Model Selection 1

+ 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (cubic decimeter) of SI unit is good to be described by l (liter), too. 1 dm3 = 1 l S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] t : Temperature [C] Note) Formula for subsonic flow

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(1) Low wattage type Y B C A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

A (1.0 W) K (1) C A B VFN (0.5 W) Low wattage type Y YZ: DIN terminal YOS: DIN terminal Without connector YS: DIN terminal Y: DIN terminal YO: DIN terminal Without connector External pilot type R (2) Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-18.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

EXxx-OMN0035CN

4 1 1 2.7 k 2.7 k 5 5 FE FE FE FE IP67 -20No.EX-OMN0035CN-A (2)EX600-DXC 1 24 V() 3 0 V() 4 EX600-DXPC EX600-DXNC 1 24 V 1 24 V *1 DC24 V 3 0 V DC24 V 3 *2 0 V 4 4 2.7 k 2.7 k 1EX600-DXPC1 2EX600-DXNC1 IP67 2 OFF 0.5 mA () OFF 0.5 mA 3 0.5 mA SI -21No.EX-OMN0035CN-A (3)EX600-DXE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 24 V() 11 0 V() 12 0 V() 13 FE 14 1 15 3

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

NB N K B S + Stroke H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR I J K KA LL LM B D C DL E GA GB 40 50 63 Up to 1000 Up to 1000 Up to 1000 40 45 50 57.5 63.5 69 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30 30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

MK

Nm Standard tightening torque 4 to 6 8 to 10 14 to 16 Bore size (mm) 20, 25 32, 40 50, 63 4.1-17 Series MK2 20, 25 With arm Rear flange Rear boss mounting Model Ah9 A B C D 0 0.043 0 0.043 13 15 Model MK2G20 MK2G25 MK2l20-llF MK2l25-llF 0.15 0.1 60 64 39 42 0.1 25.5 28 0.15 48 52 Through hole & both ends tapped (standard) Model Hh9 F G lA B C D E I J K L 0 0.052 0 0.052 0.15 0.15 MK2B20 0.15

Series VCL

Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 1 Output, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Current Output, Auto-Shift, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Current Output, Auto-Shift, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -