5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Manifold Series SY3000/5000/7000 Weight Tables Series SY7000 Series SY3000 Weight g Port size Weight g Port size L type, M type plug connector Valve model Type of actuation Grommet type L type, M type plug connector A, B Valve model Type of actuation DIN terminal Grommet type A, B Single 43 47 2 position Double Single 58 65 97 101 124 2 position SY360--M5 M5 x 0.8 Closed center Double 113 120

5 Port Solenoid Valve SY Series

-M(-F2) 3 4 5 SY5 20-D(-F2) 3 4 5 SY5 20-W0(-F2) 3 4 5 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 157.8 Max. 10 53.4 12.7 28.1 [35.1] 42.1 27 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 63.5 [65.7] 53.7 [55.9] 73.5 72.6 62.6 55.2 67.8 48.7 45.3 32.7 139.6 [144] 120

Precision Clean Regulator Series SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

OMR0032

Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

EXxx-OMZ0016

(Wch: 112-119) 19 Remote registration information (Wch: 8-15) Remote registration information (Wch: 1-7)*1 20 Remote registration information (Wch: 24-31) Remote registration information (Wch: 16-23) 25 Remote registration information (Wch: 104-111) Remote registration information (Wch: 96-103) 26 Remote registration information (Wch: 120-127) Remote registration information (Wch: 112-119

REA/REB

50 5.6 10 10 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 130 11 60 100 10 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 120 160 70 9.2 12 11.5 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25 47.5 17 M10 x 1.5 190 10.5 90 140 12 15 136 9.2 Rc 1/4 M10 x 1.5 M8 x 1.25 M20 x 1.5 14 56 PA dimensions are for split from center.

10

1/RJ20 70 140 20 RJ2015L RJ2725L RJ1412L 60 120 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 15 100 50 RJ2725H RJ1412H 80 40 RJ2015H 10 60 30 RJ1410 40 20 5 20 10 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 500 1000 1500 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] 882 Model Selection RJ Series Model Selection Graph The model selection graphs

Rotary Table/

50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume of air which is expended by the rotary tables reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

Precision Clean Regulator

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to