3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1 Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89
Table 1 Display Real-time flow rate l/min Accumulated flow l, m, m x 10 ft, ft x 10, ft x 10 CFM Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10)]. 14 For Air Digital Flow Switch Series PFA 4. Output Specification Selection Mode For For Flow rate setting SET SET Press the SET button.
to 50C 10 to 50C Ambient and fluid temp.
Round head screw (M3 x 8) 4 pcs. r Seal Cap (10 pcs.) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Be sure to mount a seal cap on any unused I/O connectors. Otherwise, the specified enclosure cannot be maintained.
14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 +0.025 0 +0.025 0 +0.025 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.025
Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110
-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.
/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 20 1 atm()[Anr] ripple -13No.PF-OMS0001CN-A 9022545 -14No.PF-OMS0001CN-A 2 0.50.7 Nm M4 (4 ) (71 ) M4 -15No.PF-OMS0001CN-A M3 (2 ) (71 ) 0.50.7 Nm M3 -16No.PF-OMS0001CN-A IN8cm 2F.S.
Ambient temperature for operation: -10 to 50 oC Ambient temperature for storage: -20 to 60 oC Model number GSD file M3 hexagon screw If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation. Otherwise malfunction can result, causing an accident. 1 EX260-SPN1/SPN2 GSDML-V.
0.6Nm M330 SI -25No.EX-OMP0004CN-I -10+50 3585%RH 20+60 AC500 V 1 DC500 V 10 M IP67 200 g UL/CSACE (EMC RoHS ) DC21.626.4 V 0.1 A DC22.826.4 V 2.0 A EX260-SMJ1/-SMJ3 /PNP() EX260-SMJ2/-SMJ4 /NPN() EX260-SMJ1/-SMJ2 32 EX260-SMJ3/-SMJ4 16 / DC24 V1.5 W SMC DC 0.4 V CC-Link Ver.1.10 1 164 I/O 156 kbps/625 kbps/2.5 Mbps/5 Mbps/10 Mbps Ver.2.00()Ver.1.10SI SY SY3000SY5000SY7000
Input No. assignment The inputs of the Input block are assigned from the SI unit side Input block in the order 0,1,2maximum of 31. 2 Power supply connector Supplies power to the solenoid valve, the Output block, SI unit and the Input block. 3 Input block connector Connects the Input block.
Address27 (10 dec.) SI unit status information is as follows Tie-rod Tightening torque: 0.6 Nm M3 hexagon screw Tightening torque: 0.6 Nm 7 HW Contents Function Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.
198 187.5 165 16.5 3 135.5 125 102 17 4 148 137.5 112.5 18 5 148 137.5 123 12.5 6 160.5 150 133.5 13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 31 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD B1 2 2n1-M5 x 0.8 [4(A), 2(B) port] [With external pilot] 13.3 (Pitch) P = 10.5 13.3 24
SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR. READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39
, 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 12 No.VFS4000-OMY0001 8 1EXH 260 9 () 1 ISO VG 32 0 10 1) SUP (AM)(AF) 2) SF4-*-* Nm M3 0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11 1 2 3 14 No.VFS4000-OMY0001 EXH.
(Type 20 manifold) SYJ3 2 5 M 1 M3 3 10 Body ported Base mounted (4 port) 2 3 10 3 5 M SYJ3 (Manifold use only) Base mounted (5 port) 10 4 M 2 5 3 SYJ3 Clean series 4 port Manual override Port size Body option Nil: Non-locking push type Nil: Without sub-plate 3: Main/Pilot valve common exhaust type For type 31, S31, 32, S32 manifold 5 port R port P, E port (With gasket and screws) D: Push-turn
Solenoid on side B 1 3 5 7 9 17 29 31 3 Input block connector Connects the Input block.
(Type 20 manifold) 10 23 5 M 1 M3 SYJ3 Body ported Base mounted (4 port) 2 10 SYJ3 33 5 M (Manifold use only) Base mounted (5 port) SYJ3 43 M 2 5 10 Clean series 4 port Port size Coil specifications Manual override Nil Standard With power saving circuit <24, 12 VDC only> Nil: Non-locking push type Nil: Without sub-plate T Power saving circuit is not available in the case of "W" type.
(SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.