XLA Series Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of the Greene, Tweed Technologies,inc. ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0009-E 3. Specifications 3-1.
Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Auto switch mounting bracket For the auto switch D-F7NJ*, the mounting bracket XLA25-100 is used. 3.
Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.
R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro Kalrez R R Greene, Tweed Technologies, Inc.
R/W detection/ R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.
R/W detection / R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.
Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 3.
Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 6 XL*-OMI0011-E 3.
Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0010-E 3. Specifications 3-1.
Accessories (Options) Applicable model Bracket assembly AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Symbol BM51 BM52 BM53 BM54 BM55 BM56 BM57 spring washer With cap bolt, AMF Refer to ''Precautions" on p.4.6-33. 4.6-27 Odor Removal Filter Series AMF AMF150 to AMF850 How to Order AMF 250 03 R B Option R IN, OUT reversal Body size Accessories (Optional) 150 1 8 250 1 4 350 3 8 450 1 2
=.:.:.::.".'" .' . " . ' O~>-/ 0 0 50 100 150 200 250 0 1000 2000 3000 4000 5000 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH650 AMH250 I I I f-j--+Inlet air pressure 0.3MPa r I I 0.5MPa .'_ ",0.06 Air pressure 0.3MPa /' /0.7MPa a. L ~ ::;; '" O.06I---+--+---+---:>I"--+-::-::c:-::!-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..
Assembly 1) Terminal block e connected with housing r should be reinstated.
Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60
Ctrl Comm ALM D (01-150) Cause of The abnormal LED communication station detection Alarm clear method (LRUN) error RWr0,bit F (Upper-level device) Turn on RWw0, bit 2: Reset flag, and then turn ON Ry0B: RESET.
D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8
D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8
CKZ25 53B781EL R 1) Mount the top cover to the clamp cylinder, then tighten to the specified tightening torque below. The top cover kit includes a top cover and mounting brackets.
Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Optional specification C C D J R D J T AMD150 R AMD250 AMD350 AMD450 Applicable model Accessory (Option)
Note Material Rod cover White anodized Aluminum alloy q RZQ Head cover White anodized Aluminum alloy w Cylinder tube Hard anodized Aluminum alloy e MI W S Piston rod Hard chromate plated Carbon steel r Piston Hard anodized Aluminum alloy t CEP1 Bumper Urethan y Plastic magnet u CE1 Bushing i Relief valve assembly L o CE2 Relief valve assembly R !0 Plate !
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust