Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

Possible to transfer a workpiece at low-speed.

150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

Compact and Lightweight

Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 250 100 250 100 100 100 Vacuum pressure Vacuum pressure ZL Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 200 80 200 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] ZH ZH Air consumption 150

HAA

150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 13

Air Cooled Aftercooler Series HAA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HAA15/22 Air inlet Air outlet Port size Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P

Series HAW Water Cooled Aftercooler 1

139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893

Rotary Cylinder Series MRQ Size: 32, 40 1

F(N) F(N) Stroke 105 15 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Rotation angle Linear motion Number of Auto Switches Mounted 02 0S 0 S2 SS S0 1 Nil 2S 20 2 n2 nS n0 n Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 11-10-19

CC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 200 150 CRA1H80-90 50 CRA1H63-180 Step (3) Select required function for valve unit 100 100 80 CRA1H63-90 Select a model from data (B), by determining the functions that are needed for the

REC

Up to 700 45 25 150 Up to 700 25 45 MK(2) 1500 32 150 Up to 1000 32 50 RS Q G 40 200 Up to 1000 40 60 Note 1) The cylinder performance may not as expected when stroke is shorter than recommended stroke even they are available.

MU

Possible to install auto switches Series Variations Standard stroke (mm) Rod end configuration Applicable auto switch Action Type Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2-color) D-A79W Double acting 40 50 Double rod Male thread, Female thread 63 Solid state switch D-A7 D-J79 (2-color) D-F7W D-J79W 25 32 Spring return

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte Output MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte When configuration assembly fundtion is not used: Set to "0".

Fieldbus system EtherNet/IP compatible SI Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.250 words MAX.500 byte Output MIN. 1 word MIN. 2 byte MAX.248 words MAX.496 byte When configuration assembly fundtion is not used: Set to "0".

SI Unit

Value range: 10 10, in 1 ms increments Unit: ms F_WD_Time 150 A CRC signature, which is calculated automatically via all F-Parameters and ensures error-free transmission of the F-Parameters.

EXxx-OMY0004

Value range: 1 10, in 1 ms increments Unit: ms F_WD_Time 150 Safety integrity (SIL according to IEC61508) of the module. Safety functions up to SIL 3 can be achieved with the module. The safety integrity level that can actually be achieved depends on the parameterization, the structure of the sensor, and the cable installation: See Section 8.2 Parameterisation.

EXxx-OMY0006CN

Table 4-1 EX245 24 V DC +20% -15% 1ms IP65 () (IEC60529) 10M -FE 500VAC IEC61131-2 500VAC1 -FE IEC61131-2 -10 to 50 -20 to 60 35%85% RH 80 kPa 108 kPa ( 2000 m ) 66 kPa 108 kPa ( 3500 m ) 10 Hz to 57 Hz 0.75 mm 57 Hz to 150 Hz 49 m/s 2 XYZ 2 XYZ 3 EN 60068-2-27/29 EMC , 2014/30/EU, IEC61326-3-1 , 2006/42/EC, EN 62061, EN ISO 13849 TUV , EN 61508, EN 62061, EN ISO 13849

PF3A7xxH.eng

(For accumulated decrement) [ 150] 150 L/min (PF3A703H) [ H] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Caution Press the button once to reduce the value by one digit, press and hold to continuously reduce. [ 600] 600 L/min (PF3A712H) : If the error cannot be reset after the above measures are taken, then please contact SMC.

PF3A7xxH-L.eng

Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range. (For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

PFxx-OMY0005

Set temperature range -10.0 to 60.0 oC Lowest configurable increment 0.1 oC specifications Power supply voltage 21.6 to 30 VDC Electrical Current consumption 150 mA or less Protection Polarity protection Flow rate 4 3.0%F.S. Pressure 3.0%F.S. Accuracy Temp. 5 2.5 oC. Repeatability (Flow rate/Pressure) 1.0%F.S.

Digital Flow Switch (Integrated display type)

Max. 150 NL/min 3000 NL/min PF2A703H 5.5 CFM 106.0 CFM 300 NL/min 6000 NL/min PF2A706H 10.5 CFM 212.0 CFM 600 NL/min 12000 NL/min PF2A712H 21.0 CFM 423.5 CFM : Analogue output is based on the rated flow range at normal condition. Displayed flow range is based on standard condition. Therefore, the range of rated flow and the displayed flow are different..

IZx-OMX0087

Performance Performance data shown in this chapter is based on an electrified plate (dimensions: 150 x 150 mm, electrostatic capacity: 20pF) defined by ANSI standard (ANSI/ESD STM3.1-2015). Use this data as a guideline for selection, as the performance data may vary depending on the material and size of the workpiece. 5-1.