Table of Contents

x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type: ISE2-15 01 T1 01 T1 Connector type: ISE2-15C Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 ZSE ISE Indicator light

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

KJ

Connection thread (With seal) 15-2-40 4 Rotary One-touch Fittings Series KS/KX Male Elbow: KSL (Standard) H (width across flats) Applicable tubing O.D.

15

L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5

MXQ

10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12

Applicable Auto Switch Model

(Tolerance 30%) 5.3-22 Reed Switch/Direct Mounting D-Z73/D-Z76/D-Z80 Applicable Actuator Series Grommet Series Bore size (mm) MGQ, MVGQ, MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 CXS 6, 10, 15, 20, 25, 32 RSH 20, 32, 50, 63, 80 MY1B 25, 32, 40, 50, 63, 80, 100 MY1M, MY1C, CY1R 25, 32, 40, 50, 63 MY1H, ML2B 25, 32, 40 MGF 40, 63, 100 CY1H 10, 15, 20, 25, 32 Specifications PLC: Programmable

Integrated Controller

20 25 30 35 40 0 0 10 20 30 40 50 60 70 0 0 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Valve configuration Pilot type 4 port solenoid valve Air 0.15 to 0.7 10 to 50 (No freezing. Refer to page 3-13-4.) 15 or less 15 Refer to the table below.

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

Proposals for Energy Saving

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 59 71 82 46 55 66 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 4 5 5 16 16 16 12 15 15 44

LEC-OM02704CN

15.2.5 (RWrn2) 15-23 15.3 15-24 15.3.1 () 15-24 15.3.2 () 15-26 15.4 15-30 15.4.1 15-30 15.4.2 15-31 15.4.3 15-32 15.5 15-33 15.5.1 15-33 15.5.2 15-33 15.5.3 15-34 15.5.4 15-35 15.5.5 15-36 15.5.6 15-36 15.6 15-37 15.7 15-39 15.7.1 15-39 15.7.2 1() 15-40 15.7.3 2() 15-50 15.8 15-59 15.8.1 JOG 15-59 15.8.2 JOG 15-61 15.9 15-62 15.9.1 15-62 15.9.2

HRX-OM-W002

26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 20 20 1 10 12 1 13 4 15 3 16 15 16 18 1 23 4 8 4 3 24 24 3 2 14 (CN6) BL

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 75 15 85 75 90 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 75 + 40 90 + 40 15 + 40 75 + 40 80 + 40 85 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 70 75 80 85 95 100 15 D-A9 70 + 40 (n 4)/2 n = 4, 8, 12, 16 80 + 40 (n 4)/2 n = 4, 8, 12, 16 85 + 40 (n 4)/2 n = 4, 8, 12, 16 95 + 40 (n 4)/2 n = 4, 8, 12, 16 100 + 40 (n 4)/2 n = 4, 8, 12, 16 15 + 40 (n 2)/2 n = 2, 4, 6, 8 75 + 40 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

MHZ

) MHZJ2-10C Internal Grip Pressure 0.7 MPa Pressure 0.7 MPa 20 MHZAJ2, MHZJ2 0.6 MPa 0.6 MPa Gripping force (N) 15 0.5 MPa 0.5 MPa 10 0.4 MPa 0.35 MPa 0.4 MPa 0.35 MPa 5 L 0 10 20 30 40 50 Gripping point L (mm) MHZJ2-16C 60 Pressure 0.7 MPa Pressure 0.7 MPa 50 Gripping force (N) 0.6 MPa 0.6 MPa 40 0.5 MPa 0.5 MPa 30 0.4 MPa 0.4 MPa 20 0.3 MPa 0.3 MPa 10 0.25 MPa 0.25 MPa 0 10 20 30 40 50

MHZ

(49) 29 26 40 12 67 (76) Misc.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

16) 12 14 18 25 30 32 40 50 24 M5 x 0.8 69(77) 20 25 32 40 50 63 80 100 23 Up to 200 201 to 350 C76 30 19.5 16.5 10(12) 40 31 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 11 M6 x 0.75 111(119) 16 15(16) 29 M5 x 0.8 69(77) 25 Up to 300 301 to 400 25 19.5 20 10(12) 40 38 M5 x 0.8 depth 8 5.5 M10 x 1.25 10(11) M8 x 1.0 113(121) 16 15(16) 35.5 Rc 1/8 71(79) 28.5 Up to 300 301 to 450 20 C85 27 26 10(13)

CQS

5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 1*

Basic Type/Direct Mount Type

Bore size 6, 10, 15 Symbol Type M thread Rc NPT G 15 15 mm 20 Nil 20 mm 20, 25, 32, 40 25 25 mm TN TF 50, 63 Switch rail 32 32 mm Nil 40 With switch rail 40 mm N 50 Without switch rail 50 mm Note 1) A type with switch rail has built-in auto switch magnets. Note 2) 15 has built-in auto switch magnets even without switch rail.

CQS

16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30, 35,