VS7-6

Blank plate (Air filter, Regulator) Manifold blocks necessary for mounting 2 2 2 2 2 2 2 1 F.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

VFRA3000

5 Port Air Operated Valve Series VFRA3000 Model Configuration Port size Rc(PT) Effective area (mm2) (Cv) Pilot port size Rc(PT) Weight (kg) Valve model 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3111-03 VFRA3211-02 2 position double 0.71 1 8 VFRA3111-02 2 position single 0.61 1 8 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3211-03 VFRA3311-02 3 position closed center 0.72 1 8 1 4 3 8 34.2 (1.9) 36 (2.0) PA,

ZQ-OM01301

ZQ-OM01301-A Vacuum Pump System Manifold ZZQ108A-S O C-A (1) (2) (3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 2) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 2) Select S for the Option Symbol (10). (4) Shipping condition (2) Vacuum pressure

Compact Vacuum Ejector Series ZA

02 Symbol 0 2 3 5 6 P Applicable tubing O.D.

IZx-OMP0064

IZ*-OMP0064 E P r o d u c t Ionizer Model/Series IZS4 Series Contents Safety Instructions . 1. How to Order . 1-1. Ionizer . 1-2. Accessories . 1-3. Option . 2. Installation . 2-1. Installation of ionizer . 2-1-1. Selection of piping port size . 2-1-2. Distance for installation . 2-1-3. Mounting and installation of the bracket . 2-2. Installation of the external sensor. 2-3.

Digital Flow Switch (Integrated display type)

R S16 N -2 to 5 -82No.PF-OMW0007-E 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

Electro-Pneumatic Valve NVEP/NVEF Series

Fluct. l\,lax. +1% @ 79'F (25'C) {1A F.S.) Max. +2% @ 79'F (25'C) (1A F.S.) vEA 250 vEA 251 vEA 252 Cperating Temp.

VZ3000

Description With foot bracket Note For VZ312 0 3 DXT170-34-1B AN120-M5 Noise reduction: 21dB or more (8 x 17 mm) Silencer 3-3-18 5 Port Solenoid Valve Body Ported Series VZ3000 Flow Characteristics/Weight Flow characteristics Note) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) b C [dm3/(sbar)] b C [dm3/(sbar)] Cv

A

5.27 AIR PREPARATION AUTO DRAINS AUTO DRAIN SERIES (N)AD Port Sizes 14~1 Float Type Automatic Drain Valve T E C H N I C A L SPECIFICATIONS Type (N)AD402 (N)AD600 Operating Pressure 1.5~9.9 Bar 3~9.9 Bar 22~145PSI 45~145PSI Max Supply Pressure 15 Bar / 220PSI Max Operating Pressure 9.9 Bar / 145PSI Ambient & Fluid Temperature 5 ~ 60C / 40~140F Port Size 1/2 3/4, 1 Drain Port 3/4 3/4, 1 D I

5 Port Solenoid Valve Series SQ1000/2000

B Note 2) Note 1) Except double (latching) C Note 2) Note 1) The function symbol is D for double solenoid specifications.

Digital Flow Switch (Remote type sensor unit)

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

Air-hydro Unit

Combinations Converter nominal size Control valve Valve unit size Combined valve 2 0, 1, 2, 3 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 0 1 2 3 0 1 2 3 0 1 2 0 1 2 S 63 Speed controller Combined valve (Stop valve, Skip valve) The stop valve for intermediate stopping and the skip valve for last-forwarding are compound integrated

HRX-OM-T002

2-2 Names of the parts (This drawing shows HRS090-A-20.)

Electro-Pneumatic Proportional Valve Series VEF/VEP

3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(at 0.5 MPa, without surge voltage suppressor) Note 2) Minimum operating frequency is once in 30 days. (Based on JIS B 8375.) Note 3) Note 1) and Note 2) are with controlled clean air. Note 4) Based on JIS C 0920.

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: P (Paper, Cotton Material), Nominal Filtration Accuracy: 5 μm, Element Seal Material: N (NBR), Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: P (Paper, Cotton Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: N (NBR), Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]