Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Copper, fluorine and silicon-free + low particle generation Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol Nil 21 22 Relief type Vacuum suction type CXSL CXSM,CXSL TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port

Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, 400 lb

Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, 400 lb

Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, 400 lb

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

(PT) Rc(PT) Standard Stroke Long stroke (2) (mm) Bore size (mm) Standard stroke (mm) 400 20 450 25 25, 50, 75, 100, 125, 150 200, 250, 300 450 32 500 40 Note 1) Any intermediate stroke that is not indicated above will be produced on order.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

AMP

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

VFN2000N

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

NARM Series

Regulator for manifold Accessory NARM1000-6A1-N01G Body size Port size (OUT side) None (with plug) Pressure gauge G 01 8 1 1000 2000 Porting Thread Symbol IN OUT A1 A2 B1 B2 N Rc(PT) NPT Number of stations Manifold side Body side Manifold side Body side Common 1 1 station Individual Model Part Name NARM1000 NARM2000 Regulator w/o mfld NARM1000A NARM2000A Pressure gauge G15-P10-N01 G15

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

on both sides With shock absorbers for high load on both sides With a shock absorber for low load on left side With a shock absorber for low load on right side With a shock absorber for high load on left side With a shock absorber for high load on right side With L unit on left side and H unit on right side With H unit on left side and L unit on right side Port thread type Symbol Type M5 Rc

MLGP

MLGC Lock Specifications CNG 20 25 32 40 50 63 80 100 Bore size (mm) JIS Symbol MNB Lock operation Spring locking (Exhaust locking) Extension locking Retraction locking Unlocking pressure 0.2 MPa or more CNA Lock starting pressure 0.05 MPa or less W Locking direction One direction (Extension locking, Retraction locking) CNS Maximum operating pressure 1.0 MPa Unlocking port size Rc 1/8 Rc

VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, I50, 400 lb

VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, I50, 400 lb

Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, 400 lb

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, I50, 400 lb

VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, I50, 400 lb

Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, 400 lb

VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, I50, 400 lb

VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, I50, 400 lb