Compact Rotary Actuator

The end angular speed is obtained by: Table8 Allowable kinetic energy Size Allowable kinetic energy mJ Cushion angle No cushion Cushion type 10 0.25 15 0.39 20 25 120 40 30 48 250 40 40 81 400 40 Allowable kinetic energy of cushion type is max. adsorption energy when the cushion needle adjustment is optimum.

MHS

16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400

IDX-OM-W037

Checks and Maintenance 6.1 Specifications erature bowlItem Specification Outlet air pressure dew point 10 o C IDH410 IDH4 20 IDH A 423 Rated performance IDH6 10 ) release bushOutlet air temp IDH 6 20 IDHA 6 23 (2) Mounting of the bowl assembly Note 1 ) 2) ir flow capacity 400 L/min ANR Operating range Fluid Compressed air Amount of air processed 100 to 5 00L/min ( 600 L/min ANR Inlet

Membrane Air Dryer

0.94) 0.78 (0.91) 0.81 (0.94) 0.78 (0.91) 0.8 (0.94) Mass kg (With bracket) Model Specifications IDG60LA IDG75LA IDG100LA IDG60SA IDG75SA IDG100SA Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 224 308 400

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

ATX-OM-F004E

250 Indoor 1 phase 100VAC 1 phase 200VAC 1 phase 100VAC 3 phase 200VAC 3 phase 200VAC 3 phase 200VAC (50/60Hz) (50/60Hz) (50/60Hz) (50/60Hz) (50/60Hz) (50/60Hz) 50Hz 55 58 55 50 90 204 60Hz 58 65 65 60 130 244 50Hz 0.8 0.43 0.8 0.4 0.4 2.0 60Hz 0.81 0.46 0.9 0.35 0.45 2.0 Power supply Electric specifications Power consumption Current 255 1.5 300 Proof pressure MPa Cooling fan port size mm 400

MONOSASHI-KUN

The cylinder section does not have a water resistant enclosure. 3-3 Allowable Kinetic Energy 3-3-1 Allowable Kinetic Energy (J) Bore size(mm) 12 20 32 40 50 63 Allowable Kinetic EnergyE 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 Mass of Cylinder Movable Parts (g) Cylinder stroke (mm) Bore size(mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70 84 98 112 126 140 154 168

3

DSince there are other applicable auto switches than listed, refer to page 400 for details. For details about auto switches with pre-wired connector, refer to pages 1014 and 1015. Auto switches are shipped together, (but not assembled).

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Built-in magnet for auto-switches CV MVGQ Maximum Driving Speed of Cylinders 1000 1000 900 900 Cylinder speed (mm/s) Cylinder speed (mm/s) 800 800 Load factor: 10% Load factor: 50% 700 700 600 600 500 500 400 400 300 300 200 200 100 100 0 12 16 20 25 32 40 50 63 80 100 0 SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) Series Variations Bore size (mm) Standard stroke (mm) Applicable valve series

Clean Gas Filter

(Inlet pressure is 0.7 MPa, at pressure drop of 0.02 MPa) Series Filtration Temperature C Pressure MPa Page Replacement of element Disc type SFA10 26 SFA20 70 P . 299 HAA HAW AT 0.01 m SFA30 140 Filtering efficiency 99.99% ( ) IDF IDU Membrane element ( ) IDF FS Cartridge type Disposable type IDFA SFB10 45 0.99 5 to 80 Replaceable P . 302 Straight type IDFB IDH ID IDG Nominal IDK 120 m 400

Clean Exhaust Filter

(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.

Speed Controller with One-touch Fittings Series AS In-line Type 1

In-line type How to Order JIS Symbol 1F 12 K 400 AS Option Body size Nil K N None Hexagonal lock nut Electroless nickel plated If more than one option is required, write option part numbers in the order of K, N. M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" Controlled flow (Free flow) Flow rate (/min (ANR)) 420 1050 130 290 660 1390 460 920 230 100 Effective area (mm 2) 6.5 16 2 4.5 10 21 7 14 1.5 3.5 Note) Flow rate values are measured at 0.5 MPa and 20C Flow Direction Symbols on Body How to Order JIS Symbol Symbol 1F 06 D 200 AS Type adjustable by flat head screwdriver Body size 100 200 205 300 400

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Body size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard Applicable tubing O.D. 1/2 standard Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" With One-touch fittings 5/32" 4 3/16" 6 1/4" 8 5/16" 10 3/8" 12 1/2" Use 1/8" tube. 15-9-97 7 Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow

MHL2

400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.4 MP 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MP 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50

Hydraulic

3/4"(19) rubber hose 15 Cylinder bore size 63 13 1/2" (12.7) 80 17 5/8"(15.3) rubber hose rubber hose 12 60 Cylinder bore size 50 50 3/8"(9.5) 40 rubber hose Flow rate (l/min) Cylinder bore size 40 30 10 9 Cylinder bore size 32 20 8 7 Cylinder bore size 25 12 1/4"(6.3) rubber hose 10 Cylinder bore size 20 9 8 7 6 5 6 5 4 (steel pipe I.D.) 4 3 2 7 6 5 4 3 2 20 30 40 50 60 80 100 200 300 400

Tamper Proof and Flat Head Screw

.: AS-T-1) 100 200 205 300 400 M5 standard 1/8 standard Applicable tubing O.D. 1/4 standard Metric sizes 23 04 06 08 10 12 Inch sizes 3/8 standard 3.2 01 03 05 07 09 11 13 1/8 1/2 standard 4 5/32 6 3/16 With One-touch fitting 8 1/4 10 5/16 12 3/8 1/2 Use 1/8 tubing.

AS-FG/ASD-FG

" 3/16" 1/4" 1/8" Inch size 1/4" 5/16" 5/32" 3/16" l/min (ANR) Flow rate Controlled (Free) flow 100 130 230 290 460 420 660 920 1050 1390 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area mm Note) Flow rate values are at a pressure of 0.5MPa and a temperature of 20C. 7 Series AS-FG How to Order AS 200 1 F G 06 Body size Applicable tube outside diameter Metric size Inch size 100 200 205 300 400

Air Fittings & Tubing

Thread Rotating Torque/Allowable Number of Rotations Applicable tube O.D. 8 10 12 4 6 Rotating torque (Nm) (1) 0.022 0.006 0.012 0.020 0.014 Allowable number of rotations Series KS Series KX (rpm) 500 1500 300 1000 250 1000 500 1200 400 1200 Note1) Value under pressure 0.5MPa Male elbow Component Materials Principal element Series KS Series KX Male connector Body Stud, Holder, Guide Chuck