Air Slide Table Series MXW

V 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit A96V A96 5 V Yes 24 V Grommet A93V A90V A93 A90 100 V Relay, PLC 12 V 2-wire 100 V or less No IC circuit Solid state auto switches marked with are produced upon receipt of order.

Ionizer Nozzle type IZN10 Series IZS

Metal ( shaded) part Metal ( shaded) part Tap for ground wiring Resin part ( shaded) 454 Ionizer IZN10 Series Power Supply Cable Connection Circuit NPN PNP Ionizer Ionizer IZS Brown +24 VDC Brown +24 VDC +24 V +24 V Power supply 24 VDC 10% 0 V +24 V Power supply 24 VDC 10% 0 V +24 V Blue 0 V Blue 0 V IZN IZN INPUT PLC OUTPUT OUTPUT PLC INPUT IZF Orange Discharge stop signal Orange Discharge

Nozzle Type Ionizer

Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.

Fieldbus System

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

SMC Wireless System EtherNet/IP ® compatible

Signal name 1 24 V 1 24 V (Control and input) (Control and input) 2 24 V (Output) 2 24 V (Output) 3 0 V (Control and input) 3 0 V (Control and input) 4 0 V (Output) 4 0 V (Output) 5 Not used (4) EX600-ED5-# PWR IN: M12 4-pin Plug A-coded PWR OUT: M12 5-pin Socket A-coded Configuration Pin No. Signal name Configuration Pin No.

VXA21/22

Note 2) Value on option "V" (Non-leak, Vacuum).

CE

F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 200 V A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 12 V 2-wire Connector 3-wire (NPN) Relay, PLC Yes 24 V Diagnostic

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

CE

F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 200 V A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 12 V 2-wire Connector 3-wire (NPN) Relay, PLC Yes 24 V Diagnostic

51

circuit 5 V, 12 V 5 V With diagnostic output (2-color indicator) 100 V Grommet IC circuit 100 V or less B54 B64 100 V, 200 V Relay, PLC 12 V 2-wire 24 V 200 V or less C73C C80C Connector IC circuit 24 V or less B59W Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

PF-OMN0009_C

1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L

rep-filter-e

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

200 V, 12 V, 24 V, 48 V, 110 V, 220 V 240 V With surge voltage suppressor (S) (Grommet type) With light/surge voltage suppressor (Z) (Grommet terminal) (Conduit terminal) (DIN terminal) L plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Industrial Filters Replacement Procedure

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

Compact

BMY3-016 Auto switch model Tightening torque D-M9l(V) D-M9lW(V) 0.10 to 0.15 210 Solid State Auto Switch Direct Mounting Type D-M9N(V)/D-M9P(V)/D-M9B(V) RoHS Refer to SMC website for the details of the products conforming to the international standards.

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !