NPTF 03 04 06 10 12 14 20 Type of actuation X80 X81 Double solenoid Single solenoid External pilot Passage, Type

Large blow and

48 4.5 56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q

3-Position Rotary Table

2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.