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P ] . ' : ' 1 l I -l% "t , 4,;4 '* ili: 103.5 \o4 , @6, 65/32" , @1 14') compact ir!.' ' Switches Series ISE30/ZSE30 ZSESO t r I T t r ISE3O I l o o 1,-"".',-H' wtres 816" ([,45 female NPT1/8' (M5 female 04 straiohl one{ouch 04 elbow onelouch oO elbow one-touch No lead wires 2m lead wirc ffth connector Output type Ser'es lSE40.

Rotary Gripper Series MRHQ

screw attachment ) 6 12 30.4 Max. 14 4-M8 x 1.25 Depth 12 (two on opposite side) 63 24 M5 x 0.8 3-R3 2 4 Finger opening port 17 32 23 27.5 7 11 45 42 69 8 54 2-8.5 through 2-14 depth of counter bore 14 107 Angle adjustment bolt 3-R3 12 3-6H9 depth 8 (one each on three sides) +0.030 0 10 3-6H9 long groove depth 4 (one each on three sides) +0.030 0 M5 x 0.8 Port B M5 x 0.8 Port A 50h9 0 0.062

Soft Start-up Valve AV2000/3000/4000/5000 1

x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

240

Motor cable mounting direction: U (Bottom entry) 14.5 (14) 28.5 +0.025 0 3H9 ( ) depth 3 2 x M5 x 0.8 thread depth 9 19 5 J G F 4 +0.025 0 3H9 ( ) depth 3 Note 1) Range within which the rod can move when it returns to origin.

/

N.O. 2-port 7 MPa 59 14 19 63 19 61 3 MPa 7 MPa 3 MPa 7 MPa 52 59 52 59 71 56 59 56 59 71 79 55 17 14 17 14 7 7 14 7 14 7 9 9 22 19 22 19 12 12 19 12 19 12 15 15 56 63 56 63 75 60 63 60 63 75 83 59 22 19 22 19 12 12 19 12 19 12 15 15 54 61 54 61 73 58 61 58 61 73 81 57 SGH200 3-port 3-port dual pressure type N.C.

Slider Type Ball Screw Drive/11-LEFS Series

6 900 11-LEFS40l-850l 1206 1255 856 1028 14 6 900 11-LEFS40l-900l 1256 1305 906 1078 14 6 900 11-LEFS40l-950l 1306 1355 956 1128 16 7 1050 11-LEFS40l-1000l 1356 1405 1006 1178 16 7 1050 LC3F2 521 AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS25, 32, 40 Refer to page 46 for model selection and page 510 for particle generation characteristics

Modular Type Regulators Series AR

18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

Series AK1000

Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 125 psig (0.9 MPa) Proof pressure 200 psig (1.4 MPa) Ambient and operating temperature 14 to 160F (10 to 71C) (No freezing) Cv 0.29 0.5 Leak rate 1 x 1010 Pam3/sec Connections Compression, Rc, R, NPT Actuation pressure 60 to 110 psig (0.4 to 0.76 MPa) Actuation port connection M5 x 0.8 Actuation port

Lubrication Equipment

Lubrication Equipment Applicable oil viscosity (cSt (3)(40C)) Application Port Size Bowl capacity (cm3) Option Page Series (1) M5 to 1 Lubricator AL1000-6000 Individual lubrication Bracket 1,000cm3 Tank Float switch 130 1,000 32 1.17-2 32 1 1/4 to 2 Large flow lubricator AL800, 900 Individual lubrication 500 1,000 1.17-8 1,000cm3 Tank Float switch (2) 5,000 9,000 1.17-11 32 Auto Feed Lube

Modular Type Air Filters Series AF

18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40

CA2

10 15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 50 70 up to 600 20 to 600 35 32 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 C76 63 85 up to 600 20 to 600 35 32 27 64 20 40 10 17 11 M10 x 1.25 7 18 14 M18 x 1.5 31 80 102 up to 750 20 to 750 40 37 32 78 25 52 14 21 13 M12 x 1.75 10 22 17 M22 x 1.5 37 C85 100 116 up to 750 20 to 750 40 37 41 92 30 52 14 21 16 M12 x 1.75 10 26 17 M26 x 1.5 40

10

M5 M5 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size 1 2 6 8 8 8 12.8 19 19 23 P 1 Resin body is not available. 2 Other Options, which can be combined, are A, B, D, E, Z. 3 Electrical entry direction 3 2 x M thread Depth D 90 Standard Note) Resin body is not available.

IZx-OMT0049

) Note 14) Note 14) Note 14) Note 14) OFF ON OFF ON Ions are generated (green) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 18) Note 15) Note 16) Note 17) Note 17) OFF ON OFF ON OFF ON Key-lock (green) KEY Note 19) Note 19) Note 19) Note 19) Note 19) OFF Generate Note 19) Note 21) Ion generating status Note 20) Note 20) Note 21) Note 21) Stop High voltage power supply module

Air Cylinder Series CA2

10 15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 1/4 3/8 3/8 1/2 1/2 CS2 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 63 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 14 M18 x 1.5 31 80 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 17 M22 x 1.5 37 100 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

PSE54 1 M3 C2 Port size M3 M3 x 0.5 M5 female thread, through type IM5 Note) At the factory, the connector is not attached to the cable, but packed together with it for shipment. M5 M5 x 0.8 M5 female thread, through type (with mounting hole) 01 R 1/8 (with M5 female thread) IM5H Option N01 NPT 1/8 (with M5 female thread) R04 4 reducer R06 Description Part no.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.