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Due to this movement, the fluid 18 Series PB1000 Piping and Operation/Built-in Solenoid Valve Type/Air Operated Type Piping Bottom view Discharge port OUT Solenoid valve lead wires Air exhaust portEXH Suction port IN Air supply port SUP Foot (optional) Manual override pin Top view The PB1013 air operated type has a plug in the air exhaust port EXH.

Blue: ON Grey: OFF 18 No.SFOD-OMT0012-A (3) Teaching window The teaching window can only be displayed in Remote mode. (It is not available in other modes). It is possible to operate JOG, Inching, and Return to Origin for the connected axis.

Reversed output (out1) 18 - NO. ZQ-OM01501 Function Setting Function selection mode In measurement mode, press the button for 2 seconds or longer to display [F 0]. Select to display the function setting to be changed, [F ]. Press the button for 2 seconds or longer in function selection mode to return to measurement mode.

(1F.S.) 1 LoC1 ( [LoC]) < -> 5 LoCUnL () ,/ 39 - < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 41 -/ [UnL], [FAL]3[LoC] 40 - [000] <> (40 -)(40 -) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) 41 - /ON/OFF OUT2 OUT1 (V) OUT2 OUT1 (V) H_3 P_1 H_3 100 H_3 P.25F 2OUT2 P_1-60kPa H_3 45 P_1H_3-60-45-105 P_1H_3 -105 H_3 P_1 P_1 H_3 100 H_3 42 - , (1015 ) 43 - () No.1 ON ON OFF Yes No No

-3 6.5mm ()M3 0.61Nm 2-2-5 IDFA Series 2 3 IDX-OM-W017 2 2 3 () 2 2 () 2-3 IDFA Series 2 4 IDX-OM-W017 3 / 3 3 1 INOUT 3 2 ON IDFA3E() IDFA4E15E() INOUT 5 ONOFF 0.15MPa NO IN IDFA Series 3-1 3 1 IDX-OM-W017 3 / 3 3 OFF OFF 3 4 3 3 5 3 5 OFF 3 6 24H OFF IDFA Series 3-3 3 2 IDX-OM-W017 4 4 4 1 5 10 4 2 4-2-1 () 4-2-2 1. 100 2 () 100 T 4-2-3 4-1 41

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F ZSE80(F)/ISE80(H) ,, (), No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -43No.PS-OMM0002CN-F No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 -44No.PS-OMM0002CN-F No.

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 18 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Due to this movement, the fluid 18 Series PB1000 Piping and Operation/Built-in Solenoid Valve Type/Air Operated Type Piping Bottom view Discharge port OUT Solenoid valve lead wires Air exhaust portEXH Suction port IN Air supply port SUP Foot (optional) Manual override pin Top view The PB1013 air operated type has a plug in the air exhaust port EXH.

Circuit example/Built-in solenoid valve Ball valve Regulator FLUID OUT AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 17-5-166 27 Series PB Process Pump: Built-in Solenoid Valve Type/ Air Operated Type (External Switching Type) Dimensions PB1000 FLUID OUT Rc 1/8 VC 11 OUT VDW 11 VQ 84 72 VX2 Mount with this surface (out port side) on top 7.5 41 60 45 VX Courtesy

Technical Data 1555 CY1F Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) D-A9, D-A9V (mm) Note 2) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range 9 B1 B2 B3 (mm) 10 15 25 38 60 18 80 38 80 10 39 66 19 86 39 86 11 44.5 95.5 24.5 115.5 44.5 115.5 D-M9, D-M9V, D-M9W, D-M9WV D-M9A, D-M9AV Mounting pattern q B1

0.2MPa~10 Pa 0.4~0.7MPa 5~60C IN 11 MADE IN JAPAN 32 32 60 2 x M5 x 0.8, thread depth 5 18 18 524 Smooth Vent Valve XVD Series Construction/Operation Main air supply scale plate !

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 21 31 20.5 13 18 58 3H9 depth 3 +0.025 0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth

Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS 125.6 mm 11LEJS 20.5 mm 25ASlide Table Type LEPS Series Page 383 Size: 6, 10 LEC LEPS6-25 290 g Weight LEC S LEC SS-T LEC Y Linear guide integrated Motorless LAT 41

1 Filler seal 6 81021-8 1 Level gauge 7 Hard glass 81021-9 1 Type C retaining ring for hole 8 Stainless steel FG00193 1 O-ring 9 FKM KA00622 2 Pressure gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18

24 36 65 80 120 Outlet air pressure dew point Note 1) IDF IDU Standard condition (ANR) (7C) 15 31 46 83 101 152 Outlet air pressure dew point Air flow capacity m3/h (10C) 17 34 50 91 112 168 Outlet air pressure dew point IDF FS (3C) 13 25 37 68 83 125 Outlet air pressure dew point Note 2) Compressor intake condition (7C) 16 32 48 86 105 158 Outlet air pressure dew point IDFA IDFA (10C) 18

No.PS-OMH0005CN-D // PSE200 2 8 9 10 13 13 15 17 18 22 24 27 28 29 36 36 37 -1No.PS-OMH0005CN-D (ISO/IEC)(JIS) 1 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

Note 2) Heaters are not available for size 16. 18 XL-OMS0001-B Revision history A Heater Replacement Procedure added SZ B Product Specific Precautions added. Maintenance part indication revised. Erroneous descriptions corrected. Format changed.

. -1516 D-M9/D-A9 D-M9 D-M9W D-M9AVL D-M9V D-M9WV D-M9AL D-A9 D-A9V A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm

and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnet Holding Force Theoretical Output (N) Magnet holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm) 0.1 0.2 0.3 15 59 15 32 18