NCA1

KK NCM 1/32 R NCA 0.001 0 EA MM BA TD UV E AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF A Y AA LF B P BA XI C D DD E EA EE FA G MM J R KK Bore size (in) 200 (2") 1 5 1/8 1 3 1.18 5 2.56 1 3/8 1 1/8 2.09 2.6 3 5/8 1 1/2 2.40 1 1/8 3.29 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1 1.26 1.06 1.84 3/4-16 250 (2.5") 1 5 1/4 1 3 1/2 1 1.18 5 1/2 3

NCA1

1/2 3/4 0 1 1/4 4 1/2 1/4 3/8-24 4 1/2 2 1 1/4 1/2 5/8 4.7 1 1/2 1 5/8 7 7/8 1-14 1 3/8 Oversized Rod-Rod Side Flange Style: NCA1F (XB5) P + Stroke Y C 2-EE (NPTF) 4-FB (Hole) AA D across flats KK B MM EA BA E R A W F G J 4-DD TF LF + Stroke WF ZB + Stroke UF Bore size (in) MM KK A AA B BA C D DD E EA EE F FB G J R TF UF W WF LF Y P ZB 200 (2") 1 3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 7/8 5/16

Series AP500

SS Hastelloy C-22 PCTFE (Option: Vespel) Flow Characteristics 2.

CJ2

Stroke Rod end nut Applicable bore (mm) 6 10 16 Z + 2 x Stroke B C d H Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

energy saving effect

Cooling Capacity HRSH100-A-20/40HRSH100-W-20/4014 16 Ambient temperature 32C Facility water temperature 32C 14 12 Cooling capacity [kW] Cooling capacity [kW] 10.5 10 11.5 12 10 Ambient temperature 43C 8 8 Facility water temperature 40C 6 6 Ambient temperature 45C 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH150

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

CJ2

2 !3 !

NCA1

2.76 1 3/8 2.34 4.64 2.72 9.38 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 27/64 3.32 1 3/8 2.34 4.64 2.72 9.38 (in) Bore (in) b c d SN NT ND TN 150 (1.5) 1 1/2 1.25 1.80 2 1/4 1/4-20 9/32 5/8 200 (2) 1 21/32 1.64 2.19 2 1/4 5/16-18 7/16 7/8 250 (2.5) 1 21/32 1.64 2.19 2 3/8 3/8-16 19/32 1 1/4 325 (3.25) 2 9/32 2.48 3.37 2 5/8 1/2-13 5/8 1 1/2 400 (4) 2 9/32 2.48 3.37

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

3 Mounting screw Finger assembly MHZL2-D MHZL2-S MHZL2-C MHZL-A1003 MHZL-A1603 MHZL-A2003 MHZL-A2503 Piston assembly wo!0!2!

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

PSxx-OMU0005CN

OUT2 OUT2 OUT1 OUT1 [F 1] OUT1 1 2 2 -33No.PS-OMU0005CN-C H_1 WH1 WH1 H_1 WH1 WH1 OFF OFF 1Er689o.rEr12() : OUT1OUT2"1""2"()P_1P_2 -34No.PS-OMU0005CN-C [F 2] OUT2 OUT2 ONON 34 <> [F 2] OFF [OFF]OFF 25 [Err] [P_2] [P2L][P2H] [P_2][n_2] P n (62 ) -35No.PS-OMU0005CN-C 25 [H_2] [WH2] (62 ) 27 ON ON ON ON OFF OFF OFF OFF OUT2 OUT2 OUT1 OUT1 [F 2] OUT2 1 2 2 -36No.PS-OMU0005CN-C

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Keeper plate Rod end nut 30 d JIS class 2 threads 2-d l 0.2 B D C m T H H B Material: Rolled steel Material: Carbon steel Bore size (mm) Cap bolt Bore size (mm) Rod series Part no.

Vacuum Unit

ue DC() Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less FUNC Blue DC() Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V

Title not found

Connector C (14.2) Cable length (L) 1 3 5 8 A B C (16.6) (23.7) (6.5) Connector A (12.7) (5.6) 1 3 2 4 1.5 m 3 m 5 m 8 m 3 2 1 (13.5) 1 4 A 1 2 (18) B 10 m (6.5) (14.7) 15 m 15 16 (30.7) (11) L Connector B 20 m (10) Connector D Produced upon receipt of order Connector C terminal no. 1 2 3 Connector A terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector D terminal no. 12

0.4

Note 2) Metal seal only Note 3) When -COM. is specified for the SI unit, select and mount the valve of negative common. Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 10-SV3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (g) Note 2) Flow rate characteristics Note 1) Port Valve model Actuation type M12 waterproof connector (Cable length 300 mm) size C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv Single 250 (121) 4.1 0.41 1.1 4.1 0.29 1.0 2 position Double 253 (124) 10-SV300--02 Closed center 3.0 0.43 0.80 2.6 0.41 0.72

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S