2/3 Port Valve for Various

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

VXA21/22

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5

AWM20 to AWM40

AWD20 30 34 44 5.4 15.4 55 2.3 30 28.5 14 6 177 164 160 AWM30/AWD30 41 40 46 6.5 8 53 2.3 31 38.5 19 7 242 209 208 214 234 AWM40/AWD40 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 278 247 246 252 272 Note) The total length of B dimension is the length when the filter regulator handle is unlocked. 72 Options Digital Pressure Switch ISE35 N 25 M L A Applicable Series AC20, AC25, AC30, AC40, AC50

AWM20 to AWM40

AWD20 30 34 44 5.4 15.4 55 2.3 30 28.5 14 6 177 164 160 AWM30/AWD30 41 40 46 6.5 8 53 2.3 31 38.5 19 7 242 209 208 214 234 AWM40/AWD40 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 278 247 246 252 272 Note) The total length of B dimension is the length when the filter regulator handle is unlocked. 72 Options Digital Pressure Switch ISE35 N 25 M L A Applicable Series AC20, AC25, AC30, AC40, AC50

Floating Joint/Stainless Steel Type Series JS

23 41 7 14 14.3 27 49.2 14.3 1 11000 3

AR20-B to AR60-B

Applicable Model Model AR10 Port size M5 AR 10 X406 M5 A 0.4 MPa setting w q Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Pilot port Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening size wrench torque XLF-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 -63 M10 8 15 -80 Body Supply air pressure of 0.4MPa (G) to the pilot port.

IIIIIII

M5) Cy 0 5 5 1 . 0 Max. Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

Mechanical Valves Series NVM, NVFM, NVZNI

M5) Cy 0 5 5 1 . 0 Max. Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max.

AMPSeries

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

Exhaust Cleaner for Clean Rooms AMP Series

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

AR20-B to AR60-B

40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 OTHER SIZE RATING, VALVE, SS5YJ3 MFLD SYJ3000, 1K, SS5YJ3 OTHER SIZE RATING, 0.66069 lb

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, 0.99208 lb

Fluoropolymer Piping Equipment

-R1 19 Tube 12 19 29 29 26 26 41.5 47.5 41.5 28 39 39 10 LQ1T51-TT1-R2 19 Tube 10 19 41 44.5 41 25 8 LQ1T51-TT1-R5 12 Tube 19 19 7 14 28 54 55.5 54 35 9.4 LQ1T51-TT1-R13 6 Tube 19 19 15 29 14 26 29 54.5 45 35 16.5 39 3.6 LQ1T51-TT1-R37 19 Tube 25 19 8 39.5 39.5 18 36 36 36 69.5 65.5 69.5 39.5 49 49 15 LQ1T51-TT1-R38 6 Tube 25 19 15 29 14 26 32.2 64 48.2 46 16.5 39

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

32 37 35.5 29.5 26.5 24 64 61.5 14 28 T 37 36 41 29.5 25 41 49 42.5 36 8 30 26 78 74 18 36 46 44.5 Inch Size Applicable tubing O.D.

LEC-OM071xx

VREF MON2 18 ACCR (acceleration): 19 Set the acceleration with an unsigned value.

ISO Standard Hydraulic Cylinder

22 110 19 27 19 34 10 18 9 41 73 3/8 32 50 25 to 800 75 75 52.3 14 69 12 M20 x 1.5 M12 x 1.25 9 105 28 52 28 130 24 26 25 42 16 18 11 41 74 1/2 33 63 25 to 800 90 90 64.3 14 84 12 M27 x 2 M12 x 1.25 13 117 36 65 36 145 30 23 32 50 16 17 13 39 80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18

Cylinder with Lock

41 41.5 41 44 41 41 41 41 41 49 41 52 43 49 83.5 93.5 46.5 43 49.5 49 50 49 52.5 49 49.5 49 49.5 49 56 49 58.5 51.5 57.5 92 102 53.5 51 56.5 56 58.5 56 61 56 56.5 55.5 57.5 55.5 65 56 66 58.5 68 102.5 112.5 61.5 57.5 Auto switch model D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A3C D-G39C D-K39C D-A44C Bore size (mm) Hs Ht Hs Hw Hs Hw 40 50 63 80 100 38 31.5 73 69 81 69 42 35.5 78.5