Fluoropolymer Piping Equipment

(Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 938 High Purity Fluoropolymer Needle Valve LVN Series Standard Specifications Model LVN20 LVN30 LVN40 4, 6 Tubing O.D.

IDX-OM-W023

(1) (2) IDU Series 6-2 GWP 6 3 IDX-OM-W023 6 6-3 A B E D Q Guige Guige G C Guige Guige [AC200V] [AC200V] Guige Guige F 10 (10) (820) J H K P L N M 4x13 [AC200V] 17) [AC200V] [AC100V] [AC100V] Guige 17 Guige mm A B C D E F G H J K L M N P Q 859 IDU8E Rc3/4 270 485 31 902 365 1302 230 42 3002 80 3001 328 15 IDU11E Rc3/4 909 14 IDU15E1 Rc1 300 620 960 79 54 425 93 258 43 330

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

B Auto switch a b d c Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Proper Mounting Position (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper Mounting Position (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-M9 type D-F9 W type 2 6 5 8 12 11 In order

Series CE1

flange Double clevis Bore size (mm) LT* LX FT* FV LA LB LE LH A LD LS LY LZ FD FG FL FX FZ M A A CD CL CU CW CX CZ RR T 32 40 50 63 59 65 148 5.8 11.2 6.6 52.5 30 112.4 57 72.5 71 5.5 69.5 8 48 56 65 34 139 161 10 151 14 20 18 36 10 57.5 71.5 65.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 83.5 78 8 14.7 9 39 173.4 79 95 6.6 9 67 76

99

) FGH100-06 {Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure

VCA

Description Material q w e r t Solenoid coil IN Armature assembly Stainless steel, HNBR, PPS Return spring Stainless steel O-ring HNBR Body Aluminum Bracket Assembly Dimensions J 1.5 A C 4-6 B D Valve mounting screws 2-H Valve mounting hole Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D H J Assembly part no.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

IDX-OM-W014

-1 10 1 IDX-OM-W014 10 M 10-2 ADM200 IDU3E6E-10-M IDU3E6E-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDU Series 10-2 10 2 IDX-OM-W014 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W014 11 R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A)

IDX-OM-W094

7.4 CM IDFA60/70 OLR AC 230V(50Hz) FM MC PRS PRS2 ILS THR C01 C11 TB IDFA80/90 CN GFCI EDV PE BK WH GR SY BU BR AC 230V(50Hz) G/Y / IDFA60/70/80/90 Series 7-4 IDX-OM-W094 7.5 IDFA60/70/80/90 Series 7-5 IDX-OM-W094 A 8 A 8.1 8.2 A (10) 8.3 8.4 IDFA60-20-A IDFA70-20-A IDFA80-20-A IDFA90-20-A 10 m 3/min(ANR) 186 300 462 576 10 1) ANR 65% 2) IDFA60/70/80/90 Series

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

NCY2 series

(l) 3 Vertical movement '1 .9+lo 13.23 o".2.55 l"+3 a 5.25 l"+35 a.17.5 44.O 3.4+l; aa.2 _ 4.2+la lo: D$tance iiom mounling sudace to cenler ,q'60 lo+6.0 cr.105 lo+7[ o:Drslance I'on moJnLnq sLnace Io load s co.1er ol . Nore) Priicipally, itbe@ms imposible 10 operal.

VXD21/22/23

Note 4) 32 A to 50 A are 80C. 17-3-36 5 Series VXD21/22/23 Pilot Operated 2 Port Solenoid Valve For Air, Gas, Water and Oil The VX series will be revised shortly. How to Order (Normally Open) VXD21 2 VXD22 VXD23 Bracket Nil B None With bracket VC Model Thread connection sizes are available from 03 to 10.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

(l) 3 Vertical movement '1 .9+lo 13.23 o".2.55 l"+3 a 5.25 l"+35 a.17.5 44.O 3.4+l; aa.2 _ 4.2+la lo: D$tance iiom mounling sudace to cenler ,q'60 lo+6.0 cr.105 lo+7[ o:Drslance I'on moJnLnq sLnace Io load s co.1er ol . Nore) Priicipally, itbe@ms imposible 10 operal.

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs A B A B Proper auto switch mounting position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W D-F7LF Bore size (mm) B B A A B A B A B A 32 11 10 50 51 3 43 6 46 5.5 45.5 40 13.5 12.5 56.5 57.5 5.5 49.5 8.5 52.5 8 52 50 18 19 61.5 60.5 11 53.5 14 56.5 13.5 56 63 22 21 67 66 14 59 17 62 16.5 61.5 Auto switch mounting height

VCB

Use caution, as there is a danger of being burned if a valve is touched directly. 2. Valves may reach high temperatures when continuously energized. Use caution, as there is a danger of being burned if a valve is touched directly. SOL. AC AC SOL. Without light AC SOL. Light With light 10 Series VCB Specific Product Precautions Be sure to read before handling.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Air pressure supplied from A operates on surfaces 1 and 2. (extension) A B Air pressure supplied from B operates on surface 3. (retraction) A B Mounting accuracy improved Positioning holes are provided on the work piece mounting surface for easy alignment. Regulator with check valve is unnecessary A regulator with check valve normally required for a lifting circuit becomes unnecessary.

LECA6_C

L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8