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value when power Note is off EXW1-RDXNE4# / EXW1-RDM#E3#: 16 points / 2 byte fixed EXW1-RDYNE4#: 0 points / 0 byte fixed a) Input size* 16 points / 2 byte 16 points / 2 byte Available EXW1-RDYNE4# / EXW1-RDM#E3#: 16 points / 2 byte fixed EXW1-RDXNE4#: 0 points / 0 byte fixed Output size (includes valves)* b) 16 points / 2 byte 16 points / 2 byte Available c) Wireless signal Active / Idle

It cannot be done during positioning operation, pushing operation and pushing. (5) Refer to a common auto switch / matter (Best Pneumatics No 2) when an auto switch is built in and used. (6) When conformity to UL is required, the electric actuator and controller should be used with a UL1310 Class 2 power supply. 19 No.JXC-OMW1019-A 9.2 Mounting Warning (1) Install and operate the product

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

Flow Rate Characteristics Series AV2000-A AV3000-A AV4000-A AV5000-A Port size 1(P), 2(A) 1/4 3/8 1/2 3/4 1 3(R) 1/4 3/8 1/2 3/4 1(P) R 2(A) C[dm3/(sbar)] 9.2 13.1 19.2 34.8 41.3 b 0.36 0.27 0.32 0.66 0.34 Cv 2.4 3.1 5.1 12.6 13.7 Flow rate characteristics 2(A) R 3(R) C[dm3/(sbar)] 8.8 9.2 10.1 23.7 b 0.46 0.48 0.55 0.67 Cv 2.5 2.6 3.2 9.2 Pressure for switching from low speed air supply

SUP, VAC port (4, 5/32") OUT 3 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L bracket (optional) Flat bracket (optional) 6-3.5 19 74 2-3.5 19 27 19 64 28 Minimum bending radius 80 Body +50 0 3000 15 35 (30.9) 8.7 4 9.9 Cable connector (4-wire) Straight type (optional) 7 14 Body Cable connector (4-wire) Right angle type (optional) 8.3 4.3 10.2 Minimum bending

AME150 AME250 AME350 AME450 AME550 AME650 AME850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Basic diameter 4 6 8 10 12 19 3.18 4.75 6.35 9.53 12.7 19.05 25.4 3.18 O.D.

1/4, 3/8 1/2 3/8, 1/2 3/4 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AME150 AME250 AME350 AME150SAME, #1 AME350SAME, #3 AME250SAME, #2 4.6-25 Super Mist Separator Series AME Dimensions: AME450 to AME850 HAl AT IDl AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H AMl B C D E F G I 221

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

0 (A, B, C common view) 44 MHZ 29 6 x M3 x 0.5 thread depth 6 (A, B, C common view) 9h9 0 0.036 MHF 15 4.7 9.7 1 2 MHL 5.8 3 4.7 2 x 3 MHR MHR (36.5) 33.5 MHK 19.5 2 x 4.2 MHS 2 3e8 0.014 0.028 MHC 10 Auto switch mounting groove Open: 11 Closed: 8 MHT MHY 8 0 0.05 MHW -X 12 4 4 Dimensional Differences between MHR and MDHR MRHQ The following dimensions are different between the MHR and MDHR

Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Compact / Lightweight resin body (PPS) IP65 RoHS Weight: 120 g (VDW30-XF) n t r e y l d a i 30 mm c r e i r c e s l t e e c c t b t i Power consumption e e o n d l a n .

98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27

ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025

2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U (10 ) ZS-27-01 4mm ZS-38-C4H O 6mm ZS-38-C6H O 1/4 inch ZS-38-N7H O 4mm ZS-38-C4L O 6mm ZS-38-C6L O 1/4 inch ZS-38-N7L O -9No.PS-OML0002CN-G LCD ((OUT1),(OUT2)) LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OML0002CN-G 2

2 !3 !1 y Diaphragm (B) e Exhaust w Bleed w r Diaphragm (C) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP(1) OUT(2) SUP(1) OUT(2) SUP(1) OUT(2) Exhaust Valve u !0 !0 !2 t r !

4 0.1 [MPa] 2 1 2 0 0 0 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 1 1.5 0.5 2 2.5 3 Distance from the workpiece [mm] ZNC60m ZNC80m 30 70 0.5 [MPa] 0.5 [MPa] 60 25 0.4 [MPa] 0.4 [MPa] 50 Lifting force [N] Lifting force [N] 20 0.3 [MPa] 0.3 [MPa] 40 15 0.2 [MPa] 0.2 [MPa] 30 0.1 [MPa] 0.1 [MPa] 10 20 5 10 0 0 0 3 2.5 2 1.5 1

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

Sensors 9 Release for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported 4 4 4 4 4 4 4 4 3 R 2 P 1 2 2 2 2 2 2 2 29.6 13.1 7.5 43.5 58.1 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable