DOC1023125

I/O cable JX-CI-E--S Cable length (L[m]) 1 1.5 *The terminal on PLC 3 3 5 5 10 10 Straight connector type /JX-CIS-E-*-S Connector type L (45.8) 2 3 S Straight 1 4 A Angle (15) 8(Core) 5 7 6 (5.8) (35) M12 8-pin socket A code Normal key (29.1) Angled connector type /JX-CIA-E-*-S *Angled connector type cannot be used for motor mounting position:parallel type. (15) Electric actuator (parallel

CYV

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

Rodless Cylinder for Vacuum Series CYV ø15, ø32

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

NCQ8

L D-M9BW (Example) Lead wire length Nil MNote 5) 20 in (0.5 m) 39 in (1 m) 118 in (3 m) 197 in (5 m) L Z Specifications Note 1) Lead wire length Z: 197 in applicable auto switches Reed switch: To be dealt with specially Solid state switch: All types are produced upon receipt of order.

New

VXF23 to VXF24: 200 L VXF25 to VXF28: 1000 L Air tank capacityVXFA21 to VXFA22: 100 L VXFA23 to VXFA24: 200 L VXFA25 to VXFA28: 1000 L Energizing time150 msec Energizing time150 msec Rated voltage24 VDC Pilot valve VX232AA (Orifice, 5, Rated voltage 24 VDC) Outlet piping length500 mm Piping length to the pilot valve 500 mm, 1000 mm, 1500 mm (10, t = 1.5) Thread size connected to the outlet

AC Servo Motor Driver (Pulse input type/Positioning type)

[PA06] [PA05]100P [PA07] Actuator lead L[mm] n1/n2 1 Ex.)

EXxx-OMQ0015CN

A IN L/A OUT 11 SF/BF 12 13 14 15 -27No.EX-OMQ0015CN EX600No. 1 LED OFF H.T

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Product number : PADP-14V-1-S Conductor size AWG26 Length (L) The suffix of the part number (1,3,5) specifies the length.

KA

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series. Caution Grounded 1.

Air Slide Table/Long Stroke Type Series MXY

L Rubber stopper screw Switch rail Mounting tap L Stud fastening: After a temporary tightening, tighten an additional 1/4 turn. Metal stopper screw L Shock absorber 228

Rotary Cylinder Series MRQ

75 Stroke)/2 78 ( 90 Stroke)/2 83 ( 100 Stroke)/2 12.5 3 15 20 Angle adjustment screw 32 15 17.5 20 25 4 30 30 12.5 15 3 (mm) 20 L Max. 32 Max. 31.5 Size 32 40 15 40 17.5 Possible to Change the Specifications from the Basic Style to -X5 20 4 25 Specify the part number for hexagon socket head cap screw for angle adjustment referring to the list below. 30 30 Attached parts: Hexagon socket

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

min (ANR)) Accessory Option 1 4 3 8 1 2 3 4 Port size Max. air flow (l /min (ANR)) Standard size Thread type Standard size 360 650 1,500 3,700 7,500 16,000 2 3 4 3 6 15 37 75 160 Rc NPT G 200 500 1,000 Bracket Flow direction (Right Down) With element service indicator 1 1 2 2 3B flange 4B flange AMC 1 2 For details, refer to individual catalog (CAT: ES13-7) separately. 5-10-15

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

PF-OMN0009_C

min 11 cm ) IN OUT PF3W504 PF3W520 (16 L/min ) (16 L/min ) (4 L/min ) (8 L/min ) [cm] [cm] PF3W540 PF3W511() (100 L/min ) (100 L/min ) (50 L/min ) (40 L/min ) (40 L/min ) (50 L/min ) [cm] [cm] -36No.PF-OMN0009CN-F PF3W521() (250 L/min ) (250 L/min ) [cm] -37No.PF-OMN0009CN-F PVC 3F.S.11 cm IN OUT PF3W511/521(PVC ) (100 L/min ) (250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S

VQ5000

(except L and T1 kits) Note 3) Available only for F, L and T1 kits. Note 4) IP65 is available only for L, T and S kits. Note) In case of CM indicate on a specification sheet.

MK

Model Ah9 0 0.052 0 0.052 0 0.062 21 28 35 50 63 MK2l32-llF MK2l40-llF MK2l -llF Through hole & both ends tapped (standard) Model J H K L C D E F G lA B S T I M O P Q R U V X Yh9 Z N 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0 0.62 0 0.62 0 0.62 0 0.62 MK2B32 MK2B40 MK2B50 MK2B63 34 40 50 60 54 61 73 86 5.5 5.5 6.6 9 31.5 35 41 9 Depth 7 9 Depth 7 45 52 64 77 60 69 86 103 Rc(PT)1/8 12 12 15 15 30 30

VQ20/30

L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

Step Motor Driver （ Pulse input type ）

(1) Confirmation of the package content . 15 (2) Installation . 15 (3) Wiring and connection . 15 (4) Power ON alarm (error) . 15 (5) Operation pattern setting . 16 (6) Trial run (Electric actuator adjustment) . 16 3.