Size: 40, Motor Type: S6 [AC Servo Motor (Absolute Encoder) 100W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 800mm, Motor Option: None, Cable Type: Standard, Cable Length: 2m, Driver Type: -, I/O Connector: -

Size: 32, Motor Mounting Position: Bottom Mounting Type, AC Servo Motor: 200W Output, Absolute Encoder, Stroke: 800mm, Motor Option: None, Cable: Standard Cable, Cable Length: 2m, Driver: -, I/O Connector: -

Series: LEFB (Belt Drive), Size: 32, Motor Mounting Position: Top Mounting Type, AC Servo Motor: S3 (200W Output, Incremental Encoder), Lead: S, Stroke: 800mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: S (Standard Cable), Cable Length: 2 (2m)

Series: Belt Drive, Size: 32, Motor Mounting Position: Top Mounting Type, AC Servo Motor: 200W Output, Incremental Encoder, Lead: S, Stroke: 800mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: Standard Cable, Cable Length: 2m, Driver: -, I/O Connector: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: 400W Output, Incremental Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 800mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: -, I

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: Right Side Parallel, Motor Type: 100W Output, Absolute Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 800mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Standard Cable, Cable Length: 2m, Driver Type

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: 400W Output, Absolute Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 800mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: -, I/O

Card Motor

The table will move to the target position according to a trapezoidal movement profile shown in the diagram on the right based on the set speed Vc [mm/s], acceleration Aa [mm/s2] and deceleration Ad [mm/s2].

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Note 4) (ft/s2) 30/150 (9/150ft/s2) Rated voltage 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC (50/60Hz) Allowable voltage fluctuation % 10% of rated voltage Coil insulation type Class B Enclosure Note 5) Dust proof (equivalent to IP40) Power consumption W Note 3) 2.5 (VDW10), 3 (VDW20/30) Note 1) Consult P/A when used under conditions which may cause condensation on the exterior of the

Servo Motor Controller (24 VDC)

Move mm/s2 mm/s2 mm/s mm mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - Details of step data Setting name Range Description No. 0 to 63 Number of the step data. The setting to specify the coordinate system for the target position.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil rated voltage Terminal type VT Coil insulation type Class B or equivalent (130C) (3) Shock/Vibration resistance (m/s2) 150/50 (4) VP Note 1) If it is low temperature, dry air should be used.

5 Port Solenoid Valve

50C) Note 1) Ambient and fluid temperature Valve specifications Electrical specifications Max. operating cycle 5 Hz Slim compact Plug-in manifold Bar base Plug-in manifold Stacking base Plug lead manifold Bar base Pilot valve exhaust method Common exhaust Note 2) Individual exhaust Pilot valve manual override Push type Lubrication Not required Note 3) Impact/Vibration resistance 30/100 m/s2

Power Clamp Cylinder

Wiring Diagram Black S1 Lood Blue () 4 3 S2 Lood 1 2 (+) Brown White Note) Both TURCK and P&F are common. 193 Series CKZT Caution 1. When mounted vertically, the maximum opening angle is different from the standard specifications. The opening angle is different from standard specifications depending on the arm offset, bore size and clamp arm. Refer to the following for details.

LEJ-OM004xx

The vacuum aspiration fluence shows the fluence immediately before piping in the actuator. 5 - 3.How to Order 11LEJS 40 A 500 S2 1 10 9 8 7 4 5 3 2 6 *1 (2) Motor type (3) Lead [mm] (1) Size 40 LEJS40 LEJS63 Output [W] Actuator size Compatible controller Type 63 16 A 20 AC servo motor (incremental encoder) S2 10 8 B LECSA-S1 40 100 (5) Motor option AC servo motor (incremental encoder) S3

HEAVY DUTY STOPPER CYLINDER

. =0.1 =0.2 50 400 280 63 530 365 80 800 565 NO mAmmax Confirmation of mmax : 200400 (=0.1) YES Calculate allowable mass of transferred object, m, at transfer speed v. m=278(kg) at v=20(m/min) is found on Figure-1-1. 200278 For allowable range of m, refer to Figure-1-* (P6).

rail type, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, LC, 32MM LE ELECTRIC ACTUATOR, 10.58218 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Note 3) Max. speed [mm/s]Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 4)Actuation typeGuide

rail type, ELECTRIC, ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 6.63866 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Note 3) Max. speed [mm/s]Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 4)Actuation typeGuide

rail type, ELECTRIC, ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 6.63866 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Note 3) Max. speed [mm/s]Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 4)Actuation typeGuide

rail type, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, LC, 32MM LE ELECTRIC ACTUATOR, 11.96007 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Note 3) Max. speed [mm/s]Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 4)Actuation typeGuide