JA/JAH/JB/JS

D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10 x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14

JA/JAH/JB/JS

JA20 to 160 Without C-dimension Center of sphere (mm) Maximum operating tension and compression force (N) M Maximum thread depth P Allowable eccentricity U Applicable bore size (mm) Center of sphere R Weight (kg) Model A B C D E F G H Nominal size Pitch Standard Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 6 10 (CJ1) 10 (CZ1), 15 (CJ1) 15 (CZ1) 20 25, 30 40 50, 63 80 100 125, 140 160 JA6

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

EXxx-OMV0017-D

Remote units 0 / 15 / 31 / 63 / 127 Remotes (EX600-WEN#) 0 / 15 / 31 Remotes (EX600-WPN#) 15 Remotes Set the number of Wireless Remote units which are registered to the Wireless Base unit.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

Compact Type Dual-Rod Cylinder Series CXSJ

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

RSQ

, Chamfered, Roller 0.74 0.80 0.86 Double acting with spring loaded REC 40 Model C 5 D 40 48 53 55 60 65 60 65 70 75 80 85 75 80 85 Mounting bolt M3 x 45l M3 x 55l M3 x 60l M5 x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20

Cylinder with Lock Series CNS

B TX TZ N N TT M H S + Stroke ZZ + Stroke With rod boot Z1 + l + 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J K KA 125 140 160 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 15 31 25 to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 15 31 30 to 1000 56

Hydraulic Cylinders

CHKDB Bore size Rod end thread type Auto switch Quantity XC64 Stroke With air release valve Dimensions CHKDB--XC64 A C C B A B C Bore size (mm) 20 16.5 14.5 7 25 17 15 8 32 19.5 17 10 40 20.5 17.5 10 50 22 19.5 10 63 25.5 22 10 80 30 26.5 15 100 36 33 15 Note) Dimensions other than those highlighted above are standard. 12

CE

Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

CP95 NCM Stroke range Bore size (mm) NCA Type B C A CDH10 CT CX CZ EA J K MM N AL D F KA P RR E FA L G (mm) 125 140 160 180 200 250 300 1/2 +0.084 0 +0.3 +0.1 0 0.2 16 M14 x 1.5 65 M30 x 1.5 50 47 145 115 17 36 59 43 15 31 35 29 90 14 32 64 25 Up to 1000 Lube Non-lube Air-hydro D1/2 +0.084 0 +0.3 +0.1 0 0.2 16 M14 x 1.5 75 M30 x 1.5 50 161 17 59 15 35 47 128 36 90 43 14 31 32 36 72 28 Up

RB/RBL/RBQ

RB(C)0805 RB(C)0806 RB(C)1006 RB(C)1007 RB(C)1411 RB(C)1412 Model RB(C)2015 RB(C)2725 O.D. thread (mm) M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 Thread prepared bore (mm) 9.1 + 0.1 0 18.7 + 0.1 0 7.1 + 0.1 0 12.7 + 0.1 0 25.7 + 0.1 0 Tightening torque (Nm) 1.67 3.14 10.8 23.5 62.8 Operating Environment 2.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor unit Monitor unit Monitor unit Monitor unit (15 to 35C) 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

2/3 Port Valve

Air operated External pilot solenoid Selection procedures Table q Applicable fluid check list Body material Seal material BC6: Standard Aluminum: L Stainless steel: S NBR : A FPM : B EPR : C NBR : A FPM : B EPR : C NBR : A FPM : B EPR : C Fluid Fluid Air (Standard, Dry) Low vaccum (1 torr) Refer to Table q to check that the desired fluid is applicable.

3 Port Solenoid Valve Metal Seal Series VZ200 1

dm3/(sbar)] b Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Cylinder with Lock Series CLS

LS + Stroke B ZZ + Stroke With rod boot 75 l 15 40 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA LH LS LT A AL B BA BB BC BY BZ C D GA GB GC J 15 31 85 298 8 50 47 145 75 18 110 136 115 36 16 107 58 M14 x 1.5 to 1400 15 31 100 298 9 50 47 161 78 18 2 110 146 128 36 16 114 64 M14 x 1.5 to 1400 17 36 106 338 9 56 53 182 95 23 5 132 169 144 40 18.5 130 74 M16