Vacuum Pad

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Vacuum Pad

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Free Mount Cylinder

8, !

Flow Control Equipment

/ 1 8, / 1 4 / 3 8 / 1 2 In-line M3/M5 / 1 8, / 1 4 / 1 4, / 3 8 2.5 to 25 20 to 40 32 to 63 32 to 63 40 to 100 40 to 100 AS1000 AS2000 AS3000 AS3500 AS4000 AS5000 4.1-23 / 1 4, / 3 8 / 1 4, / 3 8, / 1 2 / 1 4, / 3 8, / 1 2 63 to 125 1 40 to 200 160 to 250 300 300 AS420 AS500 AS600 AS800 AS900 / 1 4, / 3 8, / 1 2 / 3 4 4.1-27 1 / 11 4 / 1 2 1 2, 4.0-1 Applicable tube O.D Applicable cylinder

SYJ3000/5000/7000

Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36 0.35 0.35 0.22 0.24 0.29 0.12 0.16 0.21 0.15 0.16 0.18 0.17 0.14 0.75 0.83 0.91 0.64 0.68 0.82 0.8 0.74 0.32 0.27 0.36 0.26 0.23 0.31 0.29 0.32

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

C6 (6 Onetouch fitting) C8 (8 Onetouch fitting) Rc(PT)1/8 C6 (6 One-touch fitting) C8 (8 One-touch fitting) Port size A, B port Rc(PT)1/8 Rc(PT)1/8: 11 (0.6) C6: 8.6 (0.48) C8: 9.9 (0.55) Body ported SYJ7l2l __ __ __ (1) Valve effective area mm2(Cv) Base mounted SYJ7l4l __ 11.9 (0.66) 9.5 (0.53) C6: 8.5 (0.47) C8: 9.7 (0.54) __ Note 1) Value for a single solenoid 2 position valve mounted

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Plug-in Unit

Note 2) Symbols for inch sizes are as follows: N7: 1/4" N9: 5/16" N11: 3/8" NM: Mixed 0 1 8 With 8 input blocks Note)Max. 4 for EX240 and max 8 for EX250. SI unit COM.

5 Port Air Operated Valve

exhaust L2 L1 17.5 20 15 3 P R R 66 2B 2B 2B 2B 2B 47 47 141 110 125 68 28 (62.5) 4A 4A 4A 4A 4A 1/2 [1 (P), 3/5 (R) port] 1/4, 3/8 [4 (A), 2 (B) port] 4 x 9 (For mounting) 65 (Pitch) P=33 1/8 (Pilot port: Upward) Breathing hole (Station n) (Station 1) 1/8 [Pilot port: Lateral (-P)] 78.5 56 35 2.5 Dimensions n: Stations 11 12 15 14 13 2 3 n L 10 9 8 7 6 5 4 592 L1 L2 163 196 229 262 295

HRX-OM-Y098

-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9 8.5.1 HRL100-A-20 CH1 . 8-9 8.5.2 HRL200-A-20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13

Rotary Actuator

Applicable shaft types: S, W, Y X = Q1 = M L1 = L2 = L1 Q2 = M Q1 [mm] [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [

HRX-OM-W060

-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100A20 CH1 . 8-7 8.4.2 HRL200A20 CH1 . 8-7 8.4.3 HRL300A20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9 8.5.1 HRL100A20 CH1 . 8-9 8.5.2 HRL200A20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20 CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13 8.8 Daily

4/5 Port Air Operated Valve Series SYJA3000

0.28 0.30 0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base

Modular Type Regulators Series AR

Note 8) Note 8) Note 8) Note 8) Note 8) AG (Select wiring bottom entry when the semi-standard Y is chosen simultaneously.)

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Parameter Definition Item Content Default Parameter setting setting range 2/2/2/2 byte I/O size of port 1 to 4: 2 byte/2 byte for each 4/4/4/4 byte I/O size of port 1 to 4: 4 byte/4 byte for each Define the process data size of each port of the IO-Link master, which is occupied by the EtherNet/IP communication. 8/8/8/8 byte I/O size of port 1 to 4: 8 byte/8 byte for each 1 Process Data Mapping

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

HRX-OM-T002

7.3.3 How to release the pump thermal trip . 7-10 7.4 Other Errors . 7-12 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-6 8.2.5 Inspection during winter season . 8-

HRX-OM-X037

Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months. 8-4 8.2.4 Inspection every 6 months. 8-5 8.3 Operation Stop for an Extended Period of Time . 8-6 8.3.1 Discharge of the circulating fluid . 8-6 8.3.2 Discharge of the facility

A

02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24