MU

5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 18 M12 X 1.75 Depth

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm

PSxx-OMV0008CN

8370: JIS B 8361: JIS B 9960-1: -(1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.

AR Series Modular Type Regulator

e q IN OUT IN OUT r r q w w Component Parts No.

CM2

D-H7l D-H7C D-A44A D-H7lW D-H7BAL D-H7lF D-G5NTL 1.4-48 Series CDM2 Auto Switch Mounting Position and Mounting Height: Spring Extend (T) Auto Switch Position: Spring Extend (T) (mm) Mounting Height (mm) B dimensions Auto switch model Bore size (mm) Auto switch model Bore size (mm) 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 Hs A to 50 25 25 26 31 31

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Operating angle Hysteresis angle Model MDSU1, 3 110 10 MDSU7, 20 90 Auto switch Table B port A port Positioning pin hole 11-5-30

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

/W valve for vacuum applications.

ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

125

03 04 VEX34202 03 04 Bracket (With bolt and washer) B VEX1-18-1A Foot bracket (With bolt and washer) F VEX1-18-2A VEX3-32-2A Pilot exhaust (PE) silencer Note) N AN120-M5 Note) Only with solenoid 1727 VEX3 Series Construction VEX3120 (Air operated) VEX3220 (Air operated) w Port 12(P1) (Pilot air port) q r y u y r t Port 23(P2) (Pilot air port) Port 12(P1) (Pilot air port) e t w t Port 3

Compact Vacuum Ejector Series ZQ

ZZQ1 08 B B S Manifold Pilot exhaust port location Number of stations Note) 01 02 1 station 2 station B Both sides ... ... 08 8 station Note) Number of stations varies according to nozzle nominal size during simultaneous operation.

1

Method of Mounting Two Auto Switches at the Stroke End of a Cylinder for Strokes Less Than 20 mm Auto switch model Applicable strokes 15 mm stroke 20 mm stroke 15 6 3 A 6 A 20 0.5 D-M9m(V) D-M9mW(V) D-M9mA(V) 0.5 3 6 B 6 B The correct mounting position of the D-M9 is 3 mm from the end face of the switch holder (dimensions A and B).

VXP21/22/23

Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26

Electric Slide Table / High Precision Type 《 AC servo motor 》

-bit encoder (Resolution: 1048576 p/rev) Horizontal 45 65 Power consumption [W] *6 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *7 Vertical 8 Max. instantaneous power consumption [W] *8 445 724 Type *9 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308 197 385 Power consumption [W] at 20C *10 6.3 7.9 Rated voltage [V] 24 VDC 0/10%

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

(Blanking plate) Rc G NPT NPTF Nil F N T Common exhaust Valve stations VV317-02-051-02 A port size (Base piping) 1/4 02 2 stations Symbol Passage Porting specifications A Side R P Common Common 3 Side Individual Common 20 20 stations Symbol Max. 20 stations 1 VV317-02-053-02 Individual exhaust Manifold Specifications Manifold type Max. number of stations Applicable solenoid valve B mount

Electric Actuator / Slider Type 《 AC Servo Motor 》

When the positioning mode is set: The minimum unit of the travel distance of the actuator should be 1 [m]. 9 - LECSB LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

SL5200

q w q w q SL5802S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 V3 V3 MPA MPA 2PW 3PW 4PW 1 1) Other range available.

ZQ-OM01401

) (7)(8) 5 - No.ZQ-OM01401-B ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.