VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Speed Controller with One-touch Fitting

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9

Rotary Actuator/Vane Style Series CRB1

Series CRB1 Rotary Actuator/Vane Style Size: 50, 63, 80, 100 With solenoid valve Series CVRB1 Basic style Series CRB1 CRB2 CRBU2 CRB1 Air Fluid MSU Size 50 63 80 100 CRJ Single vane (S) Double vane (D) S D S D S D S D Vane type CRA1 Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Side ported Side ported Side ported Side ported Side ported

Microspeed Cylinder

(1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10-60 CQSXB20-20D Average speed 0.85mm/s Average speed 0.88mm/s 2.0 Average speed 0.43mm/s Average speed 0.43mm/s 2.0 Speed waveform Speed mm/s Displacement mm Speed waveform Speed mm/s Displacement mm 0 0 Operating direction in Operating direction out Operating direction in Operating direction out 2.0 -2.0 60 40 Displacement

Electric Actuator Miniature Rod Type Miniature Slide table Type

Move M Speed Position Accel Decel PushingF TriggerLV PushingSp MovingF Area1 Area2 In pos mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 Absolute 100 10.00 3000 3000 85 85 20 150 12.00 17.00 10.00 0mm to 10mm.)

ZP

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Horizontal lifting Vertical lifting Basically ( avoid this use. ) ZL Theoretical Lifting Force ZY The theoretical lifting force (not including the safety factor) is

LEC-OM038xx

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 Communication cable PC PC is prepared by customer) Refer to 8CN2 TB/PC Power supply connector(P.23) for usage.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Speed Controller Cylinder Solenoid valve Tubing Silencer Maximum return speed (mm/s) 100 200 300 6 ASD230F CJ2 VJ500 TU0604 1 m AN11001 10 Mounting 16 Cylinder size Caution 20 1. If installing flow controls to valve ports, interference may occur with the fittings. Please consult the catalog before installing.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated

High Power Cylinder Series RHC

Cushion adjustment (relief adjustment) man-hours are the same as the adjustment (cushion needle adjustment) for general purpose cylinders. 200 150 High power cylinder Quality of Cushioning (RHCF40-500, Load mass 5 kg, Supply pressure 0.5 MPa, Horizontal operation) Buffer capacity [J] 500 General purpose cylinder (50 mm/s) 100 3000 mm/s 2000 mm/s 1000 mm/s 400 500 mm/s Stroke [mm] 300 50 200

CV/MVGQ

T Bore size Stroke 48 [49] RZQ M5 x 0.8 28 [34.5] M5 x 0.8 Manual override MI W S Width across flats B1 CEP1 CE1 CE2 Rod End Nut H1 B1 Bore size (mm) 10 16 16 [17] ML2B S + Stroke H + Stroke Z + 2 x Stroke 7 3.2 8 4 C J G5-S [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) CV LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S

LX Series Compact Electric Actuators

I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

LEJ-OM004xx

Without driver Nil Standard cable S LECSA1S A1 100 to 120 Robotic (Flexible cable) R A2 LECSA2S 200 to 230 *4 Whe n [With d river] is sele cted, cable is include d.

Multistage Ejector Series ZL112/212 1

Display LCD LED LCD with backlight 101 to 0 kPa 101 to 10 kPa Pressure setting range 200 kPa Maximum operating pressure Operation indicator light (Lights up when ON) OUT1: Green OUT2: Red Green Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Fixed (3 digits) Window comparator mode Fluid Air, Non-corrosive gas Temperature

Fieldbus system EtherCAT compatible SI Unit

ms 0 Offset binary 1 Sign magnitude 0808 2 2's complement 0 Offset binary 1 Sign magnitude 0809 2 2's complement 3 Scaled 1 Sign magnitude 080A 2 2's complement 0 None 1 2 value average 080B 2 4 value average 3 8 value average -96No.EX-OMA1023 Enumeration data definion (continued) Index Value Text 0 -10+10 V 1 -5+5 V 2 -20+20 mA 3 010 V 080D 4 05 V 5 15 V 6 020 mA 7 420 mA 3 010 V 4 05

180

6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 MHY MHY 40 4 30 MHW MHW 3 20 -X 2 10 1 MRHQ 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 MA Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D D20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Low Profile Slide Table Series MXF

20 0.78 1.65 10 0.56 0.3 MXF8 MXF12 MXF16 MXF20 0.2 50 100 200 300 500 700 Average speed Va (mm/s) Collision speed V (mm/s) Note) Use the average speed when calculating static moment.