Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

13

Calculation Pad W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Horizontal lifting Vertical lifting W = P x S x 0.1 x 1 t This type of application should basically be avoided.

Lightweight and Compact

Applicable model Minimum operating flow rate (50/60 Hz) [L/min] HRS-BP005 HRS090-ll-20/40 29/45 To circulating fluid return port r t r e q To circulating fluid outlet r t w r Parts List No.

SZ3000

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Wireless System

Various actuators Applicable Manifold Solenoid Valves SY Series (IP67) SV Series (IP67) S0700 Series (IP40) VQC Series (IP67) 5 C O N T E N T S Wireless System EX600-W Series Wireless slave unit Wireless master unit Accessories How to Order qEnd Plate Bracket p. 17 Wireless Unit p. 7 wValve Plate p. 17 Digital Input Unit p. 7 eReinforcing Brace p. 17 Digital Output Unit p. 7 rSeal

EX510

Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT

ITV_D-E

Ref er t o t he SM C w ebsi t e ( U RL ht t p: //w w w . sm cw orl d. com ) f or m ore i nf orm at i on about t roubl eshoot i ng. Thi s operat i on m anual ref ers t o general di gi t al i nput t ype ( m odel : X93) and i s part i al l y appl i cabl e t o anot her speci al m odel s.

VCS

OR-1717-178P P: PTFE F: FKM OR-3305-178P P: PTFE F: FKM t When external leakage occurs after disassembling a valve, replace the above seals. Wave washer part no.

Title not found

Slroke = 079 (20mrt) w h Boot Mr limelers i. Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

VM

POM ADC Material Note r Description Material q Description Retainer Over travel spring Plunger Body Metallic plated t y w e Spring Spool valve Steel Zinc chromated Rubber lined Aluminum alloy, NBR Series VM800 Basic VM830-01-00 JIS Symbol Actuator mounting hole P .T. (Pre-Travel) 1 O.T. (Over Travel) 2 T.T.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

E N T S Communication Cable/Connector EtherNet/IP, PROFINET, EtherCAT, Ethernet POWERLINK p. 222 CC-Link p. 223 DeviceNet p. 224 PROFIBUS DP p. 225 Communication Cable p. 226 Field-wireable Communication Connector p. 228 Terminating Resistor p. 228 Fieldbus Related Accessories M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector EX600 Series p. 229 EX500 Series p. 231

VXA21/22

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3 @0 q MSQA (High precision type) Component Parts Description Material Description Material Deep groove ball bearing Needle bearing Deep groove ball bearing No. q w e r t y u No.

HRX-OM-W038

HRS040--20-T/MT Note1) Applicable model Rated flow50/60HzNote 2) 3) 23(0.18MPa)/28(0.23MPa) Maximum flow rate (50/60 Hz) L/min 30/35 Pump Maximum pump head (50/60 Hz) m 50 Output W 550 Recommended earth leakage breaker capacity A 20 Cooling capacity Note 4) W The cooling capacity reduces about 300 W from the value in the catalog.

2/3 Port Valve for Various

Power dissipation (W): For AC , W = V/A cos. For DC, W = V/A (Note) cos shows power factor. LVD LVQ 2. Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. LQ 3. Hum sound The hum sound is a noise generated through repeated adsorption and releasing on an armature adsorption surface.

Rotary Clamp Cylinders

1 o t y u w q r !9 @2 @5 @4 !

Membrane Air Dryer

w OUT IN Purge air for dehumidification Option With fitting for purge air discharge (Option: P) M V IN Purge air for dehumidification IDG3, 5 IDG3H, 5H IDG10, 20 IDG10H, 20H Option Option With fitting for purge With fitting for purge o t air discharge air discharge (Option: P) (Option: P) t plug IN OUT OUT IN !

SJ3A6

F1 Release pressure side filter y t r q e u w !

51

Foot: CG3LN Bore size Stroke S+ Stroke H t (Clearance)1 GB GA 2 x P Width across flats NA With rubber bumper 8 x J Rod part A MM AL I H1 C Width across flats B1 B (LT) 15 LH H2 D W Width across flats KA W 2 x LC (Knock pin position) C Y X M 4 x LD X Y LX LZ Sectional view of the rod part LS+ Stroke ZZ+ Stroke Z 1 The rod end nut should be mounted in the position t (clearance) so that it will