Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

11-cq2-e

6 Single acting, spring return Piston seal CQ2B12-S-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B16-S-PS Gasket CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size.

CUJ

Bore size (mm) Piano wire u Return spring CUJB4-S-PS 4 Sintered metallic BC i Bronze element CUJB6-S-PS 6 Set of nos. above !1 and an exclusive grease pack. o Magnet CUJB8-S-PS 8 Steel Nickel plated !0 Rod end nut CUJB10-S-PS 10 NBR !1 Piston seal NBR !2 Rod seal NBR !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Peltier-type Chiller Thermo-con/ Compact Type

0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

VXZ

PAX 0 * PB / / / / 1 ! ! 17-3-61 2 The VX series will be revised shortly.

Parallel Type Air Gripper

2 +0.043 MHZ2-16 M40.7 2.1 8 17H9 0 2 +0.043 MHZ2-20 M5 x 0.8 4.3 10 21H9 0 3 +0.052 MHZ2-25 M61 7.3 12 26H9 0 3.5 +0.052 MHZ2-32 M61 7.9 13 34H9 0 4 +0.062 MHZ2-40 M81.25 17.7 17 42H9 0 4 +0.062 Use the holes on the body end surface for positioning.

MHx-OMU0057

Nm MHZ2-10 M2.50.45 0.31 MHZ2-16 M30.5 0.59 MHZ2-20 M40.7 1.4 MHZ2-25 M50.8 2.8 MHZ2-32 M61 4.9 MHZ2-40 M81.25 11.8 6 - (Lmm) Nm (mm) (mm) L MHZ2-10 M30.5 0.88 6 11H9 0 2 +0.043 MHZ2-16 M40.7 2.1 8 17H9 +0.043 0 2 MHZ2-20 M50.8 4.3 10 21H9 +0.052 0 3 MHZ2-25 M61 7.3 12 26H9 +0.052 0 3.5 MHZ2-32 M61 7.9 13 34H9 +0.062 0 4 MHZ2-40 M81.25 17.7 17 42H9 +0.062 0 4 Nm Lmm MHZ2-10 M30.5 0.9

Electro-pneumatic Proportional Valve Series VEF/VEP 1

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

100kPa to 0 100kPa to 0.6 100kPa to 0.6 100kPa to 0.6 100kPa to 0.6 100kPa to 0 100kPa to 0 10-V114 10-V114A 10-V124 Note 1) 0 to 0.7 0 to 0.7 0 to 0.7 0 to 0.7 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.

Rotary Table

Specifications Size 1 2 3 7 Fluid Air (Non-lube) Maximum operating pressure 0.7MPa Minimum operating pressure 0.1MPa Ambient and fluid temperature 0 to 60C (with no freezing) Cushion No cushion Lubber cushion Allowable kinetic energy 0.001J 0.0015J 0.002J 0.006J Angle adjustment range 0 to 190 Maximum rotation 190 Rotation time adjustment range 0.2 to 0.7 s/90 0.2 to 0.1 s/90 Cylinder bore

VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 Courtesy of Steven Engineering,

IC

/C VBA Error indication Displayed on pressure indication LED Operating temperature range 0 to 50C VE Storage temperature range 20 to 60C Operating humidity range 0 to 85%R.H.

VKF300

Grommet type (G) Without light Without light Without light With light With light With light S Non-locking push type (tool required) AC Hole dia. 5 Z None S 12 VDC or less 9 None Z There are manual overrides in 2 directions, on the top and on the side (solenoid side).

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

7.4

S070P B 5 G 1 Base Mounted Body Ported Base Mounted EX510 S 01 0 Voltage Accessory Output specifications 0 NPN output (Positive common) 1 PNP output (Negative common) Symbol Specifications Nil None 1 Stopper plate is included.

VCA

S = 6mm 5. S = 15mm 4. S = 10mm 7. S = 27mm 5. S = 15mm 7. S = 27mm 10. S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1.

PSxx-OMM0006CN

[F 4] 34 [F 5] / 36 [F 6] 38 0 [F11] 39 1000 [F80] 40 OFF [F81] 41 OFF [F90] 42 OFF [F97] 44 OFF [F98] 46 [F99] 48 OFF -26No.PS-OMM0006CN-E [F 0] (kPa/MPa) <> [F 0] ZSE ZSE [F 0] ZSE40AF ZSE40A ISE40A MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 kgf/cm 2 0.001 0.001 0.01 bar 0.001 0.001 0.01 psi 0.02 0.01 0.1 InHg 0.1 0.1 mmHg 1 1 -27No.PS-OMM0006CN-E [F 1] OUT1 OUT1 ONON OUT1ONOFF

CUJ

Bore size Contents 7 Piano wire Return spring CUJB4-S-PS 4 8 Sintered metal BC Bronze element CUJB6-S-PS 6 Above number 11 and an exclusive grease pack. 9 Magnet CUJB8-S-PS 8 10 Nickel plated Steel Rod end nut CUJB10-S-PS 10 11 NBR Piston seal 12 NBR Rod seal 13 NBR Tube gasket 5 Mini Free-mount Cylinder Series CUJ Dimensions for 4 Double Acting/Single Acting Without magnet/CUJB4 Note) The