End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

SY3000-OMH0002

(N.O.)3 8 No.SY3000-OMH0002 SY series .3.23.7mm ( ( (1mm) (R) (U) DC24V 12V 1/4 DC24V 62ms L M () (S) 0.5V (Z) () 9 No.SY3000-OMH0002 SY series DIN W 1 3WA +4-3 (DS) (Z) DIN M8 ( ) DC24V 12V 1V WA (FU) +COM (S) (Z) (R) (U) (SS5Y(3,5)-45)-COM (SS5Y(3,5)-45N) 4 (WA ) (S 3( WA ) L M (GZ, LZ, LOZ, MZ, MOZ) 4 (WA ) 3( WA ) DIN (DZ, YZ) 4 WA 3 WA 4 (WA

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket B, Horizontal Mounting, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)