Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

3 Position Cylinder Series RZQ

(mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 32 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc 1/8 24.5 14 10 5.5 7 4.5 49.5 14 40 110 92 28 14 M10 x 1.5 26 57 16 52 35 9 69 5 24 18 40 5.5 M6 x 1.0 9 Rc 1/8 14 10 5.5 7 4.5 14 50 118.5 96.5 M8 x 1.25 35 14 M10 x 1.5 30 71 16 64 37 12 86 7 30 22 50 6.6 11 Rc 1/4 17 14 3 8 5.5 19

Solid State Auto Switches

Weight (g) D-C73C D-C80C Auto switch model 0.5 m (Nil) 14 14 3 m (L) 53 53 Lead wire length 5 m (Z) 83 83 Lead wires with a connector indication Dimensions (mm) Part No. of Lead Wires with Connectors (Applicable only for connector type) Model Lead wire length Lead wire with connector D-LC05 0.5 m D-LC30 3 m D-LC50 5 m Indicator light D-C80C without indicator light DDMost sensitive position

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

5 Port Solenoid Valve SY Series

Body Ported Dimensions: Series SY7000 [ ]: AC 3 Position closed center / Exhaust center / Pressure center Grommet (G), (H): SY7 20(-F2) G H C8, N9 C10, N11 3 4 5 SY7 20-02(-F2) G H 3 4 5 (For mounting bracket) 2-M4 x 0.7 depth 6.5 20 20 (A, B port) 1/4 7 31.5 [38.5] 40 24.5 One-touch fitting (A, B port) Applicable tubing O.D. : 8, 5/16" : 10, 3/8" G: Approx. 300 H: Approx. 600 134.4 [138.8

JXCx-OMY0008

JXC-OMY0008-A 14.

IZx-OMT0049

) Note 14) Note 14) Note 14) Note 14) OFF ON OFF ON Ions are generated (green) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 18) Note 15) Note 16) Note 17) Note 17) OFF ON OFF ON OFF ON Key-lock (green) KEY Note 19) Note 19) Note 19) Note 19) Note 19) OFF Generate Note 19) Note 21) Ion generating status Note 20) Note 20) Note 21) Note 21) Stop High voltage power supply module

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Robotic cable only) Cable type Actuator side (14) (18) (Terminal no.)

Low Profile Slide Table Series MXF

14 1 4 4 MXF12 16 17.1 33.1 17.1 7.1 7.1 23.1 MXW MXF16 21.2 29.8 19.8 50.8 9.8 19.8 40.8 MXF20 23.4 MXJ 26.7 24.7 74.7 50.2 14.7 16.7 40.2 64.7 Solid State Auto Switch: D-M9BV, D-M9NV, D-M9PV, D-M9BWV, D-M9NWV, D-M9PWV MXP (mm) B B E MXY Stroke Stroke Model A 20 20 10 30 50 75 100 10 30 50 75 100 MTS MXF8 13.5 9 1 14 14 6 6 MXF12 16 17.1 17.1 33.1 9.1 9.1 25.1 MXF16 21.2 50.8

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

CEx-OMI0064

No. + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C (O/H/C) # 0 0 D W [CR] No. No. + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C (O/H/C) # 0 0 D W [CR] No. No. )0 ,+O H C 29 - # 0 0 P R [CR] No.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (14) Lead wire with connector (When individual lead wire is necessary, order with the part number below.)

VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

155

(Conduit terminal) P Pilot port 2 x 1/8" (Back side PE: Filter standard installation) J N I Manual override 2.3 12 Bracket G O L M F E 4 x K 2 1 D C H (2 locations) Main port A B A B C D E F G H I J K L M N O P Main port Model SGC2lll-ll10 SGC2lll-ll15 SGC3lll-ll20 SGC4lll-ll25 3/8 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 1/2 63 49.6 29 14.5 103.3 111.3 155.8

AC Servo Motor Driver (Pulse input type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Compact Electric Actuator Series LG1

(With L and + disconnected) (With L and + shorted) Lighted Lighted Shaded Shaded Indicator light (red) Indicator light (red) Light on Light on Light off Light off Timing chart ON ON Output transistor Output transistor OFF OFF Operating Operating Load 1 (relay) Load 1 (relay) Return Return H H Load 2 Load 2 L L 15

AZ1000

2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

JXCx-OMT0030CN

ID No. 0 1 16 1 063 1ABS 17 1 2INC() 18 H 2 065500 mm/s 19 L 20 3 21 2 4 2147483647 0.01mm 22 1 23 0 ID1 24 H 2 065500 mm/s2 25 L 26 H 2 065500 mm/s2 27 L 28 1 030 10% 29 1 030 10% 30 1 0255 mm/s 31 1 030 10% 32 H 2 065500 0.01mm 33 L ID2 3453 ID1 ID3 5473 ID1 ID4 7493 ID1 ID5 94113 ID1 012 38 - 122 IF IN Data IDIF ID=1 ID=1 bit 7 6 5 4 3 2 1 0 I_Address 32 33 1 LEC1ON 0OFF

MGC

Head side Bore size (mm) Effective cushion length (mm) Absorbable kinetic energy (J) MX JIS Symbol 20 R: 0.35, H: 0.42 R: 7.0, H: 7.5 MXU 25 R: 0.56, H: 0.65 R: 7.0, H: 7.5 32 7.5 0.91 MXS 40 8.7 1.8 MXQ 50 11.8 3.4 High kinetic energy generated by large loads and high speed operations can be absorbed by compressing air at the stroke end thus preventing shock and vibration being transmitted