ZP

(22) ZPR10 29 (23) 31 (21) 29 (23) 31 (22) ZPR13 31 (23) 31 (22) ZPR16 ZPR20 (51) 65 (50) 68 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Micro Mechanical Valve Series VM1000

VZM550-01-30R/B/G/Y-X219 Panel mounting hole 31 1.5 1.5 30.5 M5 x 0.8 25.5 3 (Pilot exhaust port) 0.8 to 7.5 (112) (143) PE R2 P R1 Symbol 13.6 (B) 2 (A) 4 86.5 35 19.8 17 13.6 B A 35 10.8 14 12 3 (R2) 1 (P) 5 (R1) 1.6 18 13 3 21 25 0.5 MPa supply 14.7 10.8 VM VM T.T.

17

m3 1.

Sine Rodless Cylinder Series REBR Direct Mount Type

Max. load weight 2 = M/Mmax Review M1, M2, M3. Mmax is the allowable moment. 2. Static moment 3 = Me/Memax Review Me1, Me3. Memax is the allowable moment. 3.

MXW

For details, refer to page 8-30-31. 8-7-22

IZx-OMX0087

Note 31) Note 31) Press S button once Press S button once [Offset voltage [ Emitter contamination detection level selection mode] Set the contamination detection level of the high voltage power supply module emitter selected by "Channel selection mode". Refer to 4-4-6. Emitter contamination detection level selection mode for details.

CUJ

x 28l M3 x 33l M3 x 38l 4 M2.5 x 14l 14 4 5 M3 x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10

Pin Clamp Cylinder Series CKQ/CLKQ

189 29 187 4.6 5.5 15 7 31 11 189 29 187 5.6 6 16 7 11 31 189 29 187 6.1 7 18 8 36 12 194 34 192 7.1 8.5 20 8 36 13 194 34 192 8.6 10.5 25 8 36 15.5 194 34 192 10.6 P (Port thread size) Nil G1/4 TN TF Rc1/4 NPT1/4 5 Series CKQ/CLKQ Dimensions CKQTB50 CKQTA50 (The angle of the cylinder port position against the mounting side is 90) Refer to How to Order on page1 for the mounting side and

AHC System Series MA

Type Finger opening port MA210-CR PCD16 MHZ2-10D-A210 With gasket MA210-YNM3 24 28 Hexagon socket head cap screw M3 x 12 (3 included) (48.8) (68.8) (12) 49 (81.8) Finger closing port For mounting tool adapter 3 x M3 x 0.5 depth 4 MA210-AM3 With gasket 23 10f8 0.013 0.035 3 6.5 7 2 x M3 x 0.5 depth 6 2.4 16 5.7 3 13.2 43.8 Hexagon width across flats 5 24.5 31 20.8 6 16.8 Bottom hole dia. 2.6

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

Air Slide Table Series MXW

31 31 31 B 104 124 149 174 199 MXW12 W 31 11 11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16 W 14.5 14.5 39.5 14.5 14.5 14.5 V 225.5 280.5 155.5 180.5 205.5 230.5 A 43.5 43.5 43.5 43.5 68.5 43.5 43.5 B 293.5 318.5 243.5 268.5 168.5 193.5 218.5 MXW20 W 23.5 23.5 23.5 23.5 48.5 23.5 23.5 V 313.5 338.5 263.5 288.5 188.5 213.5 238.5

SI unit ( device)

30 29 28 27 26 25 24 31 30 29 28 27 26 25 24 Force output 4 24-31 Output 28-31: Setting value F0 1 1 1 1 0 0 0 0 0F 0 0 0 0 1 1 1 1 Hold last state Structure of Output Switching Counts (index 68) The output switching count parameter consists of thirty-two sub-indices that represent bit fields with a size of 32 bits each.

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 12. Note 2) A model with PD port (M3) is available as an potion. Refer to page 12.

MXH

For details, refer to page 8-30-31. 8-2-20

Short Stroke Electric Actuator Series LX

G 28 58 5H9 +0.030 0 depth 5 (5.5) 10 D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (6) 8 (15) 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates

ZSE30/ISE30

Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

ZQ-OM01301

O.D. of sheath 1.7mm Note ) For details on the V100 series, refer to the Operation Manual for that series. 31 - Doc. No.

HRX-OM-R026

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA1 MSUA1-S, SE Scale: 70% C 8-M3 x 0.5 depth 5 51 31 38 23.5 B 25 4-M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (positioning pin hole) 35h9 0 0.062 22.5 +0.025 0 +0.043 0 3-3H9 depth 3 ( A , B , C ) 17 H9 27 2.5 2 2-4.5 through 3-R1.5 12.5 37 8 6.5 10.3 6.5 36h9 0 0.062 31 4.2 2 31.5 2 27 16 9 5 Angle adjustment bolt 4.5 2-4.5 through 3-R1.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.