female threads) ZSM Rc 1/8 Reverse pressure two directions B R 1/8, NPT 1/8 PF2 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc 1/8 IF Data E M5: M5 x 0.8 (Female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting Option When optional parts only are required, order
Thread type and port size C D E Material Number of 1 set Male thread A side Female thread B side Mounting hole dia.: 10.5 IDF-AP604 NPT1 Rc1 1.97 (50) 1.06 (27) 1.81 (46) [inch (mm)] Brass 2 IDF-AP606 NPT1 1/2 Rc1 1/2 2.17 (55) 1.22 (31) 2.13 (54) Part no.
SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003
5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003
6 6-1. 1 1P4P5 10 XL-OMY0003
6-2 1 2 b 3 1 2 O 4 a aa b O O
gauge 0.05 to 0.83 0.02 to 0.2 0.05 to 0.7 Manifold 14-4-19 1 8 14-4-52 Pressure gauge 0.08 to 0.7 / Manifold regulator ARM1000/2000 Manifold (Common IN/Individual IN) Direct operated relieving type Back flow function , 3 8 1 4 14-4-55 Bracket Pressure gauge 0.05 to 0.85 / / Manifold regulator ARM2500/3000 Manifold (Common IN/Individual IN) Modular type 1 4 Direct operated precision regulator
Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.
Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26
ISA ZSE1 ISE1 Current draw on Output 1 and 2 too high (>120mA). Check load and/or wiring for Output 1 and 2. ZSE2 ISE2 Pressure is 2% above rated pressure during 0 clear. Panel mount Apply atmospheric pressure then do 0 clear. ZSP ISl ZSM 1 Turn screw 1/4 to 1/2 turn after panel makes contact with the sealing surface of the PSE.
VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575
Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.
Built with two self-diagnostic features: 1. Over-current protection of input blocks (mechanical fuse) 2.
1) D-Z8 type D-A9 type D-F9 type D-Y6 type Ball bushing D-Y7 type Note 1) Vertical outlet types cannot be mounted.
Max. 1.0 MPa Input pressure Max. 0.7 MPa 0.7 Supply pressure: 0.7 MPa Output pressure Max. 0.7 MPa 0.6 Pressure ratio 1 : 1 Air consumption 3 L/min (ANR) or less (OUT = 0.5 MPa) 0.5 Output pressure MPa Linearity Within 1% Hysteresis Within 1% 0.4 Ambient and fluid temperature 5 to 60C Port size 1/4, 3/8 0.3 Weight 0.56 kg 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 Flow rate L/min (ANR) 53
4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L
A drawing of a recommended mounting method is shown in Fig. 1. 12-REA25/32/40 End collar A Lock nut Fig. 1 Guide rod Stopper Forward Backward 1 Forward Backward 12-REA50/63 Lock nut A Cushion ring holder Wrench Forward Backward Rodless cylinder With adjusting screw 4. When used vertically for applications, use caution regarding allowable load.
34 11 4 12 5 7 11 43 55 38 Click here for applicable color caps. 250 B
G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !
length Standard + 25mm Series Variations Bore sizes (mm) Lock position Manual override Standard strokes (mm) Models 25 50 75 100 125 150 175 200 250 300 350 400 MGPM Slide bearing Rear lock Non-locking type 32, 40, 50, 63 P P P P P P P P P P P P MGPL Ball bushing Front lock Locking type Series MGP How to Order MGP M H Z73 N 100 32 Compact guide cylinder Number of auto switches Nil S 2 pcs. 1
16 (kg) White1 (Munsell 10Y8/0.5) Coating color Note1)The data for l/min (ANR) is under the conditions of 20C, atmospheric pressure of 1 atm. and relative humidity of 65%.