Electric Actuator

Size Order no. 22 16 25 32 LE-D-2-1 LE-D-2-2 LE-D-2-3 $1 Component Parts No. Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

24 36.5 50.5 48 112 D 30 26 48.5 60 56 127.5 MS Inch Size LQ Applicable tubing O.D.

Free Mount Cylinder for Vacuum Series ZCUK

43 27 24 48 34 29 53 43 34 23 14 38 28 14 38 35 20 41 22 12 33 12 33 12. 5 18. 5 AEP 33. 5 39. 5 DQ HQ HP ZC(D)UKD25 ZC(D)UKR25 ZP 14. 5 23. 5 HEP 38. 5 47. 5 DQ HQ HP Related ZC(D)UKD32 ZC(D)UKR32 ZP Equipment 18. 5 50 19. 5 51 60. 5 65. 5 69. 5 Note) ZPU-X11: Flat type only.

CLA

light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

AC

Ex.) 2R Without valve function D 3 8 1 2 3 4 Float style auto drain (N.O.) AFM3000 to AFM4000-06 Combination Table/Accessory and Option Combinable Impossible Depends on the model Applicable mist separator Option Auto drain Sym Accessory/Option AFM2000 D D C 2 6 8 C J R W AFM3000 AFM4000 D D C 2 6 8 C J R W Pressure differential auto-drain Float style auto drain (N.O.)

10

Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T

LVQ

D (Max.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.

Air Slide Table Series MXQ

24.5 37.5 55.5 55.5 30.5 20.5 MXQ20 47.5 37.5 27.5 37.5 43.5 75.5 78.5 81.5 35.5 33.5 65.5 68.5 73.5 37.5 27.5 17.5 27.5 25.5 23 MXQ25 56.5 46.5 36.5 36.5 50.5 64.5 92.5 92.5 50.5 40.5 54.5 82.5 73.5 46.5 36.5 26.5 26.5 40.5 27 Solid State Auto Switch: D-M9BV, D-M9NV, D-M9PV, D-M9BWV, D-M9NWV, D-M9PWV Stroke B Stroke E Model A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150

JXCx-OMT0023

H T E (Note)L d W D T Max.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

Rotary Table/Rack & Pinion Style Series MSQ

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

Air Slide Table Series MXJ

4.5 4.5 22 18 18 8 13 14 4.5 4.5 3.5 3.5 29 29 18 18 9 8 13 Reed auto switch D-A9V Solid state auto switch D-M9V D-M9WV D-F8 D A Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

Metal Seal/Rubber Seal Series VQ Body Ported

Blanking plug KQ2PDimensions 23 04 06 A L D Model Applicable fittings size d It is inserted into an unused cylinder port and SUP/EXH ports.

24

Position [mm] D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-M9V D-M9WV D-M9AV D-A9V D-P3DWA *1 D-P4DW D-A9 D-A9V D-P3DWA *1 D-P4DW Bore size Bore size Hs Ht Hs Ht Hs Ht Hs Ht 12 19.5 17 16 22 19.5 20 24.5 22 25 26 24 32.5 32 29 26.5 35 40 40 33 30.5 39 44 50 38.5 36 44.5 49.5 63 45.5 43 51.5 56.5 80 45 74 43 71.5 50 80.5 61 74 100 55 85.5

Electric Actuator/Slider Type

0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Hs Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 30 72.5 73

Cylinder with Lock Series CLS

Hs 33 Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht Hs A 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5