Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRSH100-Al-20-l HRSH150-Al-20-l HRSH200-Al-20-l HRSH250-Al-20-l HRSH300-Al-20-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude Note 1), 9) C Temperature: 20 to 45, Altitude: less than 3000

HRX-OM-R005

200-230V AC 230 (50/60Hz) 3 cores x12AWG (3 cores x3.5mm2) HRS060-W-20 20 (including ground) For power supply cable, it is to be properly prepared by the customer in accordance with National Electrical Code and Canadian Electrical Code.

HRX-OM-W058

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] 3 wires x14AWG HRS018-A-20-R HRS030-A-20-R 1-phase 10 30 (3 wires x 2.0mm2) 200, (including ground) Cable diameter: 8.5 to 11.5 mm 200-230V AC 230 HRS0-A-20-T-R (50/60Hz) (High pressure pump 15 30 [Optional]) HRS-R Series 3.3 Installation 3-9 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.3.3 Preparation

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

37 17 40 21 40 11 23 0 26 With rod boot Bore (mm) e Stroke range (mm) f h ZZ l 40 50 63 80 100 1/4 stroke 20 to 500 43 11.2 59 154 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 20 to 600 52 11.2 66 178 1/4 stroke 20 to 750 65 12.5 80 213 1/4 stroke 20 to 750 65 14 81 224 3.8-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore size Stroke

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

stroke (mm) 400 450 450 500 Bore size (mm) 20 25 32 40 Standard stroke (mm) Available maximum stroke (mm) MXW MXP 25, 50, 75, 100, 125, 150, 200, 250 300 1000 MG The long-stroke style is only applicable to the axial foot style and the front flange style.

LEC-OM02704CN

DC24V 2. 20 3. 4. 5. 6. 7. 8.

LEF-OM007xx

S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC B2 200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable

LECA6_C

CN1(P.18) 4.2 CN2CN3: LE-CA-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O (P.27) 6.3 (P.24) 17 - 5.

Servo Motor Controller (24 VDC)

Conversion unit Controller USB cable (A-miniB type connector) 120.3 120.3 mm mm 200 200 mm/s mm/s Communication 100 500 100 500 1 1 200 1000 200 1000 2 2 CN4 50 200 50 200 3 3 cable PC (The PC should be obtained separately.) Controller PLC, etc.

Series MXP Precision Air Slide Table

-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 1 N = 0.2248 lbf 165 Series MXP Precision Air Slide Table Construction MXP10,12,16 9 8 1 2 3 11 19 7 10 14 13 15 18 17 16 12 5 4 6 Description Material

PFxx-OMY0005

(Displays 0 when the value is below 10 L/min) 40 to 2100 L/min 20 to 1050 L/min (Displays 0 when the value is below 40 L/min) 2.0 0 to 2%F.S. (Displays 0 when the value is below 20 L/min) 60 to 2100 L/min 30 to 1050 L/min (Displays 0 when the value is below 60 L/min) 3.0 0 to 3%F.S.

In-line Air Filter

20 0.7 MPa 0.7 MPa 10 10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3

Compact and Lightweight

40 40 40 40 20 Suction flow rate 10 20 20 20 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 15 20 25 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 Supply pressure [MPa] Suction flow rate [L/min (ANR)] Supply pressure [MPa] Suction flow rate [L/min (ANR)] ZH10SA ZH10LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 100 100 100

HRX-OM-K003

Ph (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) * 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max. 50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (Ph4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L) Max.200 Max.70 Calcium hardness (mgCaCO3/L) Max.150 Max.50 Standards Ionic silica (mgSiO2/L) Max.50 Max.30 Iron (mgFe/L) Max.1.0 Max.0.3 Copper

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

3 Position Cylinder Series RZQ

Model RZQ32 RZQ40,50 RZQ63 Applicable floating joint JB40-8-125 Graph 1 JB63-10-150 200 JB80-16-200 63 100 Guide Shock absorber 50 Load weight (kg) 50 40 40 32 30 Floating joint 3 position cylinder 20 10 Maintenance Caution 5 150 100 200 300 1.

Air Slide Table Series MXJ

) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXJ8-20 MXJ8-15 MXJ8-20 MXJ8-15 MXJ8-15 MXJ8-15 0.08 0.05 0.15 MXJ8-10 MXJ8-10 MXJ8-5 MXJ8-5 -10 -15 -20 MXJ8-10 MXJ8-10 -10 -15 -20 0.04 0.06 MXJ8-5 MXJ8-5 0.10 MXJ8-5 MXJ8-5 0.03 0.04 0.02 0.05 0.02 0.01 0 20 40 60 0 10 30 50 70 5 10 15 20 25 30 0 20 10 30 50 70 40 60 Load (N) Load (N) Load (N) 176 Air Slide Table Series

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal