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For Air Upstream pressure of valve P1 z 1.0 MPa Downstream pressure of valve (P2) [MPa] 1.0 0.8 Subsonic Critical 0.9 0.6 pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 500 700 10 700 1,000 Flow rate Q [L/min (ANR)] How to read the graph The sonic

Manifold Specifications

) (Pitch) (Pitch) (mm) 8 223 212.5 200 11.5 Stations L1 L2 L3 L4 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350

Manifold Specifications

voltage suppressor 3 position 176 Double 168.5 Single 108.5 300 (Lead wire length) 3 position 171.5 Double 164 Single 106 MAX.10 79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

ZSM1-115/121

[mmHg] to [kPa]. 1 [mmHg] = 1.3332 x 101 [kPa] 1.3332 x 101 x 350 = 46.662 [kPa] Ex. 2) Convert the units of 80 [kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 x 102 [kgf/cm2] 1.01972 x 102 x 80 = 0.81576 [kgf/cm2] Operable fluids by pressure switch for general purpose fluids Stainless steel 17 Metal exists in nature as ore (like oxide or sulfide).

MY2

Standard Strokes Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1mm increments, up to the maximum stroke. However, add "-XB10" to the end of the part number for non-standard strokes from 51 to 599.

Made to Order Specifications:

Drain Series AFF Size Series AM, AMD, AMH Size 150 Series AFF Size Series AM, AMD, AMG, AMH Size Port size A B Connection A B 239 252 258 284 290 2B 80 1/4 , 3/8 1/8 , 1/4 , 3/8 450 550 650 850 256 260 300 300 349 380 496.5 11B 22B 37B 75B 240 3/4B, FF , 10K 1B, FF , 10K 1 B, FF , 10K 2B, FF , 10K 80 250 4B 1/2 1 2 3/8 , 1/2 3/4 1/2 , 3/4 1 3/4 , 1 1 , 1 1 , 2 80 8B 350 80 305 312 339 80

CXT

If this weight is applied, the deflection of the guide shaft will also have a large value. 12 60 350 16 70 500 20 125 900 25 125 900 32 140 1100 40 170 1900 8-27-6 7 Platform Cylinder Series CXT Construction !1 i @3 @0 !4 !

CXWM/CXWL

depth 8 +0.012 0 fixing shock absorbers 2-RB1006-X552 Shock absorber (mm) F L P Q S SS Z ZZ Model CXWL20-25R CXWL20-50R CXWL20-75R CXWL20-100R CXWL20-125R CXWL20-150R CXWL20-175R CXWL20-200R 35.5 39 52 164 27 123 150 199 48 64 52 214 52 148 200 249 56.5 89 60 264 77 173 250 299 54 114 90 314 102 198 300 349 2 x 2-M5 x 0.8 hexagon socket head cap plug (Cylinder port) 66.5 139 90 364 127 223 350

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Maximum operating pressure Pv (MPa) 1 5 0.3 Model Allowable load mass mv (kg) Model Cushion Stroke Stroke (mm) CYV15 CYV32 CYV15 CYV32 25 30 8-18-6 6 Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size MG 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) Courtesy of Steven Engineering

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599.

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: -, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: -, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: -, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: -, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -