ZSE F/ISE

Panel mount E Lead wire length 3 m L Panel mount + Front protection cover F Analog Output Suitable model: ZSE50F/ISE50--22/62(L)-(M) Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) Unit specification 5 5 Note 1) Nil M With unit switching function Note 2) Fixed SI unit 1 1 Note 1) Under the New Measurement Law, which has been in effect since October, 1999, sales

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

VK3000

Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D VV5K3-40Station -M5 ( ) ( ) ~ = L Dimension n: Stations n L 1

VK3000

Corresponding mark ( ) Corresponding mark ( ) Pg7 69.9 Manual override (Non-locking) ~ = 300 77.4 Applicable cable O.D.: 3.5 to 7 (Pitch) 2n x M5 x 0.8 (A,B port) L Dimension n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411

Series HAW Water Cooled Aftercooler 1

HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Model Screw type compressor Reciprocating type compressor Screw type compressor 2.2 55 110 7.5 75 22 37 Applicable compressor (kW) 2.2 37 75 7.5 55 15 22 300 8600 18000 1000 12000 3300 5700 (1) Air flow rate l/min(ANR) Reciprocating type compressor 300 5600 11000 1000 8000 2100 4300 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

DO w DI Blue L e L 10 ISE7m/7mG Series Dimensions Without bracket Bracket A (Interchangeable with ISE70/ISE75(H)) (Part no.: ZS-50-A) 48 49 10 (40.1) 34 (26) 15 14 6.5 80.4 70.4 (11.4) 8 1.6 46 25 60 Bracket B (Part no.: ZS-50-B) 49 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no

S Couplers Series KK/KK13

H L M L (mm) H Width across flats Body size Weight g Effective area mm L H Width across flats Min. bore M Applicable hose I.D.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

min Accumulated flow: l Panel mounting Specifications for Display Unit PF2D300/301 Model 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min Flow rate measurement range Note 1) 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min Set flow rate range Note 1) 0.05 l/min 0.1 l/min 0.5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange 0.05 l/pulse 0.1 l/pulse 0.5 l/pulse value

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Nominal size Item 10 15 1 Size Suction flow rate L/min (ANR) 10/15 0.15 to 0.6 MPa 0.2 to 0.6 MPa 0 to 60C Operating pressure Ambient and fluid temperature 0.01 mm 180 c.p.m.

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 25 32, 40 10, 15 20 6 Standard (shock absorber RB series) Magnetic holding force Refer to page 1517 for specifications.

PSxx-OMG0001CN

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

MHS

40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .

CU

L A93L 5m .

Clean Rodless Cylinder Series CYP

Operating direction: Right Operating direction: Left a b c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

EXxx-OMN0027CN

Byte0 1 Byte1 2 Byte2 3 Byte3 PROFIBUS DP Byte4 ID(14h) Byte5 ID(11h) Byte6 Header Byte7 System diag.1 Byte8 System diag.2 Byte9 System diag.3 Byte10 System diag.4 Byte11 Reserved : : Byte18 Reserved Byte19 Header Byte20 0~7 Byte21 8~9 Byte22 Reserved : : Byte27 Reserved Byte28 A Byte29 A Byte30 A Byte31 B Byte32 B Byte33 B : : Byte61 L Byte62 L Byte63 L -71No.EX-OMN0027CN-D 1 7 6 5

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

nut C1 X L1 Auto switch D-A9, F9 Rod end male thread (mm) Bore size (mm) 63 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100

I/O Configurator (NFC version)

) byte6 Wireless slave diagnostic information 1 (Wireless channel 1-7) Wireless slave module EX600-WSV# (Unit 3) (Wireless channel 001) Valve output: 32 points byte7 Wireless slave diagnostic information (Wireless channel 8-15) byte8 Wireless slave registration information (Wireless channel 1-7; bit 0 are fixed at "0".) byte9 Wireless slave registration information (Wireless channel 8-15)

PFxx-OMK0003CN

PF-OMK0003CN-E PFMV505(F)-1 PFMV510(F)-1 [kPa] [kPa] [L/min] [L/min] PFMV530(F)-1 [kPa] [L/min] -21No. PF-OMK0003CN-E PFMV5 PFMV5 + L (ZS-36-A) 10n +24(n=15) 10n +14 L L L -22No.

Booster Regulator Series VBA1110 to 4200 1

VBA200: Qb = 500 [l/min (ANR)] VBA400: Qb = 1050 [l/min (ANR)] NO VBA400 NO Max. 0.05 MPa Avoid pulsation Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. Tank capacity (l) Tc [s] = L W Obtain the tank capacity V. Select tank from table below.

Vacuum Equipment

and switching valve to pad by piping system Q2 = S x 11.1 l/min (ANR) Q : Smaller one between the Q1 and Q2 l/min (ANR) S : Effective area of piping (mm 2) Adsorption flow (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Selection Procedure Tubing length (m) Air consumption From the point at which the valve's effective area of 18 mm 2 and the piping volume of 5 l intersect, the