lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

W2M/4M

NEW ZEALAND SMC Pneumatics (N.2.) Ltd.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Low torque Metal seal type Rotary joint

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

Electro-Pneumatic Regulator IT1000/2000/4000

/m n(ANR) Felel'low fhin(ANR) RelleJ f ow :/nr n(ANFI) 1 Kgl/crn, = 14.223 PSI lMPa = 145 PSI Elecrro-pneumatic Resurator lT 1 000t2000t4000 Pipine The cunenttype and vollage type gP regulators require differentwiring. Incorrect wiring will damage the electrical circuit.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

ITV0000

P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Interface Regulator for VQ4000 5 Port Solenoid Valve

600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure Characteristics Conditions

CUJ

Without auto switch With auto switch Proper tightening torque N m 0.54 Bolt M2.5 x 0.45 10 CUJB4 C(D)UJB6 C(D)UJB8 C(D)UJB10 0.5 1.06 M3 x 0.5 10 0.4 0.4 Allowable lateral load W (N) Allowable lateral load W (N) 8 0.3 0.3 8 0.2 0.2 Tightening torque Tightening torque 6 6 0.1 0.1 4 Allowable Kinetic Energy 0 4 6 8 10 15 20 Stroke ST (mm) 0 4 6 8 10 15 20 Caution Stroke ST (mm) When driving

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: M5 Female Thread, Option 1: -, Option 2: -, Option 3: -

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread)

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: M5 Female Thread, Option 1: -, Option 2: -, Option 3: -

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread)

PSxx-OMP0001E

A Dimensions COM 16 KQ2 06-M5 HLT SY Operator Setting 16 KQ2H/L07-M5 This operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.

Multistage Ejector Series ZL112/212 1

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

Guide Table Series MGF

L Y59AL 5m .

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

VEX-OMY0001

AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001