pa

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread type Nil T Automatically operated type built-in pulsation attenuator Rc NPTF G NPT FLUID OUT AIR SUP 2 F N AIR EXH FLUID IN T, F, N are options.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-C PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40-(F,N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D VHS20W-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30W-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40W-(F,

HRX-OM-X084

(This product will continue operation.) (12) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

HRX-OM-W002

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

HRX-OM-X071

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 4.5 16 57 61.5 15.5 10 17 30 5 40 1/8 AS2000E-02 4.5 20 59 63.5 17 12 23 30 5 40 1/4 AS3000E-02, 03 5.5 26 69 76 20.6 13.25 25 45.5 5.25 56 1/4, 3/8 AS4000E 2-1/4 to 1/2 72 (Max. 80) Effective thread depth 6 15-9-42

Mini Free Mount Cylinder

Mounting condition 2 With Magnet (With Auto Switch) Mounting condition 1 6, 8, 10 12, 16 20 Bore size (mm) M3 x 0.5 M5 x 0.8 Port size 5 or more 4 or more 5 or more Stroke (mm) AS121F-M3-02 AS121F-M5-02 AS121F-M3-23 AS121F-M5-23 AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS131F-M3-23 Mounting condition 4 Mounting condition 3 AS131F-M3-04 AS131F-M5-23 AS131F-M5-04 AS131F-M5

PSxx-OMV0008CN

-L2 0x0013 (19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

VZM400

3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.

S Couplers Series KK/KKH/KK13

How to Order KKH 4 S M S 02 Body size With sealant (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket/Plug designation Socket S Piping port size variation Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

Piping: Base Mounted Common SUP Individual EXH, Stations: 2 Stations, A, B Port: ø8 One-touch Fitting

Piping: Base Mounted, Stations: 2 Stations, A, B Port: ø8 One-touch Fitting

Manifold Type: Base Mounted, Bar Manifold, External Pilot Capable, Individual Wiring, Valve Stations: 2 Stations, A, B Port: ø8 One-touch Fitting, Q: -

Piping: Base Mounted, Stations: 2 Stations, A, B Port: ø8 One-touch Fitting

90

Common PS port q Stations Note 1) Symbol w System (Port combination) Note 2) Stations Symbol Standard Port System 01 02 1 station Common PV port 2 stations Vacuum pump system Common PV: 8, Common PS: 6 Note 3) P P 10 10 stations Metric size Note 1) In case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

HRX-OM-T004

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS090 Series 5-14 HRX-OM-T004 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-R028

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-R028 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

HRX-OM-I051

Check that a proper connection is established between the power cable and main breaker of this system. 02 Incorrect Phase Error FLT Stop The power phase rotation is wrong.