End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

16 15 44 10 8 22 42.3 56 M8 X 1.25 M14 X 1.5 146 32 84 17 11 27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85

HRX-OM-W002

1000 40 1000 1000 1000 1000 500 500 500 500 500 500 500 500 500 500 0 0 0 0 0 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 0 10 20 30 40 0 0 0 0 10 20 30 40 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] 0 10 0 10 20 30 40 Circulating fluid temperature[] Circulating

SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 P N 1 2 D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

MNB

50 63 80 100 A 22 30 35 35 40 40 B 54 63 75 90 102 116 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 GA GC 45.5 52.5 58.5 68 81 96 Ee11 30 35 40 45 45 55 GB 13 14 15.5 16.5 19 19 GF 18.3 19.5 22.4 20.7 26 26 GL1 12 12 15 12 18 20 GR 4 4 5 9 11.5 17 GE GD 13 16.5 19 23 33 37.5 GL

MNB

50 63 80 100 A 22 30 35 35 40 40 B 54 63 75 90 102 116 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 GA GC 45.5 52.5 58.5 68 81 96 Ee11 30 35 40 45 45 55 GB 13 14 15.5 16.5 19 19 GF 18.3 19.5 22.4 20.7 26 26 GL1 12 12 15 12 18 20 GR 4 4 5 9 11.5 17 GE GD 13 16.5 19 23 33 37.5 GL

Table of Contents

X Y (mm) Size X Y Body (B) 10 10 12 Body (A) 15 11.5 15.5 20 13 17 30 16 19 40 17 28 11-2-35 35 Rotary Actuator: Free Mount Type Vane Style Series CRBU2 Size: 10, 15, 20, 30, 40 Series Variations CRB2 Fluid Air CRBU2 Size 10 15 20, 30 40 CRB1 Single vane (S) Double vane (D) MSU Vane type S D S D S D S D CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

High Purity Fluoropolymer

CAT.ES70-17 C High Purity Fluoropolymer Fittings & Tubing PAT.

MNB

1/4 1/4 1/4 1/4 19.5 27 32 32 37 37 10 14 18 18 22 26 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 13 14 15.5 16.5 19 19 45.5 52.5 58.5 68 81 96 18.3 19.5 22.4 20.7 26 26 97 12 12 15 12 18 20 4 4 5 9 11.5 17 88.5 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 91 104

CLS

17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 32 36 40 50 50 63 64 72 80 100 100 126 +0.084 0 +0.084 0 3 5 30 46 28 0 0.2 161 78 18 110 146 128 16 114 64 110 M14 x 1.5 75 Up to 1000

SV

(Values at the initial period) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center (A) 4 (B) 2 Response Time 5 (EA) 1 (P) 3 (EB) Response time (ms) (at the pressure of 0.5 MPa) 3 position pressure center Type of actuation SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 11 or less 25 or less 28 or less 40 or less 2 position single 10 or less 17 or less 26 or less 40 or less 2 position double 5 (EA) 1 (P

REA/REB

Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16 29 50 16 92 11 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA50/63 14 2 -Rc 1/4 L 0 0.2 NA 33 14 E (h8) E (h8) I X D 4-TC Effective thread

REA/REB

29 50 16 92 11 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA50/63 14 2 -Rc 1/4 L 0 0.2 NA 33 14 E (h8) E (h8) I X D 4-TC Effective thread depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

X Y (mm) Size X Y Body (B) 10 10 12 Body (A) 15 11.5 15.5 20 13 17 30 16 19 40 17 28 11-2-35 35 Rotary Actuator: Free Mount Type Vane Style Series CRBU2 Size: 10, 15, 20, 30, 40 Series Variations CRB2 Fluid Air CRBU2 Size 10 15 20, 30 40 CRB1 Single vane (S) Double vane (D) MSU Vane type S D S D S D S D CRJ Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial

CRB2/CRBU2/CRB1

(mm) X Y Size X Y Body (B) 10 10 12 Body (A) 15 11.5 15.5 20 13 17 30 16 19 40 17 28 32 Free-Mounting Rotary Actuator: Vane Type Series CRBU2 Sizes: 10, 15, 20, 30, 40 Fluid Air Size 10 15 20, 30 40 S: Single vane D: Double vane Vane type S D S D S D S D Axial ports Axial ports Axial ports Axial ports Axial ports Axial ports Axial ports Axial ports Side ports Side ports Side ports Side ports

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

X Y (mm) Size X Y Body (B) 10 10 12 Body (A) 15 11.5 15.5 20 13 17 30 16 19 40 17 28 11-2-35 35 Rotary Actuator: Free Mount Type Vane Style Series CRBU2 Size: 10, 15, 20, 30, 40 Series Variations CRB2 Fluid Air CRBU2 Size 10 15 20, 30 40 CRB1 Single vane (S) Double vane (D) MSU Vane type S D S D S D S D CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

C95

Contents CK95-32 CK95-40 CK95-50 CK95-63 CK95-80 CK95-100 32 40 50 63 80 100 Kits include items 13 to 17 for 32, 12 to 18 for 40 to 100 from the table above.

CS1

59 35 16 90 14 47 36 43 29 25 64 M30 X 1.5 Lube Non-lube Air-hydro 1/2 M14 X 1.5 36 to 1000 75 31 15 161 128 50 17 59 35 16 90 14 47 36 43 32 28 72 M30 X 1.5 3/4 M16 X 1.5 40 to 1200 80 36 18.5 17 182 144 56 53 20 40 90 59 43 14 39 36 32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

CXS

Bore sizes 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard strokes (mm) 6 10, 15 20, 25, 32 Applicable auto switches: Refer to pages 40 through 49 for detailed auto switch specifications.

Speed Controller with Indicator

37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (63) AS421FS-04-16 (S) 16 23.8 34.8 47.7 (47.6) 32.7 20.6 68 (67) Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation