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n.Al Cdu"' Rod Cross Section sl0 (3/8") 6 (5/81 Foot Type (L) r.rcizxL leo,e .I;]+L;G] @ Port location on Head Cover: In Llne T-TN rti \ =.1+@ L:_fr.,'t l l l L T r l I L H I f .

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,

low particulate generating vacuum grease. p r a Non-contact construction w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tubes exterior surface and the slide tables internal surface. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a w t i o o n L No contact Cleaned, assembled, inspected

l Applicable bore size (mm) Part no.

L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and end of the plate 6 (Example) q When using CXSJM6-10 and L = 15 mm: Imaginary stroke L' = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 6 ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 w When using CXSJL25-50 and L = 10 mm: Imaginary stroke L' = 50 + 6 + 15 = 71

) 27 79 X PE 41.5 30.5 32 R1 R2 27 P 15.5 14.5 G1/2 Electrical entry Rc1/8 PE port 19.5 (21) 19.5 Rc1/8 External pilot port (21) 31 31 5-Rc1/4, 3/8 P, A, B, R1, R2 port ( ): Rc3/8 0 1 0 1 0 1 0 1 3 position double check: VQ460 l 0 1 2 position double: VQ420 l 3 position closed center: VQ430 l 3 position exhaust center: VQ440 l 3 position pressure center: VQ450 l 181 108 73 90 50 11(A port

ILS MC MC OLR OLR MC MC CM MC CM MC PTC PTC C11 PRS FM FM PRS P P MC TDR MC TDR I D F11E10T AC100/100,110V (50/60Hz) L N 1 3 2 PE TB MC TDR ILS TDR MC OLR MC C01 CM PTC MC FM C11 PRS P TDR MC CM PTC PTC C01 FM PRS C02 O LR TB C11 I LS TDR M C I D F Seri es 145 14 3 I D XO M W 011 14 T I D F15E110T I D F15E120T L N PE 1 2 3 TB N L PE 1 2 3 TB MC MC TDR TDR ILS ILS MC MC TDR

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Water and Air Safety

E R O D E N D W I T H A U T O S W I T C H NCDRA1BW30 S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N353 DETAILS OF YOUR LOCAL SALES OFFICE 1.210 ROTARY ACTUATORS RACK & PINION TYPE SERIES NCRA1 D I M E N S I O N S D O U B L E R O D E N D W I T H A U T O S W I T C H NCDRA1BW50~100 L S* U UU W P A B C D DD Model J G F H

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.

In the case of liquid: P Q = 1.9 x 106 Av .(9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] P : Pressure differential [MPa] G : Specific gravity [water = 1] In the case of saturated steam: Q = 8.3 x 106 Av P (P2 + 0.1) .(10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] P : Pressure differential [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 11 Solenoid

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Pin name 1 2 3 4 DC (+) OUT2 DC () OUT1 1 3 2 x Piping port Z U T S 4 x WX G 2 4 (35.5) 42 H For PF3W721 OUT IN AA G 4 x P K L 2 x Piping port G N DD PF3W504/520/540/511/521 Remote sensor unit Y A E J F 30 W B V 2 x Piping port Z S T U 4 x WX G H 42 (35.5) For PF3W521 IN OUT AA G 4 x P K L 2 x Piping port G N (mm) Bracket dimensions Model Port size A AA B D DD E F G H J K L N P (Rc, NPT,

Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering

/4,1 3/4 128 113.6 59 53 37 37 64 53 Width across flats 36 Optional specifications Model With bracket With built-in silence K L M N P Q R S T U V W X Y AVL2000-02--A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AVL3000-03--A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AVL4000-04--A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8

Dimensions are the same as the standard model. 2.35J 11.8 40 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Refer to p.1.4-4 for other specifications.

Vertical actuation I II P W A P a (b) (a) P P a A W (1) Basically adjusted with meter-out control. When meter-in control is also used, lurching is reduced. (1) Basically adjusted with meter-out control.