3

VXB Reduced apparent power Reduced coil temperature rise VXE 12 VA2 18 VA 15 VA3 20 VA VXP 24 VDC added 100C4 120C VXR 2 VXS23/24 Current model VXS22 3 VXS25/26 Current model VXS23 VXH 4 VXS23 to 26 Current model VXS22/23 VXF Electrical entry VX3 Grommet/DIN terminal Conduit terminal/Conduit VXA DIN terminal added Body material C37, Stainless steel Full-wave rectifier standardized High sealing

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M6 x 1 depth 7 22.5 5 +0.025 0 3H9 Long groove depth 5 (Positioning pin hole) A 22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Electromagnetic Digital Flow Switch

Use caution so that the electrical entry for the lead wire and M12 connector does not rotate and is limited to only one direction. 18 LFE Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

LMU100/200 Series Mist Spray Unit

1 Filler seal 6 81021-8 1 Level gauge 7 Hard glass 81021-9 1 Type C retaining ring for hole 8 Stainless steel FG00193 1 O-ring 9 FKM KA00622 2 Pressure gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18

Centering Unit

60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series Dimensions P: Port side photo sensor mounted type B: Port back side photo sensor

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

Manifold Regulator ARM1000/2000 Series

27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000

High Vacuum L Type Valve

Note 2) Heaters are not available for size 16. 18 XL-OMS0001-B Revision history A Heater Replacement Procedure added SZ B Product Specific Precautions added. Maintenance part indication revised. Erroneous descriptions corrected. Format changed.

XL-OMY0002

200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42 54 54 M5 Rc1/8 Rc1/4 [kg] 0.5 1.2 1.8 3.4 5.6 11.5 20 1 2 [Y-VAC2] 5 3 1 1mm 32 L/SP=0.1MPa 30 6 P11) 28 XLD-100 XLD-160 L/s () P=0.1MPa 26 24 22 20 XLD-63 XLD-80 18 16 14 XLD-50 12 10 XLD-40 8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD

Safety Speed Control Valve (SSC Valve) Series ASS 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-15-1 2 Series ASS System Circuit Prevents accidents caused by sudden cylinder rod extensions If pressure is applied only to one side of the cylinder, the rod could get out of control, leading to

Lubrication Equipment

4 1.17-18 ALD600/900 Dimensions Related equipment/Strainer D.P. Lube ALD600-l06 to 10, ALD900-l12 to 20 At the terminal of an air pressure line in which a D.P. Lube is used, install a strainer (filtration rate of 5m) upstream with a metal seal solenoid valve, which is susceptible to dust.

KS/KX

76 94 88 14 4 10.4 10.4 8 17 18 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 53 54 55 24 20.9 22 26 8 12 46.1 46.1 105 Reference dimensions after R(PT) thread installation.

VP300/500/700

For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Caution Change of Actuation Caution How to Use DIN Terminal 1. Base mounted N.C. N.O. 1.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

.: CQ2YB50-57DC CQ2YB50-75DC with 18 mm width spacer inside. B dimension is 125.5 mm. Example Calculation:50, B dimension 50.5 mm (without switch) 50.5 (B dimension) + 75 (st) = 125.5 (mm) 5 Smooth Cylinder Series CQ2Y Mounting bracket dimensions are the same as those of the anti-lateral load type of Series CQ2S.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Note) Accumulated flow rate is reset when the power supply turns OFF. 46 Series PF2D How to Order 4-channel Flow Monitor Remote Type Display Unit PF2D20 M Output specification Option 2 (Refer to page 55.) 0 1 NPN4 outputs PNP4 outputs Accessory / Power supply output cable (2 m) Nil 4C None Sensor connector (4 pc.) Unit specification Option 1 (Refer to page 55.)

Compact Electric Actuator Series LG1

Note) +12 to 24V 4.7k 13 14 Servo ON 1Ry 0V SV-ON 5mA 1Ry ON for servo ON 2Ry Proportional control (P actuation) 15 P-CON 2Ry ON for proportional control Reverse drive suppression Normal drive suppression N-LS 16 N-OT N-LS Open for reverse drive suppression P-LS 17 P-OT P-LS Open for normal drive suppression 3Ry 18 ALM RST Alarm reset 3Ry ON for alarm release 30VDC 50mA or less 5Ry +12 to

Rotary One-touch Fittings Series KS/KX

76 94 88 14 4 13.4 10.4 8 1 4 17 18.5 15.2 18 6 26.1 18.0 3 8 R(PT) 1 4 52 10 3 8 1 2 3 8 1 2 18.5 23.5 21 7 22 36.3 29.5 53 54 55 R(PT) 12 24 20.9 8 22 26 46.1 46.1 105 Reference dimensions after R(PT) thread installation. 59 Series KS/KX Rotary One-touch Fittings Male elbow: KXL (High-speed type) Effective orifice(mm 2) Applicable tube O.D.

Refrigerated Air dryer Series IDU/IDF

38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000 IDF190D 38000 190 4B flange 6B flange 43000 IDF240D 50 240 35C R22 54000 IDF370B 65000 370 With motor operated auto drain.

ZB-OM00301

M5N 14 - No.ZB-OM00301 11.6mm 11.6 V () () ISO8573-12001JIS B8392-12003 2.4.3 2.5.3 2.6.3 15 - No.ZB-OM00301 () . 1 URL http://www.smcworld.com PV 12 KQ2S06-01SKQ2S04-01S 1/8PV 2~3 35Nm M5PVPD 1/6 11.5Nm / 16 - No.ZB-OM00301 V V V Assy V Assy V V Assy V Assy (2mm) V Assy 0.15Nm 0.15Nm 17 - No.ZB-OM00301 V Ass y V Assy V Assy ( ) V Assy 2 1V V Assy 2V Assy Assy 18