25 30 32 8 10 10 14 18 18 18 22 24 32 41 46 1/8 1/8 1/8 1/8 1/4 1/4 18 22 22 30 35 35 9.2 11 12 16 20 20 26 31 38 47 58 72 15 18 21 26 32 38 27 29 33 37 44 50 13 17 17 19 27 27 5 6 6 8 11 11 30.4 36.4 42.4 52.4 64.5 76.6 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 5.5, 9.5 counterbore depth 6 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth
18 22 26 31 31 36 Note) In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than the boot outer diameter e.
129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 100 Up to 1500 20 to 1500 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 Bore size [mm] H1 J K KA LD LH LS LT LX LY LZ MM N P PG PH PL PW RT RY S X 40 8 M8 x 1.25 6 14 9 40 207 3.2 42 70 81 M14 x 1.5 27 1/4 42 11 20 45 153 27 50 11 M8 x 1.25 7 18 9 45 222 3.2 50 80 90 M18 x 1.5 30 3/8 46 10 21 50 30 76 168 27 63 11 M10 x 1.25 7 18 11.5
18 22 26 31 31 36 Note) In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than the boot outer diameter e.
(Robotic cable only) Cable type Actuator side (14) (18) (Terminal no.)
10 27 19 11 43 35 1/2 46 142 14 45 17 18 115 35 18 108 60 52 55 25 to 1400 63 30 20 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 55 25 to 1500 80 35 20 1/4 stroke M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 80 100
17 18 115 35 18 108 60 55 15 15 25 to 1400 63 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122
5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12
H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:
35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 25 to 600 MLGP M18 x 1.5 31 7 M10 x 1.25 18 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 32 to 600 M22 x 1.5 37 11 M12 x 1.75 22 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 41 to 750 RLQ M26 x 1.5 40 11 M12 x 1.75 26 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 45 to 750 With
35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 25 to 600 MLGP M18 x 1.5 31 7 M10 x 1.25 18 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 32 to 600 M22 x 1.5 37 11 M12 x 1.75 22 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 41 to 750 RLQ M26 x 1.5 40 11 M12 x 1.75 26 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 45 to 750 With
110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 27 M30 x 1.5 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 15 15 17 20 20 25 47 47 53 60 60 67 43 43 43 48 48 60 31 31 36 41 46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144
10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2 40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4
18 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 I-G05SUS Y-G05SUS 50, 63 50,63 14 14 22 22 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 I-G10SUS Y-G10SUS 100 100 22 22 32 32 31
29 46 44 44 44 1 16 11.11 22 18 1 8 2.5 15.5 1 8 1 4 10-32UNF 19.5 17 13.5 14.29 2.3 12.7 14 8 1 16 5 32 11.11 18 22 3 16 1 8 1 4 19.5 24 22 21 18.4 22.5 13.5 14.29 2.3 10-32UNF 20.4 8 12.7 14.29 11.11 3 16 1 8 1 4 10-32UNF 16.5 18 3.5 KQH05-32 15 2.3 10.3 13.6 15.4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 18.5 1 4 14.29 4.6 17 17 16.5 24.5 20.5 15.5 26.5 23 17.46 28.5 26.5
Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit
Z + Stroke ZA + Stroke SS BB LX A 4 x CD ZZ + Stroke Stroke range Bore size (mm) B BB E G GB J LH LX LY S A C CD D F GA LT M MA P MM SS PJ H K 32 25 to 800 33.2 M6 x 1 7 12.5 63 44.5 7.5 M14 x 1.5 56 45 84 9 18 30 14 35 12 22 1/4 103 12 15 18 45 43 40 25 to 800 41.7 M8 x 1 9 12.5 83 62.5 10 M16 x 1.5 73 63 103 34 19 18 31 128 11 22 37 3/8 22 12 19 45 47 50 25 to 800 52.3 M12 x 1.25 11 19
16.5 26 VHK-06F-01S VHK-06F-02S VHK-06F-03S 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 18 41 1.2 6 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-08F-01S VHK-08F-02S VHK-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 8 1 4 3 8 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHK-10F-02S VHK-10F-03S VHK-10F-
26.2 36 18.7 31 58 17 9.7 7.2 VHKl-02S-06F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 VHKl-02S-08F VHKl-02S-10F 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-02S-12F VHKl-03S-06F 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17
-600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.