CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

IDX-OM-W019

h) Air Flow Rate (ANR) (Note1) At Expected Outlet Press.Dew Point of 45 F (7.2C) 11 SCFM (19 m3/h) 16 SCFM (27 m3/h) 26 SCFM (45 m3/h) 43 SCFM (74 m3/h) 62 SCFM (106 m3/h) 80 SCFM (136 m3/h) At Expected Outlet Press.Dew Point of 50 F (10C) 12 SCFM (20 m3/h) 17 SCFM (28 m3/h) 28 SCFM (47 m3/h) 45 SCFM (77 m3/h) 65 SCFM (110 m3/h) 86 SCFM (147 m3/h) Operating Pressure 100psig (0.7MPa) Rated

Smooth Cylinder

14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16 17 Smooth Cylinder Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

HRL

The cooling capacity required for the oscillator is, 20 [kW] 6 [kW] = 14 [kW] Considering a safety factor of 20%, 14 [kW] x 1.2 = 16.8 [kW] r Calculate based on the laser output. Laser output power 6 [kW], conversion efficiency 30% The oscillators power consumption is, 6 [kW] 0.3 = 20 [kW] Example 2: When the heat generation amount in the users equipment is not known.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

23 246 264 42 30 269 Z + Stroke ZZ + Stroke Double clevis(D)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) +0.3 +0.1 CDH10 U Z RR CZ Z L CX ZZ ZZ CDH10 32 40 50 63 80 100 up to 500 10 13 162 10.5 28 170 23 14 172.5 180.5 up to 500 10 13 171 11 28 184 23 14 182 195 up to 600 14 17 194 15 40 206 30 20 209 221 up to 600 14 17 194 15 40 206 30 20 209

CRJ

BH BI (UU) 2-M3 x 0.5 (opposite side, same location) (For front port, use hexagon socket head set screw) Q H 2-J through JA depth of counter bore JB (opposite side, same location) 1.5 S BE CA CB BF DD D BD BG A 2.2 (0.4) Note 1) SD 16 BA 2-M3 x 0.5 depth 4 BB W 2-M3 x 0.5 (For side port, use hexagon socket head set screw) N BC Note 2) For the 180 specification, the slated line area do not

Low torque Metal seal type Rotary joint

Temperature rise is reduced by supply of air. 2 Series MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR1-M5 Width across flats: 14 Width across flats: 7 (16.2) M5 x 0.8 14 5 21 34 (8) R1/8 M5 x 0.8 MQR2-M5 MQR4-M5 * 35 * 29 3 +0.1 0 M4 x 0.7 thread length 8 depth 10 5.5 2-M3 x 0.5 thread length 6 P.C.D.38 M5 x 0.8 thread length 10 0.03 * flange: MQR2-F (for

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY11 A 3 4 0.22 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O.

ML2B

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Model MXY6 MXY8 MXY12 Allowable kinetic energy for intermediate stop (J) 0.007 0.014 0.047 8-9-14 14 Series MXY Specific Product Precautions 2 Be sure to read before handing. Operating Environment Caution Mounting Caution 8. Do not attach magnets to the table section.

ML2B

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.

Plug-in/Plug Lead: Single Unit

(135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5 12 21 47.5 R2 R1 36 PE 21 4.4 4.4 12 2-Rc 1/8 (pilot EXH port) 29.5 29.5 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 83 L n Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum

AIR COMBINATION

20 27 4.5 6.8 3 24.5 AC20-A 1/8 126.4 87.6 35.9 41.6 60 23.4 30 43.2 24 33 5.5 12 3.5 29 AC25-A 1/8 167.4 115.1 38.1 30 55.1 80 30.5 41 57.2 35 7 14 4 41 AC30-A 1/8 167.4 115.1 38.1 30 55.1 80 30.5 41 57.2 35 7 14 4 41 AC40-A 1/8 220.4 147.1 39.8 38.4 72.6 110 36.1 50 75.2 40 9 18 5 48 1/43/81/2 AC40-06-A 1/8 235.4 149.1 37.8 38.4 77.6 110 39.6 50 80.2 40 9 18 5 48 3/4 Optional specifications

AIR COMBINATION

20 27 4.5 6.8 3 24.5 AC20-B 1/8 126.4 87.6 35.9 41.6 60 28.5 2 30 43.2 24 33 5.5 12 3.5 29 1/81/4 1/43/8 1/43/8 Note) AC25-B 1/8 167.4 115.1 38.1 30 55.1 80 27.5 0 41 57.2 35 7 14 4 41 AC30-B 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 1/43/81/2 AC40-06-B 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y3-60Stations B (Light/surge voltage suppressor) Manual override (non-locking) Stations 2 3 4 5 6 7 8 9 10 (Station n) (Station 1) 43.3 (3.2) L1 110.5 123 135.5 148 160.5 173 173 185.5 198 33.4 (3) L2 100 112.5 125 137.5 150 162.5 162.5 175 187.5 L3 86 96.5 107 117.5 128 138.5 149 159.5 170 [44.7] L4 12 13 14 15 16 17 12 13 14 38.2 28.2 25.8 20.7 19.2 11 12 13 14 15 16 17 18 19 20 Stations

EtherNet/IP TM Compatible Fieldbus System

(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMS0002-B Dimensions PFMC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions

Exhaust Cleaner Series AMC

Body size 2 AMC220 AMC310, 320 AMC510, 520 AMC610 AMC810 AMC910 Refer to page 5-10-14 for Specific Product Precautions. 3 5 6 8 9 Model/Male Thread Type Model Specifications Effective area (mm2) AMC310 AMC510 AMC610 AMC810 AMC910 16 55 165 330 550 Max. air flow (l/min(ANR)) Port size Weight (kg) Element model no.

AWM20 to AWM40

Note 3) When the compressor oil mist discharge concentration is 30 mg/m3 (ANR). 68 Series AWM20 to AWM40 Series AWD20 to AWD40 Option / Part No.