0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Compact Slide Series MXH

be a diagonal direction.

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

MHL2

Fingers synchronized by a rack and pinion mechanism Model/Stroke Max operating frequency (c.p.m) Opening/closing stroke (L2L1)(mm) Weight (g) Width at closing (mm) (L1) Width at opening (mm) (L2) Bore size (mm) Model Built-in dust proofing mechanism 60 20 40 60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 56 78 96 68 110 130 82 142 162 100 182 200 150 198 242 188 246 286 76 118 156

CV/MVGQ

auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches Piping MI W S 2 pcs. 1 pc. n pcs.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M1 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max. at 420 mm/s in Graph (3).

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M1 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max. at 420 mm/s in Graph (3).

MGP

MGP-A 25 16 25 16 50 2025 50 50 20 1 2 21 22 NBR 23 24 25 63100 26 NBR 27 NBR 28 29 A NBR 30 B NBR 31 C NBR 1625 32100 1663 80100 5 1625 32100 7 8 9 10 11 12 13 16 20100 15 16 17 18 19 3 16 1650 4 6 / (mm) (mm) 16 MGP16-A-PS 50 MGP50-A-PS 20 MGP20-A-PS 63 MGP63-A-PS 25 MGP25-A-PS 80 MGP80-A-PS 32 MGP32-A-PS 100 MGP100-A-PS 40 MGP40-A-PS

REC

With this actuation, piston speed accelerates (or maintains the same speed). 10-2-100 14 Sine Cylinder Series REC Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-C7/C80 D-G5NTL 8.5 12 24.5 16 HS HS Auto switch A 26 B A 33 B RE A B D-B5/B64/B59W D-H7C Auto switch Auto switch REC 8.5 12 CX 24.5 16 CY HS HS A 38.2 B A 33 B 6.5 MQQ M Courtesy of Steven

CNG

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

PFxx-OMA1007

Use a soft cloth to remove stains.

Vacuum Unit Ejector / Vacuum Pump System

-101 kPa Pressure switch for vacuum Open collector 2 outputs F -100 to 100 kPa V -100 to 100 kPa Pressure switch with energy saving function Open collector 1 output [2] Output specifications [3] Unit specifications A NPN Nil Unit selection function Note 1) B PNP M SI unit only Note 2) Note 1) Unit selection function is not available in Japan due to new measurement law.

ML2B

MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

[Horizontal and lateral mounting] A B SOL.3 W RE A B A magnetic field of 14.5 mT is equivalent to a position that has about 18 cm radius from a welded part using about 15,000 amperes of welding amperage. When using it in a stronger magnetic field, cover the sensor with magnetic and shield it.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Rotary Table/Vane Style Series MSU

For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 DSize Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 Adjustment bolt (A) Adjustment bolt (B) 7 30 60 50 0.9 20 For 180

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

1.5 12 11 12 6.6 6.6 6H9 ( ) depth 6 +0.030 0 B A 32 11.5 32 11.5 G (NN 1) x H H B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223