IZx-OMX0087

Performance Performance data shown in this chapter is based on an electrified plate (dimensions: 150 x 150 mm, electrostatic capacity: 20pF) defined by ANSI standard (ANSI/ESD STM3.1-2015). Use this data as a guideline for selection, as the performance data may vary depending on the material and size of the workpiece. 5-1.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XL-OMY0001

/ AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-

High Vacuum L Type Valve

H4 Initial power / 100 VAC 200/40 200/50 400/100 600/150 Power Symbol 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XL-OMV0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

This matches the controller. (1) LEG32MDGB-30 -4- 1.2 Specification Model LEG25 LEG32 LEG40 Horizonal (30,50 stroke, L=50 or less) Work load 20 45 60 kg*1 Vertical 24 27 27 Max.weight of transferred object[kg] *2 75 100 150 Pushing forceN*3*4*5 126 to 238 156 to 370 266 to 553 Actuator specifications Speedmm/s*5 18 to 250 24 to 200 24 to 150 Max.acceleration/decelerationmm/s2 5,000 Pushing

JXCx-OMX0009

Ctrl Comm ALM D (01-150) Cause of The abnormal LED communication station detection Alarm clear method (LRUN) error RWr0,bit F (Upper-level device) Turn on RWw0, bit 2: Reset flag, and then turn ON Ry0B: RESET.

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

IIIIIII

Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.

Valve Single Unit

One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 One-touch fitting for 3/8" N11 SX7000 1-6-48 Body Ported Series SX3000/5000/7000 Manifold Specifications Multiple valve wiring is simplified through the use of the flat cable connector.

C92

B C D E F G H P U Load (kn) Weight (g) M A MB JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 JA160-36-200 2.5 4.4 11 18 28 71 M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 M27 X 2 M36 X 2 49.5 60 71.5 101 123 178 19.5 20 22 28 34 51 22 24 25 30 38 55 24 31 41 59,5 66 96 5 6 7.5 11.5 13 16 8 11 14 24 27 36 8 11 13.5 16 20 24 17 22 27 32 41 55 9 13 15 18 24 42 0.5 0.75 1.0 2.0 2.0

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

Mass (g) Standard stroke (mm) End lock additional mass Model D25 52 138 186 350 487 918 1,420 5 36 10 40 15 44 20 48 30 56 50 157 222 400 547 1,000 1,533 75 175 258 450 608 1,083 1,645 100 194 294 500 669 1,165 1,758 125 549 729 1,247 1,870 150 599 790 1,330 1,983 175 649 851 1,412 2,095 200 699 912 1,495 2,208 MTS8 MTS12 MTS16 MTS20 MTS25 MTS32 MTS40 29 34 42 55 90 133 -X Bore size (

Process Valve Series VNA

Manual override (Non-locking push type) Port size: refer to table below L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) J (Conduit: C) I (Grommet: G) B (Air operated) VNA VNB SGC VNC 4 x 2 x 18 mounting hole VNH VND Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J K Note) L M Model VCC VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150