100

Weight [g] Model ZL3 ZL6 Basic type 390 470 Port exhaust +80 +25 Vacuum pressure switch (Excluding lead wire) +20 +20 Vacuum pressure switch (Including lead wire) +60 +60 With supply valve and release valve +120 +120 With supply valve and without release valve +80 +80 With pressure gauge +30 +30 With adapter assembly for bottom mounting +60 21 Multistage Ejector ZL3/ZL6 Series Internal Circuits

LEC-OM038xx

K 0.3m L 0.5m 1 1m 4 Terminating Resistor Termination on RS-485 Bus (120 Ohms) Recommended connector :XS2C-D4** [OMRON Corporation] 120 1/4W 5 RJ-45 connector dust cover Dust adhere when the RJ-45 connector is not connected with the CN1 or CN2 connector.

LEC-OM036xx

K 0.3m L 0.5m 1 1m 4 Terminating Resistor Termination on RS-485 Bus (120 Ohms) Recommended connector : XS2C-D4** [OMRON Corporation] 120 1/4W 5 RJ-45 connector dust cover Dust adhere when the RJ-45 connector is not connected with the CN1 or CN2 connector.

SI unit for AS-Interface

mA or less 5 240 mA or less 6 120 mA or less 6 Number of outputs 8 outputs 4 outputs 8 outputs 4 outputs Output type PNP (negative common) / source Load Solenoid valve with surge voltage suppressor of 24 VDC and 1.5 W or less (manufactured by SMC) Output specification Supply current 24 VDC Residual voltage 0.3 V or less Supply current 500 mA or less 7 250 mA or less 7 240 mA or less 6 120

MHF2

Auto switches marked "O" are produced upon receipt of order. 12-3-8 9 Series MHF2 Low Profile Air Gripper Specifications Air 8: 0.15 to 0.7 MPa 12 to 20: 0.1 to 0.7 MPa 10 to 60C (with no condensation) 0.05mm 120 c.p.m. 120 c.p.m. 60 c.p.m.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

MHF2

Auto switches marked "O" are produced upon receipt of order. 12-3-8 9 Series MHF2 Low Profile Air Gripper Specifications Air 8: 0.15 to 0.7 MPa 12 to 20: 0.1 to 0.7 MPa 10 to 60C (with no condensation) 0.05mm 120 c.p.m. 120 c.p.m. 60 c.p.m.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

MRHQ

Pressure 0.7MPa 0.6MPa 100 Gripping force N Gripping force N 0.6MPa 60 0.5MPa 80 0.5MPa 0.4MPa 40 60 0.4MPa 0.3MPa 40 0.3MPa 20 0.25MPa 20 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 12-11-9 10 Series MRHQ Rotational Torque and Gripping Point Rotational Torque Graph (3) 3.5 1.0 3.0 0.8 2.5 MRHQ20 MRHQ25 Rotational torque Nm Rotational torque Nm

Wedge Cam Operation Provides

40 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 20 20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L (mm) Holding point L (mm) Holding point L (mm) Holding point L (mm) Note) Distance to the holding point L of single acting type is shortened end by spring return.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

.: GR-L-010 (10g) MGT D-X Individual -X 415 Series MGF Dimensions: 40 MGF40 120 4 x M8 x 1.25 through 100 100 120 90 9.5 8 46 + Stroke 36.5 + Stroke 7.5 18.5 2 x Rc, NPT, G 1/8 Breathing hole for guide (with element) 38 When the cylinder is extended Port for extending cylinder Port for retracting cylinder 114 4 x M8 x 1.25 through M5: T-slot for hexagon bolt K 3.5 40 100 120 114 8.7 6 x K

Rotary Gripper Series MRHQ

100 Pressure 0.2MPa Pressure 0.2MPa 100 MRHQ 80 Pressure 0.2MPa 0.2MPa Pressure 0.2MPa 80 Overhang H mm Overhang H mm MA 60 0.3MPa 0.3MPa 0.3MPa 0.7MPa 0.6MPa 0.5MPa 0.5MPa 0.7MPa 0.6MPa 0.5MPa 60 0.7MPa 0.7MPa 0.7MPa 0.3MPa 0.4MPa 0.3MPa 0.4MPa 0.4MPa 0.4MPa 0.4MPa 40 D0.5MPa 0.6MPa 0.5MPa 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point

Low Profile Air Gripper Series MHF2

When using, refer to page 471 for auto switch hysteresis. 452 Low Profile Air Gripper Series MHF2 Specifications Fluid Air 8: 0.15 to 0.7 MPa 12 to 20: 0.1 to 0.7 MPa 10 to 60C (with no condensation) 0.05 mm Note 1) Operating pressure Ambient and fluid temperature Repeatability Short stroke Medium stroke Long stroke 120 c.p.m. 120 c.p.m. 60 c.p.m.

Digital Flow Switches

Load Black FLOW SWITCH UP OUT2 2 + 44 54 34 SET White OUT2 OUT1 3 DOWN FOR WATER 12 to 24VDC Blue PF2W7--27(-M) 2-Port size 4-4.5 40 50 Brown 1 (41.5) OUT1 4 Black Load White OUT2 2 + Load 3 Blue 12 to 24VDC 73 42 PF2W7--67(-M) 4 Connector pin numbers 4 3 2-3.4 43 Flow direction L Dimension 100 106 Model PF2W704 PF2W720 2 1 Pin description DC(+) OUT2 DC() OUT1 Pin no. 1 2 3 4 PF2W740 120

IR1000/2000/3000

AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX AMR ITV Compact IC 35mm VBA 120 g Lightweight 50mm VE 66mm VY1 270 g 700 g Pressure gauge can be mounted from the front or rear G Standard PPA Pressure gauge reverse mounted Rear AL VAC (Vacuum pump side)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Setting Digital Digital Digital Digital Digital Digital 0.01 to 1 0.02 to 2 0.05 to 5 0.1 to 10 0.3 to 25 0.5 to 50 1 to 100 2 to 200 Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120

VZ5000

160 0.32 1.6 2.2 0.53 0.33 0.4 VK C6 (One-touch fitting for 6) 0.33 0.32[0.54] 0.30 1.4 1.1 1.8 [0.78] 1.9 2.5[1.3] 1.6 0.49 0.61[0.38] 0.39 0.27 0.37 0.36[0.40] 0.35 0.27 0.45[0.22] Rc 1/8 3 position VZ VZ520--C6 160 2 position 120 160 VF 0.34 2.0 2.3 0.61 0.39 0.52 C8 (One-touch fitting for 8) 0.29 0.35[0.49] 0.39 1.7 1.2 1.9 [0.86] 2.0 2.6[1.3] 1.7 0.49 0.67[0.38] 0.42 0.35 0.38 0.57[

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil H Without connector With connector Nil A1 A2 B1 B2 C1 C2 S1 S2 Nil S R Nil 2 5 A Without cable 2 m 5 m 10 m Without cable Standard cable Robotic cable (Flexible cable) Power supply voltage (V) Compatible drivers 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 Without driver LECSA1

Direct Operated

AC Specification (Class H coil) Model Apparent power (VA) Energized 50 60 50 60 50 60 Inrush Frequency (Hz) Temperature rise (C) Note) 65 60 100 95 120 115 14 12 33 27 50 41 33 28 65 55 94 79 VX31 VX32 VX33 Note) The values are for an ambient temperature of 20C and at the rated voltage. 2 Applicable Fluid Check List For Air Specifications For Water For Oil For Steam For Vacuum Pad Construction

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Station number setting switch: Set the station number within the range 1 to 120. If the station number is set to a value other than 1 to 120, the ERR LED will come on. STATION NO.